CVD Silicon Carbide Coating MOCVD Susceptor

Ibisobanuro bigufi:

VET Ingufu SiC Coated MOCVD Susceptor nigicuruzwa cyiza cyane cyagenewe gutanga imikorere ihamye kandi yizewe mugihe kinini. Ifite ubushyuhe bwiza cyane hamwe nubushyuhe bwumuriro, ubuziranenge bwinshi, kurwanya isuri, bigatuma biba igisubizo cyiza kubisabwa gutunganya wafer.

Aho byaturutse:Zhejiang, Ubushinwa (Mainland)

Umubare w'icyitegererezo:Ubwato 3002

Ibigize imiti:SiC yashushanyije

Kurwanya amashanyarazi:11 μΩm

Gukomera ku nkombe: 58

Amashanyarazi:116 W / mK (100 kcal / mhr- ℃)

Icyitegererezo:Birashoboka

HS Code:6903100000

Izina ry'ikirango:VET

Ubucucike:1,85 g / cm3

Imbaraga zoroshye:49 MPa

Ivu: <5ppm

Ubwiza:Biratunganye

Gusaba:Semiconductor / Photovoltaic

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Ibicuruzwa birambuye

Ibicuruzwa

Ingufu za VETSiC Yashizwemo MOCVD Susceptorni ibicuruzwa bihanitse byakozwe muburyo buhoraho kandi bwizewe mubikorwa bya wafer. Kugaragaza urwego rwo hejuruSiC, itanga ubushyuhe budasanzwe, ubushyuhe bwumuriro, hamwe no kurwanya ruswa. Icyiza kuriIbikoresho bya MOCVD, iyisilicon karbide yatwikiriye susceptorihitamo nezawafergukura no kwagura ibikoresho igihe cyose.

Ibiranga ibicuruzwa ：

1. Kurwanya ubushyuhe bwo hejuru bwa okiside igera kuri 1700 ℃: Igicapo cacu cya SiC gitanga ubushyuhe budasanzwe, ndetse no mubidukikije bisabwa cyane MOCVD.

2. Isuku ryinshi nuburinganire bwumuriro: Silicon karbide susceptor yemeza umwanda muke hamwe nubushyuhe buhoraho kuri wafer, bigatuma ubuziranenge bwa kirisiti.

3. Kurwanya ruswa nziza: Kurwanya acide, alkalis, umunyu, hamwe nubutaka bwa reagent, susceptor yacu ikomeza ubusugire bwayo mubidukikije bitandukanye bya shimi.

4. Gukomera cyane, hejuru yubucucike, nuduce twiza: Iyi mitungo igira uruhare mubuzima burebure bwa serivisi no kongera igihe kirekire.

CVD silicon karbide yatwikiriye Inyungu nibisabwa

MOCVD susceptors itanga inyungu zingenzi mubikorwa bya semiconductor. Igicapo cya SiC cyongera ubwiza bwa wafer, kigabanya inenge, kandi kigahindura umusaruro. VET Ingufu zitanga ibicuruzwa byinshi bya karubide ya silicon ijyanye nibyifuzo bikenerwa ninganda za semiconductor ninganda zifotora.

Guhindura ibicuruzwa no gushyigikira tekinike

Nkumuntu wambere ukora uruganda rwa silicon karbide nibicuruzwa bya grafite, VET Energy itanga ibisubizo byabigenewe hamwe na coat zitandukanye nka SiC, TaC, karuboni yikirahure, na karubone pyrolytike. Itsinda ryacu ry'inararibonye rirashobora gutanga ubuhanga n'inkunga kubisabwa byihariye.