Ingufu za VETSiC Yashizwemo MOCVD Susceptorni ibicuruzwa bihanitse byakozwe muburyo buhoraho kandi bwizewe mubikorwa bya wafer. Kugaragaza urwego rwo hejuruSiC, itanga ubushyuhe budasanzwe, ubushyuhe bwumuriro, hamwe no kurwanya ruswa. Icyiza kuriIbikoresho bya MOCVD, iyisilicon karbide yatwikiriye susceptorihitamo nezawafergukura no kwagura ibikoresho igihe cyose.
Ibiranga ibicuruzwa ：
1. Kurwanya ubushyuhe bwo hejuru bwa okiside igera kuri 1700 ℃: Igicapo cacu cya SiC gitanga ubushyuhe budasanzwe, ndetse no mubidukikije bisabwa cyane MOCVD.
2. Isuku ryinshi nuburinganire bwumuriro: Silicon karbide susceptor yemeza umwanda muke hamwe nubushyuhe buhoraho kuri wafer, bigatuma ubuziranenge bwa kirisiti.
3. Kurwanya ruswa nziza: Kurwanya acide, alkalis, umunyu, hamwe nubutaka bwa reagent, susceptor yacu ikomeza ubusugire bwayo mubidukikije bitandukanye bya shimi.
4. Gukomera cyane, hejuru yubucucike, nuduce twiza: Iyi mitungo igira uruhare mubuzima burebure bwa serivisi no kongera igihe kirekire.
CVD silicon karbide yatwikiriye Inyungu nibisabwa
MOCVD susceptors itanga inyungu zingenzi mubikorwa bya semiconductor. Igicapo cya SiC cyongera ubwiza bwa wafer, kigabanya inenge, kandi kigahindura umusaruro. Ingufu za VET zitanga ibicuruzwa byinshi bya karubide ya silicon ijyanye nibikenewe byihariye bya semiconductor ninganda zifotora.
Guhindura ibicuruzwa no gushyigikira tekinike
Nkumuntu wambere ukora uruganda rwa silicon karbide nibicuruzwa bya grafite, VET Energy itanga ibisubizo byabigenewe hamwe na coat zitandukanye nka SiC, TaC, karuboni yikirahure, na karubone pyrolytike. Itsinda ryacu ry'inararibonye rirashobora gutanga ubuhanga n'inkunga kubisabwa byihariye.
Murakaza neza cyane gusura uruganda rwacu, reka tuganire kubindi biganiro!
