Isuku ryinshi CVD Ikomeye ya SiC

Isuku ryinshi CVD Ikomeye SiC Igice kinini cyerekanwe

Ibisobanuro bigufi:

Iterambere ryihuse rya SiC kristu imwe ukoresheje CVD-SiC amasoko menshi (Chemical Vapor Deposition - SiC) nuburyo busanzwe bwo gutegura ibikoresho byiza bya SiC byujuje ubuziranenge. Iyi kristu imwe irashobora gukoreshwa mubikorwa bitandukanye, harimo ibikoresho bya elegitoroniki bifite ingufu nyinshi, ibikoresho bya optoelectronic, sensor, hamwe nibikoresho bya semiconductor.

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Ibicuruzwa birambuye

Ibicuruzwa

Ingufu za VET zikoresha ubuziranenge bukabijesilicon karbide (SiC)byakozwe nubumara bwa chimique(CVD)nkibikoresho byo gukuraKirisiti ya SiCno gutwara imyuka yumubiri (PVT). Muri PVT, ibikoresho byatanzwe byuzuye muri aingirakamarohanyuma igashyirwa hejuru yimbuto.

Inkomoko yisuku ihanitse irasabwa gukora ubuziranengeKirisiti ya SiC.

Ingufu za VET kabuhariwe mu gutanga ibice binini bya SiC kuri PVT kuko ifite ubucucike buri hejuru y’ibintu bito bito biterwa no gutwika bidatinze imyuka ya Si na C. Bitandukanye no gucumura ibyiciro bikomeye cyangwa reaction ya Si na C, ntibisaba itanura ryabigenewe cyangwa intambwe itwara igihe kinini mu itanura rikura. Ibi bikoresho-binini bifite igipimo gihora gihindagurika, biteza imbere kwiruka.

Iriburiro:
1. Tegura isoko ya CVD-SiC: Icya mbere, ugomba gutegura isoko ryiza rya CVD-SiC yo mu rwego rwo hejuru, ubusanzwe rifite isuku ryinshi nubucucike bwinshi. Ibi birashobora gutegurwa nuburyo bwo guhumeka imyuka (CVD) mugihe gikwiye.

2. Gutegura Substrate: Hitamo substrate ikwiye nka substrate yo gukura kwa SiC imwe. Ibikoresho bisanzwe bikoreshwa mubutaka birimo karubide ya silicon, nitride ya silicon, nibindi, bifite aho bihurira na SiC imwe ikura.

3. Gushyushya no kuzamura: Shyira isoko ya CVD-SiC hanyuma ushyire mu ziko ryubushyuhe bwo hejuru kandi utange uburyo bukwiye bwo kugabanuka. Sublimation bivuze ko ku bushyuhe bwo hejuru, inkomoko yo guhagarika ihinduka mu buryo butaziguye kuva mu kirere kugeza mu myuka, hanyuma ikongera igahuza hejuru y’ubutaka kugira ngo ikore kristu imwe.

4. Kugenzura ubushyuhe: Mugihe cya sublimation, ubushyuhe bwikigereranyo nubushuhe bugomba kugenzurwa neza kugirango habeho kugabanuka kwinkomoko yo guhagarika no gukura kwa kristu imwe. Kugenzura ubushyuhe bukwiye birashobora kugera ku bwiza bwiza bwa kristu no kwiyongera.

5. Kugenzura ikirere: Mugihe cya sublimation, ikirere cyitwara nacyo kigomba kugenzurwa. Gazi ya inert isukuye cyane (nka argon) ubusanzwe ikoreshwa nka gaze itwara kugirango ikomeze umuvuduko ukwiye kandi wirinde kwanduzwa numwanda.

6. Iterambere ryihuse rya SiC imwe ya kristu irashobora kugerwaho binyuze mubihe bikwiye byo kugabanuka no kugenzura ubushyuhe bwa gradient.