Igishushanyo cya Graphite kubikorwa bya PECVD

Ibisobanuro bigufi:

Ingufu za VETPECVD Graphite Ubwato bwa Solar Panel nikintu cyateye imbere cyagenewe cyane cyane kubyara imirasire yizuba ikora cyane. Ikoreshwa muri Plasma Enhanced Chemical Vapor Deposition (PECVD), ubu bwato bwa grafite butuma ibintu bifata neza kandi bigashyirwa hamwe na firime ntoya kuri selile izuba. Yakozwe muburyo busobanutse kandi burambye, itanga ubushyuhe bwumuriro burenze urugero, irwanya ruswa nyinshi, hamwe n’umwanda muke, ibyo bikaba ari ngombwa mu gukora imirasire y’izuba ikora neza kandi yujuje ubuziranenge.

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Ibicuruzwa birambuye

Ibicuruzwa

Ingufu za VETPECVD itwara grafite itwara ibintu byujuje ubuziranenge ikoreshwa neza igenewe gahunda ya PECVD (plasma yongerewe imbaraga ziva mumashanyarazi). Iyi grafite itwara ibishushanyo bikozwe mubisukuye byinshi, byuzuye cyane bya grafite, hamwe nubushyuhe buhebuje bwo kurwanya ubushyuhe, kurwanya ruswa, guhagarara neza hamwe nibindi biranga, birashobora gutanga urubuga ruhamye rwimikorere ya PECVD, kugirango harebwe uburinganire nuburinganire bwa firime yoroheje kubitsa.

Abatwara ibishushanyo mbonera bya PECVD bafite ibintu bikurikira:

Isuku ryinshi: ibirimo umwanda muke cyane, wirinda kwanduza firime no kwemeza ubuziranenge bwa film.

Ens Ubucucike bukabije: ubucucike bukabije, imbaraga za mashini nyinshi, bushobora kwihanganira ubushyuhe bwinshi n’umuvuduko mwinshi ibidukikije bya PECVD.

Stability Ihame ryiza rihamye: impinduka ntoya murwego rwo hejuru, itanga inzira ihamye.

Thermal Ubushuhe buhebuje bwumuriro: guhererekanya neza ubushyuhe kugirango wirinde ubushyuhe bwa wafer.

Resistance Kurwanya ruswa ikomeye: gushobora kurwanya isuri imyuka itandukanye yangiza na plasma.

Service Serivisi yihariye: abatwara grafite yubunini nubunini butandukanye barashobora gutegurwa ukurikije ibyo abakiriya bakeneye.

Igishushanyo mbonera cya SGL:

Ibipimo bisanzwe: R6510
Ironderero	Ikizamini	Agaciro	Igice
Impuzandengo y'ingano	ISO 13320	10	μm
Ubucucike bwinshi	DIN IEC 60413/204	1.83	g / cm³
Fungura ubwoba	DIN66133	10	%
Ingano ya pore yo hagati	DIN66133	1.8	μm
Uruhushya	DIN 51935	0.06	cm² / s
Gukomera kwa Rockwell HR5 / 100	DIN IEC60413 / 303	90	HR
Kurwanya amashanyarazi yihariye	DIN IEC 60413/402	13	μΩm
Imbaraga zoroshye	DIN IEC 60413/501	60	MPa
Imbaraga zo guhonyora	DIN 51910	130	MPa
Modulus	DIN 51915	11.5 × 10³	MPa
Kwiyongera k'ubushyuhe (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Amashanyarazi (20 ℃)	DIN 51908	105	Wm^-1K^-1

Yashizweho muburyo bwihariye bwo gukora imirasire y'izuba ikora neza, ishyigikira G12 nini yo gutunganya wafer. Igishushanyo mbonera cyabatwara ibicuruzwa byongera cyane ibicuruzwa byinjira, bigafasha umusaruro mwinshi nigiciro gito cyumusaruro.

Ingingo	Andika	Umubare wafer
PEVCD Ubwato bwa Grephite - Urukurikirane rwa 156	156-13 ubwato bwa grephite	144
	156-19 ubwato bwa grephite	216
	156-21 ubwato bwa grephite	240
	156-23 ubwato bwa grafite	308
PEVCD Ubwato bwa Grephite - Urukurikirane 125	125-15 ubwato bwa grephite	196
	125-19 ubwato bwa grephite	252
	125-21 ubwato bwa grphite	280