Ingufu za VETUbwato bwa PECVD bwerekana ingirabuzimafatizo zikomoka ku mirasire y'izuba ni ingirakamaro ikoreshwa mu buryo bwa PECVD (plasma yongerewe imbaraga za pompe ziva mu kirere) zikoresha izuba. Ubwato bwa grafite bukozwe mu isuku nziza ya isostatike ifite ubukana buri munsi ya 15% hamwe n'ubuso bwa Ra≤1.6μm. Ifite ibintu byiza cyane nko kurwanya ubushyuhe bwo hejuru, kurwanya ruswa, no guhagarara neza. Iterambere ryiza cyane hamwe nubushyuhe bwumuriro byemeza firime imwe kandi bigateza imbere imikorere ya bateri. Irashobora gutanga ubwikorezi butajegajega mubushyuhe bwo hejuru hamwe n’umuvuduko mwinshi wa PECVD kugirango habeho gushira hamwe nubwiza bwa firime yizuba.
Igishushanyo mbonera cya SGL:
Ibipimo bisanzwe: R6510 | |||
Ironderero | Ikizamini | Agaciro | Igice |
Impuzandengo y'ingano | ISO 13320 | 10 | μm |
Ubucucike bwinshi | DIN IEC 60413/204 | 1.83 | g / cm3 |
Fungura ubwoba | DIN66133 | 10 | % |
Ingano ya pore yo hagati | DIN66133 | 1.8 | μm |
Uruhushya | DIN 51935 | 0.06 | cm² / s |
Gukomera kwa Rockwell HR5 / 100 | DIN IEC60413 / 303 | 90 | HR |
Kurwanya amashanyarazi yihariye | DIN IEC 60413/402 | 13 | μΩm |
Imbaraga zoroshye | DIN IEC 60413/501 | 60 | MPa |
Imbaraga zo guhonyora | DIN 51910 | 130 | MPa |
Modulus | DIN 51915 | 11.5 × 10³ | MPa |
Kwiyongera k'ubushyuhe (20-200 ℃) | DIN 51909 | 4.2X10-6 | K-1 |
Amashanyarazi (20 ℃) | DIN 51908 | 105 | Wm-1K-1 |
Yashizweho muburyo bwihariye bwo gukora imirasire y'izuba ikora neza, ishyigikira G12 nini yo gutunganya wafer. Igishushanyo mbonera cyabatwara ibicuruzwa byongera cyane ibicuruzwa byinjira, bigafasha umusaruro mwinshi nigiciro gito cyumusaruro.
Ingingo | Andika | Umubare wafer |
PEVCD Ubwato bwa Grephite - Urukurikirane rwa 156 | 156-13 ubwato bwa grephite | 144 |
156-19 ubwato bwa grephite | 216 | |
156-21 ubwato bwa grephite | 240 | |
156-23 ubwato bwa grafite | 308 | |
PEVCD Ubwato bwa Grephite - Urukurikirane 125 | 125-15 ubwato bwa grephite | 196 |
125-19 ubwato bwa grephite | 252 | |
125-21 ubwato bwa grphite | 280 |