Ubwato bwa Graphite bukoreshwa muri PECVD yumurongo utanga izuba
Umusaruro w'izuba bisaba inzira esheshatu zingenzi: gutunganya, gukwirakwiza, kurira, gutwikira, gucapa ecran no gucumura. Mu gukora ingirabuzimafatizo z'izuba, uburyo bwo gutwikira umuyoboro wa PECVD bukoresha ubwato bwa grafite nk'umubiri ukora. Igikorwa cyo gutwikira gikoresha plasma yongerewe imbaraga ziva mumyanda kugirango ushire firime nitride ya silicon imbere ya wafer ya silicon kugirango igabanye urumuri rwizuba hamwe nubuso bwa wafer ya silicon.
Ibiranga ubwato bwacu bwa PECVD:
1). Yemejwe gukuraho ikoranabuhanga rya "ibara ryamabara", kugirango umenye neza ko nta "coloe lens" mugihe kirekire.
2). Ikozwe mubikoresho byatumijwe mu mahanga bifite isuku ryinshi, ibirimo umwanda muke n'imbaraga nyinshi.
3). Koresha 99,9% ceramic kubiterane byubutaka hamwe nibikorwa bikomeye birwanya ruswa kandi byerekana ibimenyetso.
4). Koresha ibikoresho bitunganijwe neza kugirango umenye neza buri gice.
Ibisobanuro
Ingingo | Andika | Umubare wafer |
PEVCD Ubwato bwa Graphite --- Urukurikirane 156 | 156-13 ubwato bwa grafite | 144 |
156-19 ubwato bwa grafite | 216 | |
156-21 ubwato bwa grafite | 240 | |
156-23 ubwato bwa grafite | 308 | |
PEVCD Ubwato bwa Graphite --- Urukurikirane 125 | 125-15 ubwato bwa grafite | 196 |
Ubwato bwa grafite | 252 | |
125-21 ubwato bwa grafite | 280 |
Ningbo VET Energy Technology Co., Ltd ni uruganda rukora ubuhanga buhanitse rwibanda ku gukora no kugurisha ibikoresho byo mu rwego rwo hejuru, ibikoresho n’ikoranabuhanga birimo grafite, karubide ya silikoni, ububumbyi, kuvura hejuru nka SiC coating, TaC coating, karuboni yikirahure gutwikira, gutwika pyrolytike ya karubone, nibindi, ibyo bicuruzwa bikoreshwa cyane mumafoto yerekana amashanyarazi, semiconductor, ingufu nshya, metallurgie, nibindi ..
Itsinda ryacu rya tekinike rituruka mubigo byubushakashatsi bwo murugo, kandi byateje imbere tekinoroji nyinshi zemewe kugirango ibicuruzwa bikorwe neza kandi byiza, birashobora kandi guha abakiriya ibisubizo byumwuga.