CVD TaC isize plaque susceptor

Ibisobanuro bigufi:

VET Ingufu CVD TaC isize plaque susceptor nigicuruzwa cyiza cyane cyagenewe gutanga imikorere ihamye kandi yizewe mugihe kinini. Ifite ubushyuhe bwiza cyane hamwe nubushyuhe bwumuriro, ubuziranenge bwinshi, kurwanya isuri, bigatuma biba igisubizo cyiza kubisabwa gutunganya wafer.


Ibicuruzwa birambuye

Ibicuruzwa

UwitekaCVD TaC YashizwehoIsahani ya Susceptor ivuye muri vet-china ikozwe muburyo bwo gukora cyane muburyo bwo kubika imyuka ya chimique (CVD). Iyi susceptor igaragaramo imbaragaTaC (Tantalum Carbide), gutanga ubushyuhe budasanzwe, kurwanya imiti, no kuramba, bikabera igisubizo cyiza kubikorwa bya semiconductor hamwe nubushyuhe bwo hejuru. UwitekaCVD TaCitanga imbaraga nziza zo kurwanya okiside no kwambara, ituma suseptor ikomeza ubusugire bwayo nibikorwa byayo mubidukikije.

vet-chinaCVD TaC YashizwehoIsahani ya Susceptor igaragara cyane kubushobozi bwayo bwo gukwirakwiza ubushyuhe mugihe cya CVD, ikabika neza neza kandi ikazamura imikorere yibihimbano. Igifuniko cya Ta-C gitanga ubundi burinzi bwo kwirinda kwangirika kwimiti, kongerera igihe cya suseptor no kunoza imikorere muri rusange. Hamwe nikoranabuhanga rya tekinoroji ya CVD yateye imbere hamwe n’imiti yo mu rwego rwo hejuru ya TaC y’imiti, iyi susceptor ni ikintu cyingenzi mu nganda zisaba neza kandi zizewe mu bushyuhe bwo hejuru.

Byaba bikoreshwa mubikorwa bya semiconductor cyangwa ubundi buhanga buhanitse bwo gukoresha ,.CVD TaC Yashizweho Isahaniyashizweho kugirango ihuze ibyifuzo byinganda zigezweho. Dushyigikiwe nicyubahiro cya Semicera kubera guhanga udushya nubuziranenge, iki gicuruzwa gitanga imikorere isumba iyindi kandi iramba, bigatuma ihitamo kwizerwa kubikorwa bya CVD.

TaC coating ni ubwoko bwa tantalum karbide (TaC) yateguwe nubuhanga bwo kubika imyuka yumubiri, ifite ibintu bikurikira:

1.

2. Kwambara birwanya: Ipfunyika rya TaC irwanya cyane kwambara, irashobora kugabanya neza kwambara no kwangirika kw ibice bya mashini mugihe cyo kuyikoresha.

3. Kurwanya ubushyuhe bwiza bwo hejuru: Ipfunyika rya TaC rirashobora kandi gukomeza imikorere yaryo munsi yubushyuhe bwo hejuru.

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Igikoresho cya TaC
Igikoresho cya TaC

碳化钽涂层物理特性物理特性

Imiterere yumubiri ya TaC gutwikira

密度Ubucucike

14.3 (g / cm³)

比辐射率 / Emissivity yihariye

0.3

热膨胀系数 / Coefficient yo kwagura ubushyuhe

6.3 10-6/K

努氏硬度/ Gukomera (HK)

2000 HK

电阻 / Kurwanya

1 × 10-5 Ohm * cm

热稳定性 / Guhagarara neza

<2500 ℃

石墨尺寸变化 / Ingano yubushakashatsi

-10 ~ -20um

涂层厚度 / Ubunini

≥20um agaciro gasanzwe (35um ± 10um)

Ningbo VET Energy Technology Co., Ltd ni uruganda rukora ubuhanga buhanitse rwibanda ku gukora no kugurisha ibikoresho byo mu rwego rwo hejuru, ibikoresho n’ikoranabuhanga bikubiyemo grafite, karibide ya silikoni, ububumbyi, kuvura hejuru n'ibindi. Ibicuruzwa bikoreshwa cyane mumafoto yerekana amashanyarazi, semiconductor, ingufu nshya, metallurgie, nibindi ..

Itsinda ryacu rya tekinike rituruka mubigo byubushakashatsi bwo murugo, birashobora kuguha ibisubizo byumwuga kubwawe.

Murakaza neza cyane gusura uruganda rwacu, reka tuganire kubindi biganiro!

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