Wafer susceptor hamwe na TaC itwikiriye G5 G10

Ibisobanuro bigufi:

VET Ingufu Wafer susceptor hamwe na TaC itwikiriye G5 G10 nigicuruzwa cyiza cyane cyagenewe gutanga imikorere ihamye kandi yizewe mugihe kinini. Ifite ubushyuhe bwiza cyane hamwe nubushyuhe bwumuriro, ubuziranenge bwinshi, kurwanya isuri, bigatuma biba igisubizo cyiza kubisabwa gutunganya wafer.


Ibicuruzwa birambuye

Ibicuruzwa

TaC coating ni ubwoko bwa tantalum karbide (TaC) yateguwe nubuhanga bwo kubika imyuka yumubiri, ifite ibintu bikurikira:

1.

2. Kwambara birwanya: Ipfunyika rya TaC irwanya cyane kwambara, irashobora kugabanya neza kwambara no kwangirika kw ibice bya mashini mugihe cyo kuyikoresha.

3. Kurwanya ubushyuhe bwiza bwo hejuru: Ipfunyika rya TaC rirashobora kandi gukomeza gukora neza mugihe cyubushyuhe bwo hejuru.

.

Igikoresho cya TaC
6 (1)

碳化钽涂层物理特性物理特性

Imiterere yumubiri ya TaC gutwikira

密度Ubucucike

14.3 (g / cm³)

比辐射率 / Emissivity yihariye

0.3

热膨胀系数 / Coefficient yo kwagura ubushyuhe

6.3 10-6/K

努氏硬度/ Gukomera (HK)

2000 HK

电阻 / Kurwanya

1 × 10-5 Ohm * cm

热稳定性 / Guhagarara neza

<2500 ℃

石墨尺寸变化 / Ingano yubushakashatsi

-10 ~ -20um

涂层厚度 / Ubunini

≥20um agaciro gasanzwe (35um ± 10um)

 

Ningbo VET Energy Technology Co., Ltd ni uruganda rukora ubuhanga buhanitse rwibanda ku gukora no kugurisha ibikoresho byo mu rwego rwo hejuru, ibikoresho n’ikoranabuhanga bikubiyemo grafite, karibide ya silikoni, ububumbyi, kuvura hejuru n'ibindi. Ibicuruzwa bikoreshwa cyane muri Photovoltaque, semiconductor, ingufu nshya, metallurgie, nibindi ..

Itsinda ryacu rya tekinike rituruka mubigo byubushakashatsi bwo murugo, birashobora kuguha ibisubizo byumwuga kubwawe.

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