Iterambere rya SiC Cantilever Paddle yo gutunganya Wafer

Ibisobanuro bigufi:

Iterambere rya SiC Cantilever Paddle yo gutunganya Wafer yatangijwe na vet-china ikoresha ibikoresho bya tekinoroji ya SiC yo mu rwego rwo hejuru kugirango itezimbere kandi neza neza gutunganya wafer. Vet-china ya cantilever yerekana ibintu byiza birwanya ubushyuhe no kurwanya ruswa, bigatuma imikorere ya wafer ihagaze neza mubidukikije bikora nabi, bigatuma ihitamo neza mukuzamura umusaruro.


Ibicuruzwa birambuye

Ibicuruzwa

IterambereSiC Cantilever Paddlekuri Wafer Gutunganya byakozwe na vet-china bitanga igisubizo cyiza kubikorwa bya semiconductor. Urupapuro rwa kantileveri rukozwe mu bikoresho bya SiC (silicon carbide), kandi ubukana bwayo bwinshi hamwe n’ubushyuhe bukabije bituma bituma ikomeza gukora neza mu bushyuhe bwo hejuru no kwangiza ibidukikije. Igishushanyo cya Padile ya Cantilever ituma wafer ashyigikirwa neza mugihe cyo gutunganya, bikagabanya ibyago byo gucikamo no kwangirika.

SiC Cantilever Paddleni igice cyihariye gikoreshwa mubikoresho byo gukora semiconductor nk'itanura rya okiside, itanura rya diffuzione, hamwe n'itanura rya annealing, ikoreshwa nyamukuru ni ugupakira wafer no gupakurura, gushyigikira no gutwara wafer mugihe cy'ubushyuhe bwo hejuru.

Inzego rusangeByaSiCcantileverpaddle: imiterere ya cantilever, yashyizwe kumurongo umwe nubuntu kurundi, mubisanzwe ifite igishushanyo mbonera na paddle.

VET Ingufu zikoresha isuku nyinshi yongeye gushyirwaho ibikoresho bya karubide ya silicon kugirango yizere ubuziranenge.

Ibintu bifatika bya Silicon Carbide yongeye gushyirwaho

Umutungo

Agaciro gasanzwe

Ubushyuhe bwo gukora (° C)

1600 ° C (hamwe na ogisijeni), 1700 ° C (kugabanya ibidukikije)

Ibirimo

> 99,96%

Ibirimo Si kubuntu

<0.1%

Ubucucike bwinshi

2.60-2.70 g / cm3

Ikigaragara

<16%

Imbaraga zo kwikuramo

> 600MPa

Imbaraga zikonje

80-90 MPa (20 ° C)

Imbaraga zunamye

90-100 MPa (1400 ° C)

Kwiyongera k'ubushyuhe @ 1500 ° C.

4.70 10-6/ ° C.

Ubushyuhe bwumuriro @ 1200 ° C.

23W / m • K.

Modulus

240 GPa

Kurwanya ubushyuhe

Nibyiza cyane

Ibyiza bya VET Ingufu za SiC Cantilever Paddle yo gutunganya Wafer ni:

-Ubushyuhe bukabije: bukoreshwa mubidukikije hejuru ya 1600 ° C;

-Kureka coefficente yo kwagura amashyuza: ikomeza guhagarara neza, kugabanya ibyago byintambara ya wafer;

-Ubuziranenge bukabije: ibyago bike byo kwanduza ibyuma;

-Ubusembure bwa chimique: irwanya ruswa, ibereye ibidukikije bitandukanye;

-Imbaraga nini no gukomera: Kwambara-kwambara, kuramba kuramba;

-Ubushuhe bwiza bwumuriro: bufasha mubushuhe bumwe.

Kantilever Paddle10
Kantilever Paddle16
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