Mapangidwe amkati a zida za chubu za ng'anjo akufotokozedwa mwatsatanetsatane

Monga taonera pamwambapa, ndi mmene

Gawo loyamba:
Heating Element (kuwotcha koyilo) : yomwe ili pafupi ndi chubu la ng'anjo, yomwe nthawi zambiri imapangidwa ndi mawaya otsutsa, omwe amagwiritsidwa ntchito kutentha mkati mwa chubu la ng'anjo.
Quartz Tube: Pakatikati pa ng'anjo yotentha ya oxidation, yopangidwa ndi quartz yoyera kwambiri yomwe imatha kupirira kutentha kwambiri ndikukhalabe osagwiritsa ntchito mankhwala.
Chakudya cha Gasi: Chokhala pamwamba kapena pambali pa chubu cha ng'anjo, chimagwiritsidwa ntchito kunyamula mpweya kapena mpweya wina mkati mwa chubu cha ng'anjo.
SS Flange: zigawo zomwe zimagwirizanitsa machubu a quartz ndi mizere ya gasi, kuonetsetsa kulimba ndi kukhazikika kwa kugwirizana.
Mizere Yopangira Gasi: Mapaipi omwe amalumikiza MFC ku doko loperekera gasi kuti atumize gasi.
MFC (Mass Flow Controller) : Chida chomwe chimayendetsa gasi mkati mwa chubu cha quartz kuti chiwongolere bwino kuchuluka kwa mpweya wofunikira.
Vent: Amagwiritsidwa ntchito potulutsa mpweya wotuluka mkati mwa chubu cha ng'anjo kupita kunja kwa zida.

Gawo lapansi
Ma Silicon Wafers mu Holder: Zophika za silicon zimayikidwa mu Holder yapadera kuti zitsimikizire kutentha kofananako panthawi ya okosijeni.
Wafer Holder: Amagwiritsidwa ntchito kunyamula chophatikizira cha silicon ndikuwonetsetsa kuti chowotcha cha silicon chimakhala chokhazikika panthawiyi.
Pedestal: Kapangidwe kamene kamakhala ndi silicon wafer Holder, yomwe nthawi zambiri imapangidwa ndi zinthu zosagwira kutentha kwambiri.
Elevator: Amagwiritsidwa ntchito kukweza ma Wafer holder kulowa ndi kutuluka m'machubu a quartz kuti azitha kutsitsa ndikutsitsa zowotcha za silicon.
Wafer Transfer Robot: yomwe ili pambali pa chipangizo cha chubu cha ng'anjo, imagwiritsidwa ntchito kuchotsa chofufumitsa cha silicon m'bokosi ndikuchiyika mu chubu cha ng'anjo, kapena kuchotsa pambuyo pokonza.
Cassette Storage Carousel: Cassette storage carousel imagwiritsidwa ntchito kusungirako bokosi lomwe lili ndi zowotcha za silicon ndipo zimatha kuzunguliridwa kuti zitheke kuloboti.
Wafer Cassette: kaseti yopyapyala imagwiritsidwa ntchito kusungira ndi kusamutsa zowotcha za silicon kuti zisinthidwe.