Ukadaulo wa Photolithography umayang'ana kwambiri kugwiritsa ntchito makina owoneka bwino kuti awulule mawonekedwe ozungulira pamapaipi a silicon. Kulondola kwa njirayi kumakhudza mwachindunji ntchito ndi zokolola za maulendo ophatikizika. Monga chimodzi mwa zida zapamwamba zopangira chip, makina a lithography ali ndi magawo mazana masauzande. Zigawo zonse za kuwala ndi zigawo zomwe zili mkati mwa dongosolo la lithography zimafuna kulondola kwambiri kuti zitsimikizidwe kuti kayendetsedwe ka dera ndi kolondola.SiC ceramicszagwiritsidwa ntchito muzidutswa za mkatendi magalasi a ceramic square.
Wafer chuckChophika chophika mu makina a lithography chimanyamula ndikusuntha chophatikizira panthawi yowonekera. Kuyanjanitsa bwino pakati pa chowotcha ndi chuck ndikofunikira kuti mufanizire bwino chithunzicho pamwamba pa mtandawo.SiC chowotchachucks amadziwika chifukwa chopepuka, kukhazikika kwapamwamba komanso kutsika kwamphamvu kwamafuta, komwe kumatha kuchepetsa katundu wa inertial ndikuwongolera kuyenda bwino, kuyika kulondola komanso kukhazikika.
Ceramic square mirror Mu makina a lithography, kulumikizana pakati pa wafer chuck ndi gawo la chigoba ndikofunikira, komwe kumakhudza mwachindunji kulondola kwa lithography ndi zokolola. Square reflector ndi gawo lofunika kwambiri la wafer chuck scanning poyimilira njira yoyezera mayankho, ndipo zofunikira zake ndizopepuka komanso zokhwima. Ngakhale zoumba za silicon carbide zili ndi zinthu zopepuka zopepuka, kupanga zinthu zotere ndizovuta. Pakadali pano, opanga zida zophatikizika zapadziko lonse lapansi amagwiritsa ntchito zida monga silika wosakanikirana ndi cordierite. Komabe, ndi kupita patsogolo kwa ukadaulo, akatswiri aku China akwanitsa kupanga magalasi akulu akulu, owoneka bwino, opepuka kwambiri, otsekedwa kwathunthu ndi silicon carbide ceramic square magalasi ndi zida zina zowoneka bwino zamakina a Photolithography. Photomask, yomwe imadziwikanso kuti pobowo, imatumiza kuwala kudzera pa chigoba kuti ipange chithunzi pazithunzi. Komabe, kuwala kwa EUV kukayatsa chigoba, kumatulutsa kutentha, kukweza kutentha mpaka 600 mpaka 1000 digiri Celsius, zomwe zingayambitse kuwonongeka kwa kutentha. Chifukwa chake, filimu ya SiC nthawi zambiri imayikidwa pa chithunzithunzi. Makampani ambiri akunja, monga ASML, tsopano akupereka mafilimu opitilira 90% kuti achepetse kuyeretsa ndi kuyang'ana pakugwiritsa ntchito chithunzithunzi ndikuwongolera magwiridwe antchito ndi zokolola zamakina a EUV photolithography.
Kusintha kwa Plasmandi Ma Photomasks a Deposition, omwe amadziwikanso kuti crosshairs, ali ndi ntchito yayikulu yotumiza kuwala kudzera mu chigoba ndikupanga pateni pa zinthu zowoneka bwino. Komabe, kuwala kwa EUV (ya ultraviolet kwambiri) ikayatsa photomask, kumatulutsa kutentha, kumapangitsa kutentha kufika pakati pa 600 ndi 1000 digiri Celsius, zomwe zingayambitse kuwonongeka kwa kutentha. Choncho, filimu ya silicon carbide (SiC) nthawi zambiri imayikidwa pa photomask kuti athetse vutoli. Pakalipano, makampani ambiri akunja, monga ASML, ayamba kupereka mafilimu mowonekera kuposa 90% kuti achepetse kufunika koyeretsa ndi kuyang'anitsitsa panthawi yogwiritsira ntchito photomask, potero kupititsa patsogolo mphamvu ndi zokolola za makina a EUV lithography. . Plasma Etching ndiMphete ya Deposition Focusndi ena Popanga semiconductor, njira yolumikizira imagwiritsa ntchito zopangira zamadzimadzi kapena gasi (monga mipweya yokhala ndi fluorine) ionized mu plasma kuti iphulitse chowotcha ndikusankha zinthu zosafunikira mpaka mawonekedwe ofunikira amakhalabe pamtandapamwamba. Mosiyana ndi izi, kuyika filimu yopyapyala kumakhala kofanana ndi mbali yakumbuyo ya etching, pogwiritsa ntchito njira yoyikapo kuti muwunjike zida zotchingira pakati pa zigawo zachitsulo kupanga filimu yopyapyala. Popeza njira zonsezi zimagwiritsa ntchito ukadaulo wa plasma, zimatha kuwononga zipinda ndi zigawo zake. Chifukwa chake, zida zomwe zili mkati mwazidazi zimafunika kukhala ndi kukana bwino kwa plasma, kutsika pang'ono kwa mpweya wa fluorine etching, komanso kutsika kwamphamvu. Zida zachikhalidwe ndi zida zoyikapo, monga mphete zowunikira, nthawi zambiri zimapangidwa ndi zinthu monga silicon kapena quartz. Komabe, ndikupita patsogolo kwa miniaturization yophatikizika, kufunikira ndi kufunikira kwa njira zopangira ma etching pakupanga madera ophatikizika akuchulukirachulukira. Pamlingo wa microscopic, etching wafer ya silicon yolondola imafuna plasma yamphamvu kwambiri kuti ikwaniritse mizere yaying'ono ndi zida zovuta kwambiri. Chifukwa chake, chemical vapor deposition (CVD) silicon carbide (SiC) pang'onopang'ono yakhala chinthu chomwe chimakondedwa kwambiri pakuyika ndi kuyika zida zokhala ndi thupi komanso mankhwala, kuyera kwambiri komanso kufananiza. Pakadali pano, zida za CVD silicon carbide mu zida za etching zikuphatikiza mphete zowunikira, mitu ya shawa ya gasi, ma tray ndi mphete zam'mphepete. Mu zida zoyikapo, pali zophimba zachipinda, zomangira zipinda ndiMagawo a graphite okhala ndi SIC.
Chifukwa cha kuchepa kwake komanso kusinthika kwa chlorine ndi mpweya wa fluorine etching,CVD silicon carbidechakhala chinthu chabwino kwambiri pazigawo monga mphete zoyang'ana mu zida za plasma etching.CVD silicon carbidezigawo mu etching zipangizo monga kuganizira mphete, gasi shawa mitu, thireyi, mphete m'mphepete, etc. Tengani mphete kuganizira monga chitsanzo, iwo ndi zigawo zikuluzikulu anaika kunja kwa chophwanyika ndi mwachindunji kukhudzana ndi mkate. Pogwiritsa ntchito voteji pa mphete, plasma imayang'ana kudzera mu mpheteyo pamphepete, ndikupangitsa kuti ndondomekoyi ikhale yofanana. Pachikhalidwe, mphete zowunikira zimapangidwa ndi silicon kapena quartz. Komabe, momwe gawo lophatikizika la miniaturization likupita patsogolo, kufunikira ndi kufunikira kwa njira zopangira ma etching pakupanga madera ophatikizika kukukulirakulira. Mphamvu za plasma etching ndi zofunikira zamphamvu zikupitilira kukwera, makamaka pazida zojambulira za plasma (CCP), zomwe zimafunikira mphamvu yayikulu ya plasma. Zotsatira zake, kugwiritsa ntchito mphete zowunikira zopangidwa ndi silicon carbide zikuchulukirachulukira.
Nthawi yotumiza: Oct-29-2024