Kupanga kwamtundu uliwonse wa semiconductor kumafuna njira zambiri. Timagawa njira yonse yopangira zinthu m'magawo asanu ndi atatu:mtandaprocessing-oxidation-photolithography-etching-thin film deposition-epitaxial kukula-diffusion-ion implantation.
Kukuthandizani kumvetsetsa ndikuzindikira ma semiconductors ndi njira zofananira, tidzakankhira zolemba za WeChat m'magazini iliyonse kuti tidziwitse masitepe omwe ali pamwambapa imodzi ndi imodzi.
M'nkhani yapitayi, adatchulidwa kuti pofuna kutetezamtandakuchokera ku zonyansa zosiyanasiyana, filimu ya okusayidi inapangidwa - ndondomeko ya okosijeni. Lero tikambirana za "photolithography process" yojambulira semiconductor kapangidwe dera pa chophwanyika ndi filimu okusayidi anapanga.
Photolithography ndondomeko
1. Kodi ndondomeko ya photolithography ndi chiyani
Photolithography ndi kupanga mabwalo ndi malo ogwira ntchito omwe amafunikira kupanga chip.
Kuwala kopangidwa ndi makina a photolithography kumagwiritsidwa ntchito powonetsa filimu yopyapyala yokutidwa ndi photoresist kupyolera mu chigoba chokhala ndi chitsanzo. Photoresist idzasintha katundu wake atatha kuona kuwala, kotero kuti chitsanzo pa chigoba chikukopera filimu yopyapyala, kotero kuti filimu yopyapyala imakhala ndi ntchito yamagetsi ozungulira magetsi. Iyi ndi ntchito ya photolithography, yofanana ndi kujambula zithunzi ndi kamera. Zithunzi zojambulidwa ndi kamera zimasindikizidwa pafilimuyi, pamene photolithography sichimajambula zithunzi, koma zithunzi za dera ndi zipangizo zina zamagetsi.
Photolithography ndi luso lolondola la micro-machining
Photolithography wamba ndi njira yomwe imagwiritsa ntchito kuwala kwa ultraviolet ndi kutalika kwa 2000 mpaka 4500 angstroms monga chonyamulira chidziwitso cha zithunzi, ndipo imagwiritsa ntchito photoresist ngati sing'anga yapakatikati (yojambulira zithunzi) kuti ikwaniritse kusintha, kusamutsa ndi kukonza zithunzi, ndipo pamapeto pake imatumiza chithunzicho. zambiri ku chip (makamaka silicon chip) kapena dielectric layer.
Zinganenedwe kuti photolithography ndi maziko a semiconductor amakono, ma microelectronics, ndi mafakitale a chidziwitso, ndipo photolithography imatsimikizira mwachindunji kukula kwa matekinoloje awa.
Kwa zaka zoposa 60 kuchokera pamene kupangidwa bwino kwa mabwalo ophatikizika mu 1959, kukula kwa mzere wazithunzi zake kwachepetsedwa ndi pafupifupi maulamuliro anayi a ukulu, ndipo kuphatikizika kwa dera kwasinthidwa ndi maulamuliro oposa asanu ndi limodzi a ukulu. Kupita patsogolo kofulumira kwa matekinolojewa makamaka kumachokera ku chitukuko cha photolithography.
(Zofunikira paukadaulo wa Photolithography pamagawo osiyanasiyana akukula kwazinthu zophatikizika zamagawo)
2. Mfundo zoyambirira za photolithography
Zipangizo za Photolithography nthawi zambiri zimatanthawuza ma photoresists, omwe amadziwikanso kuti ma photoresists, omwe ndi zida zofunika kwambiri zogwirira ntchito pazithunzithunzi. Zinthu zamtunduwu zimakhala ndi mawonekedwe a kuwala (kuphatikiza kuwala kowoneka, kuwala kwa ultraviolet, mtengo wa elekitironi, ndi zina). Pambuyo photochemical anachita, solubility ake kusintha kwambiri.
Pakati pawo, solubility wa photoresist zabwino mu mapulogalamu kuwonjezeka, ndipo analandira chitsanzo ndi chimodzimodzi chigoba; negative photoresist ndizosiyana, ndiye kuti, kusungunuka kumachepetsa kapena kumakhala kosasunthika pambuyo powonekera kwa wopanga, ndipo mawonekedwe omwe adapeza ndi otsutsana ndi chigoba. Minda yogwiritsira ntchito mitundu iwiri ya photoresists ndi yosiyana. Ma photoresists abwino amagwiritsidwa ntchito kwambiri, omwe amawerengera oposa 80% ya chiwerengero chonse.
Pamwambapa ndi chithunzi chojambula cha ndondomeko ya photolithography
(1) Gluing: ndiko kupanga filimu ya photoresist yokhala ndi makulidwe a yunifolomu, kumamatira mwamphamvu komanso popanda chilema pa silicon wafer. Pofuna kupititsa patsogolo kumatira pakati pa filimu ya photoresist ndi silicon wafer, nthawi zambiri zimakhala zofunikira kuti muyambe kusintha pamwamba pa silicon wafer ndi zinthu monga hexamethyldisilazane (HMDS) ndi trimethylsilyldiethylamine (TMSDEA). Kenako, filimu ya photoresist imakonzedwa ndi kupopera kwa spin.
(2) Kuphika kale: Pambuyo popaka poto, filimu ya photoresist imakhalabe ndi zosungunulira zina. Mukaphika pa kutentha kwakukulu, zosungunulira zimatha kuchotsedwa pang'ono momwe zingathere. Pambuyo pophika kale, zomwe zili mu photoresist zimachepetsedwa mpaka 5%.
(3) Kuwonekera: Ndiko kuti, photoresist imawululidwa ndi kuwala. Panthawiyi, photoreaction imachitika, ndipo kusiyana kwa kusungunuka pakati pa gawo lowala ndi gawo losawunikiridwa kumachitika.
(4) Kukula & kuumitsa: Chogulitsacho chimamizidwa ndi wopanga. Panthawiyi, malo owonekera a photoresist abwino ndi malo osawonekera a photoresist oipa adzasungunuka mu chitukuko. Izi zimapereka mawonekedwe amitundu itatu. Pambuyo pa chitukuko, chip chimafunika njira yochiritsira yotentha kwambiri kuti ikhale filimu yolimba, yomwe makamaka imathandizira kupititsa patsogolo kumamatira kwa photoresist ku gawo lapansi.
(5) Etching: Zomwe zili pansi pa photoresist zimakhazikika. Zimaphatikizapo etching yamadzimadzi yonyowa komanso etching yowuma. Mwachitsanzo, pakunyowa kwa silicon, njira yamadzimadzi ya hydrofluoric imagwiritsidwa ntchito; pa kunyowa kwa mkuwa, njira ya asidi yamphamvu monga nitric acid ndi sulfuric acid imagwiritsidwa ntchito, pamene kutsekemera kowuma nthawi zambiri kumagwiritsa ntchito plasma kapena zitsulo za ion zamphamvu kwambiri kuti ziwononge pamwamba pa zinthuzo ndikuziwombera.
(6) Degumming: Pomaliza, photoresist iyenera kuchotsedwa pamwamba pa mandala. Njira imeneyi imatchedwa degumming.
Chitetezo ndiye chinthu chofunikira kwambiri pakupanga ma semiconductor onse. Mipweya yayikulu yowopsa komanso yowopsa ya Photolithography munjira ya chip lithography ndi motere:
1. Hydrogen peroxide
Hydrogen peroxide (H2O2) ndi oxidant wamphamvu. Kukhudzana mwachindunji kungayambitse kutupa kwa khungu ndi maso ndi kuyaka.
2. Xylene
Xylene ndi zosungunulira komanso zopangira zomwe zimagwiritsidwa ntchito muzolemba zoyipa. Imatha kuyaka ndipo imakhala ndi kutentha kochepa chabe kwa 27.3 ℃ (pafupifupi kutentha kwachipinda). Zimaphulika pamene ndende mumlengalenga ndi 1% -7%. Kukhudzana mobwerezabwereza ndi xylene kungayambitse kutupa kwa khungu. Nthunzi ya Xylene ndi yokoma, yofanana ndi fungo la ndege; kukhudzana ndi xylene kungayambitse kutupa kwa maso, mphuno ndi mmero. Kukoka mpweya kungayambitse mutu, chizungulire, kusowa kwa njala ndi kutopa.
3. Hexamethyldisilazane (HMDS)
Hexamethyldisilazane (HMDS) nthawi zambiri amagwiritsidwa ntchito ngati choyambira kuti awonjezere kumamatira kwa photoresist pamwamba pa mankhwala. Imatha kuyaka ndipo ili ndi flash point ya 6.7°C. Zimaphulika pamene ndende mumlengalenga ndi 0.8% -16%. HMDS imakhudzidwa kwambiri ndi madzi, mowa ndi ma mineral acids kutulutsa ammonia.
4. Tetramethylammonium hydroxide
Tetramethylammonium hydroxide (TMAH) imagwiritsidwa ntchito kwambiri ngati wopanga ma lithography abwino. Ndi poyizoni komanso zikuwononga. Zitha kupha ngati zitamezedwa kapena kukhudzana mwachindunji ndi khungu. Kukhudzana ndi fumbi la TMAH kapena nkhungu kungayambitse kutupa kwa maso, khungu, mphuno ndi mmero. Kukoka mpweya wambiri wa TMAH kumabweretsa imfa.
5. Chlorine ndi fluorine
Chlorine (Cl2) ndi fluorine (F2) onse amagwiritsidwa ntchito mu lasers excimer monga kuya ultraviolet ndi kwambiri ultraviolet (EUV) kuwala magwero. Mipweya yonseyi ndi yapoizoni, imawoneka yobiriwira mopepuka, ndipo imakhala ndi fungo lamphamvu lokwiyitsa. Kukoka mpweya wochuluka kwambiri kumabweretsa imfa. Mpweya wa fluorine ukhoza kuchitapo kanthu ndi madzi kuti upange mpweya wa hydrogen fluoride. Mpweya wa hydrogen fluoride ndi asidi amphamvu omwe amakwiyitsa khungu, maso ndi kupuma ndipo angayambitse zizindikiro monga kutentha ndi kupuma movutikira. Kuchuluka kwa fluoride kungayambitse poizoni m'thupi la munthu, kumayambitsa zizindikiro monga mutu, kusanza, kutsegula m'mimba, ndi chikomokere.
6. Argon
Argon (Ar) ndi mpweya wa inert womwe nthawi zambiri suyambitsa kuvulaza thupi la munthu. Nthawi zonse, mpweya umene anthu amapuma uli ndi 0,93% argon, ndipo ndendeyi ilibe zotsatira zoonekeratu pa thupi la munthu. Komabe, nthawi zina, argon akhoza kuvulaza thupi la munthu.
Nazi zina zomwe zingatheke: M'malo ocheperako, kuchuluka kwa argon kumatha kuwonjezeka, motero kumachepetsa kuchuluka kwa mpweya mumlengalenga ndikuyambitsa hypoxia. Izi zingayambitse zizindikiro monga chizungulire, kutopa, ndi kupuma movutikira. Kuonjezera apo, argon ndi mpweya wa inert, koma ukhoza kuphulika pansi pa kutentha kapena kuthamanga kwambiri.
7. Neon
Neon (Ne) ndi mpweya wokhazikika, wopanda mtundu komanso wopanda fungo womwe satenga nawo gawo mu Mpweya wa mpweya wa neon, chifukwa chake kupuma movutikira kwambiri kumayambitsa hypoxia. Ngati mwakhala mu hypoxia kwa nthawi yayitali, mungakhale ndi zizindikiro monga mutu, nseru, ndi kusanza. Kuonjezera apo, mpweya wa neon ukhoza kuchitapo kanthu ndi zinthu zina pansi pa kutentha kwakukulu kapena kupanikizika kwakukulu kumayambitsa moto kapena kuphulika.
8. Xenon mpweya
Mpweya wa Xenon (Xe) ndi mpweya wosasunthika, wopanda mtundu komanso wopanda fungo womwe sutenga nawo gawo pakupuma kwamunthu, motero kupuma movutikira kwambiri kumayambitsa hypoxia. Ngati mwakhala mu hypoxia kwa nthawi yayitali, mungakhale ndi zizindikiro monga mutu, nseru, ndi kusanza. Kuonjezera apo, mpweya wa neon ukhoza kuchitapo kanthu ndi zinthu zina pansi pa kutentha kwakukulu kapena kupanikizika kwakukulu kumayambitsa moto kapena kuphulika.
9. Mpweya wa Krypton
Mpweya wa Krypton (Kr) ndi mpweya wosasunthika, wopanda mtundu komanso wopanda fungo womwe sutenga nawo gawo pakupuma kwamunthu, kotero kupuma movutikira kwambiri kumayambitsa hypoxia. Ngati mwakhala mu hypoxia kwa nthawi yayitali, mungakhale ndi zizindikiro monga mutu, nseru, ndi kusanza. Kuonjezera apo, mpweya wa xenon ukhoza kuchitapo kanthu ndi zinthu zina pansi pa kutentha kwakukulu kapena kupanikizika kwakukulu kumayambitsa moto kapena kuphulika. Kupuma m'malo okhala ndi kusowa kwa okosijeni kungayambitse hypoxia. Ngati mwakhala mu hypoxia kwa nthawi yayitali, mungakhale ndi zizindikiro monga mutu, nseru, ndi kusanza. Kuonjezera apo, mpweya wa krypton ukhoza kuchitapo kanthu ndi zinthu zina pansi pa kutentha kwakukulu kapena kupanikizika kwakukulu kumayambitsa moto kapena kuphulika.
Njira zowunikira gasi wowopsa pamakampani a semiconductor
Makampani opanga ma semiconductor amakhudza kupanga, kupanga, ndi kukonza mpweya woyaka, wophulika, wapoizoni komanso wowopsa. Monga wogwiritsa ntchito mpweya m'mafakitale opangira ma semiconductor, wogwira ntchito aliyense ayenera kumvetsetsa zachitetezo cha mpweya woopsa wosiyanasiyana asanaugwiritse ntchito, ndipo ayenera kudziwa momwe angathanirane ndi njira zadzidzidzi mpweyawu ukatuluka.
Popanga, kupanga, ndi kusungirako mafakitale a semiconductor, pofuna kupewa kutaya moyo ndi katundu chifukwa cha kutayikira kwa mpweya wowopsawu, ndikofunikira kukhazikitsa zida zowunikira mpweya kuti zizindikire zomwe zikufuna.
Zowunikira gasi zakhala zida zofunikira zowunikira zachilengedwe m'makampani amakono a semiconductor, komanso ndi zida zowunikira mwachindunji.
Riken Keiki nthawi zonse amaganizira za chitukuko chotetezeka cha makampani opanga zida zopangira zida zamagetsi, ndi cholinga chopanga malo ogwirira ntchito otetezeka kwa anthu, ndipo adadzipereka pakupanga masensa amagetsi oyenera makampani opanga semiconductor, kupereka mayankho omveka amavuto osiyanasiyana omwe amakumana nawo. ogwiritsa ntchito, ndikukweza mosalekeza ntchito zamagulu ndi makina okhathamiritsa.
Nthawi yotumiza: Jul-16-2024