Kupanga kwa zida za semiconductor kumaphatikizapo zida zophatikizika, mabwalo ophatikizika ndi njira zawo zopangira.
Kupanga kwa semiconductor kumatha kugawidwa m'magawo atatu: kupanga zinthu zakuthupi, zopangidwamtandakupanga ndi kusonkhanitsa zipangizo. Pakati pawo, kuipitsidwa kwakukulu kwambiri ndi gawo lopangira zinthu zowotcha.
Zowononga zimagawidwa makamaka m'madzi onyansa, gasi wotayidwa ndi zinyalala zolimba.
Njira yopangira chip:
Chophimba cha siliconpambuyo popera kunja - kuyeretsa - oxidation - yunifolomu kukana - photolithography - chitukuko - etching - kufalikira, ion implantation - mankhwala nthunzi deposition - mankhwala makina kupukuta - metallization, etc.
Madzi oipa
Kuchuluka kwa madzi otayira kumapangidwa munjira iliyonse yopanga ma semiconductor ndikuyesa kuyika, makamaka madzi otayira a acid-base, madzi onyansa okhala ndi ammonia ndi madzi onyansa achilengedwe.
1. Madzi oipa okhala ndi fluorine:
Hydrofluoric acid imakhala chosungunulira chachikulu chomwe chimagwiritsidwa ntchito popanga makutidwe ndi okosijeni ndi ma etching chifukwa cha okosijeni komanso kuwononga kwake. Madzi otayira okhala ndi fluorine munjirayo makamaka amachokera ku njira yofalitsira ndi makina opukutira amakina popanga chip. Poyeretsa zophika za silicon ndi ziwiya zofananira, hydrochloric acid imagwiritsidwanso ntchito nthawi zambiri. Njira zonsezi zimamalizidwa ndi akasinja odzipatulira kapena zida zoyeretsera, kotero kuti madzi oyipa okhala ndi fluorine amatha kutayidwa paokha. Malinga ndi ndendeyi, imatha kugawidwa m'madzi otayira okhala ndi fluorine okhala ndi zotayira komanso otsika kwambiri okhala ndi ammonia. Nthawi zambiri, kuchuluka kwamadzi onyansa okhala ndi ammonia kumatha kufika 100-1200 mg/L. Makampani ambiri amabwezeretsanso gawo ili lamadzi onyansa kuti agwiritse ntchito njira zomwe sizifuna madzi abwino kwambiri.
2. Madzi otayira a Acid:
Pafupifupi njira iliyonse yopangira chigawo chophatikizika imafunikira kuti chip chiyeretsedwe. Pakadali pano, sulfuric acid ndi hydrogen peroxide ndiye madzi oyeretsera omwe amagwiritsidwa ntchito kwambiri popanga makina ophatikizika. Nthawi yomweyo, ma reagents a acid-base monga nitric acid, hydrochloric acid ndi ammonia amagwiritsidwanso ntchito.
Madzi otayira a acid-base popanga zinthu makamaka amachokera ku njira yoyeretsera popanga chip. Pakuyika, chip chimathandizidwa ndi yankho la acid-base panthawi ya electroplating ndi kusanthula mankhwala. Pambuyo pa chithandizo, iyenera kutsukidwa ndi madzi oyera kuti ipange madzi ochapira a acid-base. Kuphatikiza apo, ma reagents a acid-base monga sodium hydroxide ndi hydrochloric acid amagwiritsidwanso ntchito m'malo oyera am'madzi kuti apangitsenso ma anion ndi ma cation resins kuti apange madzi owonongeka a acid-base. Kutsuka madzi amchira amapangidwanso panthawi ya acid-base waste gas process. M'makampani opanga madera ophatikizika, kuchuluka kwamadzi otayira acid-base kumakhala kwakukulu kwambiri.
3. Madzi oipa achilengedwe:
Chifukwa cha njira zosiyanasiyana zopangira, kuchuluka kwa zosungunulira zomwe zimagwiritsidwa ntchito mumakampani a semiconductor ndizosiyana kwambiri. Komabe, monga zoyeretsera, zosungunulira organic zimagwiritsidwabe ntchito kwambiri pamalumikizidwe osiyanasiyana opanga ma CD. Zosungunulira zina zimakhala zotuluka m'madzi onyansa.
4. Madzi ena oipa:
Njira yopangira makina opangira semiconductor idzagwiritsa ntchito kuchuluka kwa ammonia, fluorine ndi madzi oyeretsedwa kwambiri kuti awonongeko, potero kutulutsa kutulutsa kwamadzi ammonia komwe kumakhala ndi ammonia.
Njira yopangira ma electroplating ndiyofunikira pakuyika kwa semiconductor. Chip chiyenera kutsukidwa pambuyo pa electroplating, ndipo electroplating kuyeretsa madzi oipa adzapangidwa motere. Popeza zitsulo zina zimagwiritsidwa ntchito mu electroplating, padzakhala mpweya wa ayoni wazitsulo m'madzi oyeretsera a electroplating, monga lead, malata, disc, zinki, aluminiyamu, ndi zina zotero.
Gasi wonyansa
Popeza njira ya semiconductor ili ndi zofunika kwambiri paukhondo wa chipinda chopangira opaleshoni, mafani nthawi zambiri amagwiritsidwa ntchito kuchotsa mitundu yosiyanasiyana ya mpweya wonyansa womwe umatenthedwa panthawiyi. Chifukwa chake, kutulutsa kwa gasi wowonongeka mumakampani a semiconductor kumadziwika ndi kuchuluka kwa utsi wambiri komanso kutsika kwautsi. Kutulutsa kwa gasi wonyansa kumasokonekera kwambiri.
Mpweya wotayirirawu ukhoza kugawidwa m'magulu anayi: gasi wa acidic, mpweya wa alkaline, mpweya wonyansa wachilengedwe ndi mpweya wapoizoni.
1. Mpweya wotayira wa Acid:
Mpweya wotayirira wa Acid makamaka umachokera ku kufalikira,CVD, CMP ndi etching njira, zomwe zimagwiritsa ntchito njira yoyeretsera acid-base kuyeretsa chophika.
Pakadali pano, chosungunulira chomwe chimagwiritsidwa ntchito kwambiri popanga semiconductor ndi chisakanizo cha hydrogen peroxide ndi sulfuric acid.
Mpweya wonyansa wopangidwa munjirazi umaphatikizapo mpweya wa acidic monga sulfuric acid, hydrofluoric acid, hydrochloric acid, nitric acid ndi phosphoric acid, ndipo mpweya wa alkaline makamaka ndi ammonia.
2. Mpweya wotayidwa wachilengedwe:
Mpweya wotayidwa wachilengedwe makamaka umachokera kuzinthu monga photolithography, chitukuko, etching ndi kufalikira. Munjira izi, organic solution (monga isopropyl alcohol) imagwiritsidwa ntchito kuyeretsa pamwamba pa chowotcha, ndipo mpweya wotayirira wopangidwa ndi volatilization ndi amodzi mwa magwero a organic zinyalala;
Panthawi imodzimodziyo, photoresist (photoresist) yomwe imagwiritsidwa ntchito popanga photolithography ndi etching imakhala ndi zosungunulira zamtundu wa organic, monga butyl acetate, zomwe zimagwedezeka mumlengalenga panthawi ya ndondomeko yachitsulo, yomwe ndi gwero lina la gasi wa zinyalala.
3. Mpweya wotayidwa wapoizoni:
Mpweya wotayirira wakupha makamaka umachokera ku njira monga crystal epitaxy, dry etching ndi CVD. M'njirazi, mitundu yosiyanasiyana ya mpweya woyeretsedwa kwambiri imagwiritsidwa ntchito pokonza chophatikizira, monga silicon (SiHj), phosphorous (PH3), carbon tetrachloride (CFJ), borane, boron trioxide, etc. Mipweya ina yapadera ndi poizoni, asphyxiating ndi corrosive.
Panthawi imodzimodziyo, muzitsulo zowuma ndi kuyeretsa pambuyo poyika mpweya wa mankhwala mu semiconductor kupanga, mpweya wambiri wa oxide (PFCS) umafunika, monga NFS, C2F & CR, C3FS, CHF3, SF6, ndi zina zotero. kukhala ndi mayamwidwe amphamvu m'dera la kuwala kwa infrared ndikukhala mumlengalenga kwa nthawi yayitali. Nthawi zambiri amaonedwa ngati gwero lalikulu la kutentha kwa dziko lonse lapansi.
4. Kupaka zinyalala gasi:
Poyerekeza ndi njira yopangira semiconductor, mpweya wotayirira wopangidwa ndi semiconductor ma CD ndi osavuta, makamaka mpweya wa acidic, epoxy resin ndi fumbi.
Acidic zinyalala mpweya makamaka kwaiye mu njira monga electroplating;
Kuwotcha zinyalala mpweya kwaiye mu ndondomeko kuphika pambuyo mankhwala pasta ndi kusindikiza;
Makina ojambulira amatulutsa zinyalala zokhala ndi fumbi la silicon panthawi yodula.
Mavuto oyipitsa chilengedwe
Pazovuta zowononga chilengedwe mumakampani a semiconductor, mavuto akulu omwe akuyenera kuthetsedwa ndi awa:
· Kutulutsa kwakukulu kwazinthu zowononga mpweya ndi zinthu zosasinthika (VOCs) munjira ya Photolithography;
Kutulutsa kwa perfluorinated compounds (PFCS) mu plasma etching ndi njira zoyika mpweya wamankhwala;
- Kugwiritsa ntchito mphamvu zambiri ndi madzi popanga ndi kuteteza chitetezo cha ogwira ntchito;
· Kuyang'anira zinthu zobwezerezedwanso ndi kuwononga chilengedwe;
• Mavuto ogwiritsira ntchito mankhwala owopsa popakira.
Kupanga koyera
Ukadaulo wopangira ukhondo wa zida za semiconductor ukhoza kusinthidwa kuchokera kuzinthu zopangira, njira ndi kuwongolera njira.
Kupititsa patsogolo zipangizo ndi mphamvu
Choyamba, chiyero cha zipangizo ayenera mosamalitsa ankalamulira kuchepetsa kumayambiriro zosafunika ndi particles.
Kachiwiri, kutentha kosiyanasiyana, kuzindikira kutayikira, kugwedezeka, kugwedezeka kwamagetsi kwamphamvu kwambiri ndi mayeso ena amayenera kuchitidwa pazigawo zomwe zikubwera kapena zinthu zomaliza zisanapangidwe.
Kuonjezera apo, chiyero cha zipangizo zothandizira chiyenera kuyendetsedwa mosamalitsa. Pali matekinoloje ambiri omwe angagwiritsidwe ntchito popanga mphamvu zamagetsi.
Konzani ndondomeko yopangira
Makampani a semiconductor pawokha amayesetsa kuchepetsa kukhudzidwa kwake pa chilengedwe pogwiritsa ntchito njira zamakono zamakono.
Mwachitsanzo, m'zaka za m'ma 1970, zosungunulira za organic zidagwiritsidwa ntchito makamaka kuyeretsa zophika muukadaulo wophatikizika woyeretsa dera. M'zaka za m'ma 1980, mankhwala a asidi ndi alkali monga sulfuric acid ankagwiritsidwa ntchito kuyeretsa zophika. Mpaka zaka za m'ma 1990, teknoloji yoyeretsa mpweya wa plasma idapangidwa.
Pankhani yakuyika, makampani ambiri pakadali pano amagwiritsa ntchito ukadaulo wa electroplating, zomwe zingayambitse kuwonongeka kwa zitsulo zolemera ku chilengedwe.
Komabe, zonyamula katundu ku Shanghai sagwiritsanso ntchito ukadaulo wa electroplating, chifukwa chake zitsulo zolemera sizimakhudza chilengedwe. Zitha kupezeka kuti makampani opanga ma semiconductor akuchepetsa pang'onopang'ono momwe zimakhudzira chilengedwe kudzera pakuwongolera njira komanso kulowetsa mankhwala m'malo mwachitukuko chake, chomwe chimatsatiranso zomwe zikuchitika padziko lonse lapansi polimbikitsa njira zolimbikitsira komanso kapangidwe kazinthu potengera chilengedwe.
Pakalipano, zokometsera zambiri zakumaloko zikuchitika, kuphatikiza:
·Kusintha ndi kuchepetsa gasi wa PFCS wa ammonium, monga kugwiritsa ntchito mpweya wa PFCs wokhala ndi wowonjezera kutentha m'malo mwa mpweya wowonjezera kutentha, monga kukonza kayendedwe kake komanso kuchepetsa kuchuluka kwa mpweya wa PFCS womwe umagwiritsidwa ntchito;
·Kukonza zotsuka zotsuka pamitanda yambiri kuti ziyeretse paofa limodzi kuti muchepetse kuchuluka kwa mankhwala oyeretsera omwe amagwiritsidwa ntchito poyeretsa.
· Kuwongolera mosamalitsa ndondomeko:
a. Kuzindikira makina opanga zinthu, omwe amatha kuzindikira kuwongolera bwino ndi kupanga batch, ndikuchepetsa kulakwitsa kwakukulu kwa magwiridwe antchito amanja;
b. Zinthu zachilengedwe zoyera kwambiri, pafupifupi 5% kapena kuchepera kwa zokolola zimayamba chifukwa cha anthu ndi chilengedwe. Zinthu zachilengedwe zoyera kwambiri zimaphatikizanso ukhondo wa mpweya, madzi oyera kwambiri, mpweya woponderezedwa, CO2, N2, kutentha, chinyezi, ndi zina zambiri. mpweya, ndiye kuti, kuchuluka kwa tinthu tating'onoting'ono;
c. Limbikitsani kuzindikira, ndikusankha mfundo zofunika kuzizindikira pamalo ogwirira ntchito ndi zinyalala zambiri panthawi yopanga.
Landirani makasitomala aliwonse ochokera padziko lonse lapansi kuti atichezere kuti tidzakambiranenso!
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Nthawi yotumiza: Aug-13-2024