Chemical Vapor Deposition (CVD) ndiukadaulo wofunikira wamakanema owonda kwambiri, omwe nthawi zambiri amagwiritsidwa ntchito pokonzekera makanema osiyanasiyana ogwira ntchito ndi zida zoonda, ndipo amagwiritsidwa ntchito kwambiri popanga semiconductor ndi magawo ena.
1. Mfundo yogwira ntchito ya CVD
Munjira ya CVD, chowongolera mpweya (chimodzi kapena zingapo zopangira mpweya) zimakumana ndi gawo lapansi ndikutenthedwa ndi kutentha kwina kuti zipangitse kusintha kwamankhwala ndikuyika pagawo laling'ono kuti apange filimu kapena zokutira zomwe mukufuna. wosanjikiza. Chopangidwa ndi mankhwalawa ndi cholimba, nthawi zambiri chimakhala ndi zinthu zofunika. Ngati tikufuna kumamatira silicon pamwamba, titha kugwiritsa ntchito trichlorosilane (SiHCl3) ngati mpweya woyambira: SiHCl3 → Si + Cl2 + HCl Silicon imamanga pamalo aliwonse owonekera (mkati ndi kunja), pomwe mpweya wa chlorine ndi hydrochloric acid udzamanga. kutulutsidwa m'chipindamo.
2. Gulu la CVD
Thermal CVD: Powotcha mpweya woyambilira kuti uwole ndikuwuyika pamalo apansi panthaka. Plasma Enhanced CVD (PECVD): Plasma imawonjezedwa ku CVD yotentha kuti ipititse patsogolo kuchuluka kwa zomwe zimachitika ndikuwongolera njira yoyika. Metal Organic CVD (MOCVD): Kugwiritsa ntchito zitsulo organic mankhwala monga precursor mpweya, mafilimu woonda zitsulo ndi semiconductors akhoza kukonzekera, ndipo nthawi zambiri amagwiritsidwa ntchito popanga zipangizo monga LEDs.
3. Kugwiritsa ntchito
(1) Kupanga semiconductor
Silicide filimu: ntchito pokonzekera insulating zigawo, gawo lapansi, kudzipatula zigawo, etc. Nitride filimu: ntchito pokonzekera pakachitsulo nitride, zotayidwa nitride, etc., ntchito LEDs, zipangizo mphamvu, etc. Zitsulo filimu: ntchito pokonzekera zigawo conductive, metallized zigawo, etc.
(2) Tekinoloje yowonetsera
Kanema wa ITO: Kanema wa Transparent conductive oxide, womwe umagwiritsidwa ntchito powonetsa pagulu lathyathyathya ndi zowonera. Filimu yamkuwa: yomwe imagwiritsidwa ntchito pokonzekera zigawo zonyamula, mizere yoyendetsa, ndi zina zotero, kupititsa patsogolo magwiridwe antchito a zida zowonetsera.
(3) Minda ina
Zovala zowoneka bwino: kuphatikiza zokutira zotsutsa-reflective, zosefera za kuwala, etc. Anti-corrosion №: amagwiritsidwa ntchito m'zigawo zamagalimoto, zida zam'mlengalenga, etc.
4. Makhalidwe a ndondomeko ya CVD
Gwiritsani ntchito malo otentha kwambiri kuti mulimbikitse kuthamanga. Kawirikawiri anachita mu vacuum chilengedwe. Zowonongeka pamwamba pa gawolo ziyenera kuchotsedwa musanayambe kujambula. Njirayi ikhoza kukhala ndi malire pa magawo omwe amatha kukutidwa, mwachitsanzo, kuchepa kwa kutentha kapena kuchepa kwa reactivity. Chophimba cha CVD chidzaphimba madera onse a gawolo, kuphatikizapo ulusi, mabowo akhungu ndi malo amkati. Zitha kuchepetsa kuthekera kobisa madera omwe mukufuna. Kuchuluka kwa filimu kumachepetsedwa ndi ndondomeko ndi zinthu zakuthupi. Kumamatira kwapamwamba.
5. Ubwino waukadaulo wa CVD
Uniformity: Kutha kukwaniritsa kuyika kofanana pamagawo akulu akulu.
Controllability: Mtengo woyikapo ndi mawonekedwe afilimu zitha kusinthidwa ndikuwongolera kuchuluka kwakuyenda ndi kutentha kwa mpweya woyambira.
Zosiyanasiyana: Zoyenera kuyika zinthu zosiyanasiyana, monga zitsulo, ma semiconductors, ma oxides, ndi zina.
Nthawi yotumiza: May-06-2024