BJT, CMOS, DMOS ndi matekinoloje ena a semiconductor process

Takulandirani kutsamba lathu kuti mudziwe zambiri zamalonda ndi kukambirana.

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Pamene njira zopangira semiconductor zikupitilirabe, mawu odziwika bwino otchedwa "Moore's Law" akhala akufalikira mumakampani. Idakonzedwa ndi Gordon Moore, m'modzi mwa omwe adayambitsa Intel, mu 1965. Zomwe zili mkati mwake ndi: chiwerengero cha transistors chomwe chikhoza kukhazikitsidwa pa dera lophatikizidwa chidzawirikiza kawiri pafupifupi 18 kwa miyezi 24 iliyonse. Lamuloli silimangowunikira komanso kuneneratu za chitukuko chamakampani, komanso mphamvu yoyendetsera ntchito yopanga ma semiconductor - chilichonse ndikupanga ma transistors okhala ndi kukula kochepa komanso magwiridwe antchito okhazikika. Kuyambira m'ma 1950 mpaka pano, pafupifupi zaka 70, umisiri waukadaulo wa BJT, MOSFET, CMOS, DMOS, ndi hybrid BiCMOS ndi BCD wapangidwa.

1. BJT
Bipolar junction transistor (BJT), yomwe imadziwika kuti triode. Malipiro otaya mu transistor makamaka chifukwa cha kufalikira ndi kusuntha kwa zonyamulira pa mphambano ya PN. Popeza imakhudza kuyenda kwa ma elekitironi ndi mabowo, imatchedwa chipangizo cha bipolar.

Kuyang'ana mmbuyo pa mbiri ya kubadwa kwake. Chifukwa cha lingaliro losintha ma vacuum triodes ndi amplifiers olimba, Shockley adaganiza zopanga kafukufuku wofunikira pa semiconductors m'chilimwe cha 1945. Mu theka lachiwiri la 1945, Bell Labs idakhazikitsa gulu lofufuza lafizikiki lolimba motsogozedwa ndi Shockley. M'gululi, mulibe akatswiri a sayansi ya zakuthambo okha, komanso akatswiri ozungulira dera ndi akatswiri a zamankhwala, kuphatikizapo Bardeen, katswiri wa sayansi ya sayansi, ndi Brattain, katswiri wa sayansi yoyesera. Mu Disembala 1947, chochitika chomwe mibadwo yotsatira idawona kuti ndi yofunika kwambiri - Bardeen ndi Brattain adatulukira bwino njira yoyamba yapadziko lonse ya germanium point-contact transistor yokhala ndi matalikidwe apano.

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Bardeen ndi Brattain's first point-contact transistor

Posakhalitsa, Shockley anapanga transistor ya bipolar junction transistor mu 1948. Iye anaganiza kuti transistor ikhoza kupangidwa ndi ma pn junctions awiri, imodzi yopita patsogolo ndi ina yotsalira, ndipo adalandira chilolezo mu June 1948. Mu 1949, adafalitsa chiphunzitso chatsatanetsatane ntchito ya mphambano transistor. Zaka zoposa ziwiri pambuyo pake, asayansi ndi mainjiniya ku Bell Labs adapanga njira yokwaniritsira kupanga ma transistors ophatikizika (chofunikira kwambiri mu 1951), ndikutsegula nthawi yatsopano yaukadaulo wamagetsi. Pozindikira zopereka zawo pakupanga ma transistors, Shockley, Bardeen ndi Brattain pamodzi adapambana Mphotho ya Nobel mu Fizikisi ya 1956.

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Chithunzi chosavuta cha NPN bipolar junction transistor

Ponena za kapangidwe ka ma transistors a bipolar junction, ma BJT wamba ndi NPN ndi PNP. Tsatanetsatane wamkati wamkati ukuwonetsedwa mu chithunzi pansipa. Chigawo chonyansa cha semiconductor chomwe chimagwirizana ndi emitter ndi dera la emitter, lomwe lili ndi chiwerengero chachikulu cha doping; chigawo chonyansa cha semiconductor chomwe chikugwirizana ndi maziko ake ndi malo oyambira, omwe ali ndi m'lifupi mwake ndi ochepa kwambiri komanso otsika kwambiri a doping; chigawo chonyansa cha semiconductor chomwe chikugwirizana ndi osonkhanitsa ndi dera la osonkhanitsa, lomwe lili ndi malo akuluakulu komanso otsika kwambiri a doping.

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Ubwino waukadaulo wa BJT ndi liwiro loyankhira, kuthamanga kwambiri (kusintha kwa voliyumu yolowera kumafanana ndi kusintha kwakukulu kwaposachedwa), phokoso lochepa, kulondola kwakukulu kwa analogi, komanso kutha kwamphamvu pakuyendetsa; zovuta ndizophatikizana pang'ono (kuya kwakuya sikungachepetsedwe ndi kukula kwapambuyo) komanso kugwiritsa ntchito mphamvu zambiri.

2. MOS

Metal Oxide Semiconductor Field Effect Transistor (Metal Oxide Semiconductor FET), ndiye kuti, transistor yomwe imayendetsa kusintha kwa semiconductor (S) conductive channel pogwiritsa ntchito voteji pachipata chachitsulo chosanjikiza (M-zitsulo aluminium) ndi gwero kudzera mu oxide wosanjikiza (O-insulating wosanjikiza SiO2) kupanga zotsatira za munda magetsi. Popeza chipata ndi gwero, ndi chipata ndi kukhetsa ali olekanitsidwa ndi wosanjikiza SiO2, MOSFET amatchedwanso insulated chipata field effect transistor. Mu 1962, Bell Labs adalengeza zachitukuko chopambana, chomwe chidakhala chimodzi mwazinthu zofunika kwambiri m'mbiri ya chitukuko cha semiconductor ndikuyika mwachindunji maziko aukadaulo akubwera kwa kukumbukira kwa semiconductor.

MOSFET ikhoza kugawidwa mu njira ya P ndi njira ya N malinga ndi mtundu wa njira yoyendetsera. Malinga ndi chipata voteji matalikidwe, akhoza kugawidwa mu: kutha mtundu-pamene chipata voteji ndi ziro, pali njira conductive pakati kuda ndi gwero; zowonjezera mtundu wa zida za N (P), pali njira yoyendetsera pokhapokha mphamvu ya chipata ndi yayikulu kuposa (zocheperako) zero, ndipo mphamvu ya MOSFET imakhala makamaka ya mtundu waN wowonjezera.

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Kusiyana kwakukulu pakati pa MOS ndi triode kumaphatikizapo koma sikumangokhalira kuzinthu izi:

-Triodes ndi zida za bipolar chifukwa onyamula ambiri ndi ochepa amatenga nawo mbali pakuwongolera nthawi imodzi; pamene MOS amangoyendetsa magetsi kudzera mu zonyamulira zambiri mu semiconductors, ndipo amatchedwanso unipolar transistor.
-Triodes ndi zida zoyendetsedwa ndizomwe zimagwiritsidwa ntchito kwambiri; pomwe ma MOSFET ndi zida zoyendetsedwa ndi voliyumu zomwe zimakhala ndi mphamvu zochepa.
-Ma triodes ali ndi kukana kwakukulu, pomwe machubu a MOS ali ndi kukana pang'ono, mamiliyoni mazana ochepa okha. Pazida zamagetsi zamakono, machubu a MOS amagwiritsidwa ntchito ngati masiwichi, makamaka chifukwa mphamvu ya MOS ndiyokwera kwambiri poyerekeza ndi ma triodes.
-Triodes ali ndi mtengo wopindulitsa, ndipo machubu a MOS ndi okwera mtengo.
-Masiku ano, machubu a MOS amagwiritsidwa ntchito m'malo mwa triodes muzochitika zambiri. Pokhapokha muzochitika zotsika mphamvu kapena zopanda mphamvu, tidzagwiritsa ntchito ma triodes poganizira ubwino wamtengo wapatali.
3. CMOS

Complementary Metal Oxide Semiconductor: Ukadaulo wa CMOS umagwiritsa ntchito p-mtundu wowonjezera ndi n-type metal oxide semiconductor transistors (MOSFETs) kupanga zida zamagetsi ndi mabwalo omveka. Chithunzi chotsatira chikuwonetsa chosinthira cha CMOS chodziwika bwino, chomwe chimagwiritsidwa ntchito kutembenuza "1→0" kapena "0→1".

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Chithunzi chotsatirachi ndi gawo lofananira la CMOS. Kumanzere ndi NMS, ndipo kumanja ndi PMOS. Mitengo ya G ya ma MOS awiriwa imalumikizidwa palimodzi ngati njira yolowera pachipata, ndipo mitengo ya D imalumikizidwa palimodzi ngati kutulutsa kofanana. VDD imalumikizidwa ndi gwero la PMOS, ndipo VSS imalumikizidwa ndi gwero la NMOS.

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Mu 1963, Wanlass ndi Sah wa Fairchild Semiconductor anapanga dera la CMOS. Mu 1968, American Radio Corporation (RCA) idapanga gawo loyamba lophatikizika la CMOS, ndipo kuyambira pamenepo, dera la CMOS lapeza chitukuko chachikulu. Ubwino wake ndikugwiritsa ntchito mphamvu zochepa komanso kuphatikiza kwakukulu (njira ya STI / LOCOS imatha kupititsa patsogolo kuphatikiza); kuipa kwake ndiko kukhalapo kwa loko (PN junction reverse bias imagwiritsidwa ntchito ngati kudzipatula pakati pa machubu a MOS, ndipo kusokoneza kumatha kupanga chipika chowonjezera ndikuwotcha dera).

4. DMOS
Wophatikizika Wachiwiri wa Metal Oxide Semiconductor: Mofanana ndi mawonekedwe a zida wamba za MOSFET, ilinso ndi gwero, kukhetsa, zipata ndi maelekitirodi ena, koma mphamvu yakusweka kwa malekezero akukhetsa ndi yayikulu. Njira yogawanitsa kawiri imagwiritsidwa ntchito.

Chithunzi chomwe chili pansipa chikuwonetsa gawo la DMOS wamba wa N-channel. Mtundu uwu wa chipangizo cha DMOS nthawi zambiri umagwiritsidwa ntchito posintha mbali zotsika, pomwe gwero la MOSFET limalumikizidwa pansi. Kuphatikiza apo, pali P-channel DMOS. Mtundu uwu wa chipangizo cha DMOS nthawi zambiri umagwiritsidwa ntchito pazosintha zapamwamba, pomwe gwero la MOSFET limalumikizidwa ndi magetsi abwino. Mofanana ndi CMOS, zida zowonjezera za DMOS zimagwiritsa ntchito N-channel ndi P-channel MOSFETs pa chip chomwechi kuti chipereke ntchito zowonjezera.

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Kutengera komwe kulowera njira, DMOS imatha kugawidwa m'mitundu iwiri, yomwe ndi yoyima yosakanikirana ndi chitsulo chophatikizika kawiri oxide semiconductor field effect transistor VDMOS (Vertical Double-Diffused MOSFET) ndi lateral diffused double-diffused metal oxide semiconductor field effect transistor LDMOS (Lateral Double - MOSFET yofalikira).

Zida za VDMOS zidapangidwa ndi njira yoyima. Poyerekeza ndi zida zam'mbali za DMOS, ali ndi mphamvu zowononga kwambiri komanso kuwongolera komwe kulipo, koma kukaniza kukadali kwakukulu.

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Zipangizo za LDMOS zidapangidwa ndi njira yakumbuyo ndipo ndi zida zamphamvu za MOSFET. Poyerekeza ndi zida zoyima za DMOS, zimalola kutsika kwapang'onopang'ono komanso kuthamanga kwachangu.

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Poyerekeza ndi ma MOSFET akale, DMOS ili ndi mphamvu zochulukirapo komanso kutsika kochepa, motero imagwiritsidwa ntchito kwambiri pazida zamagetsi zamphamvu kwambiri monga zosinthira magetsi, zida zamagetsi ndi zoyendetsa zamagalimoto amagetsi.

5. BiCMOS
Bipolar CMOS ndi teknoloji yomwe imagwirizanitsa zipangizo za CMOS ndi bipolar pa chip chomwecho nthawi imodzi. Lingaliro lake lalikulu ndikugwiritsa ntchito zida za CMOS ngati gawo lalikulu lagawo, ndikuwonjezera zida za bipolar kapena mabwalo pomwe ma capacitive katundu amafunikira kuyendetsedwa. Chifukwa chake, mabwalo a BiCMOS ali ndi maubwino ophatikizana kwambiri komanso kugwiritsa ntchito mphamvu pang'ono kwa mabwalo a CMOS, komanso maubwino a liwiro lalikulu komanso kuthekera koyendetsa bwino kwa mabwalo a BJT.

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Ukadaulo wa STMicroelectronics 'BiCMOS SiGe (silicon germanium) umaphatikiza magawo a RF, analogi ndi digito pa chip chimodzi, chomwe chingachepetse kwambiri kuchuluka kwa zida zakunja ndikuwonjezera kugwiritsa ntchito mphamvu.

6. BCD
Bipolar-CMOS-DMOS, ukadaulo uwu ukhoza kupanga zida za bipolar, CMOS ndi DMOS pa chip chomwecho, chotchedwa BCD process, yomwe idapangidwa bwino ndi STMicroelectronics (ST) mu 1986.

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Bipolar ndiyoyenera mabwalo a analogi, CMOS ndiyoyenera mabwalo a digito ndi malingaliro, ndipo DMOS ndiyoyenera pazida zamagetsi ndi zamagetsi. BCD imagwirizanitsa ubwino wa atatuwa. Pambuyo pakusintha kosalekeza, BCD imagwiritsidwa ntchito kwambiri pazinthu zoyang'anira mphamvu, kupeza deta ya analogi ndi ma actuators amagetsi. Malinga ndi tsamba lovomerezeka la ST, njira yokhwima ya BCD ikadali pafupifupi 100nm, 90nm ikadali pamapangidwe amtundu, ndipo ukadaulo wa 40nmBCD ndi wazinthu zam'badwo wotsatira zomwe zikukula.

 


Nthawi yotumiza: Sep-10-2024
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