Ntchito zazikulu zaboti la silicon carbidethandizo ndi quartz boti thandizo ndi chimodzimodzi.Boti la silicon carbidethandizo lili ndi ntchito zabwino koma mtengo wapamwamba. Zimapanga ubale wina ndi thandizo la boti la quartz pazida zopangira batire zokhala ndi zovuta zogwirira ntchito (monga zida za LPCVD ndi zida za boron diffusion). M'zida zopangira batire zomwe zimakhala ndi ntchito wamba, chifukwa cha ubale wamitengo, silicon carbide ndi quartz boti thandizo amakhala magulu omwe akupikisana.
① Ubale wolowa m'malo mu LPCVD ndi zida zoyatsira boron
Zipangizo za LPCVD zimagwiritsidwa ntchito popanga ma batire cell tunneling oxidation ndi njira yokonzekera yosanjikiza ya polysilicon. Mfundo yogwirira ntchito:
Pansi otsika-anzanu mlengalenga, kuphatikizapo kutentha koyenera, zochita mankhwala ndi mafunsidwe filimu mapangidwe zimatheka kukonzekera kopitilira muyeso tunneling okusayidi wosanjikiza ndi polysilicon filimu. Mu tunneling oxidation ndi doped polysilicon layer yokonzekera, chithandizo cha bwato chimakhala ndi kutentha kwakukulu kogwira ntchito ndipo filimu ya silicon imayikidwa pamwamba. Thermal expansion coefficient of quartz ndi yosiyana kwambiri ndi ya silicon. Mukagwiritsidwa ntchito pamwambapa, ndikofunikira kuthira nthawi zonse ndikuchotsa silicon yomwe idayikidwa pamwamba kuti chothandizira chaboti cha quartz chitha kusweka chifukwa chakukula kwamafuta ndi kutsika chifukwa cha kuchuluka kwamafuta komwe kumapangidwa ndi silicon. Chifukwa cha pickling pafupipafupi komanso kutsika kwamphamvu kwa kutentha kwambiri, chotengera bwato la quartz chimakhala ndi moyo waufupi ndipo nthawi zambiri chimasinthidwa mumsewu wa oxidation ndi njira yokonzekera yosanjikiza ya polysilicon, yomwe imakulitsa kwambiri mtengo wopangira batire. Coefficient yowonjezera yasilicon carbideili pafupi ndi silicon. The Integratedboti la silicon carbidechofukizira sikutanthauza pickling mu ngalande makutidwe ndi okosijeni ndi doped polysilicon wosanjikiza ndondomeko kukonzekera. Ili ndi mphamvu zotentha kwambiri komanso moyo wautali wautumiki. Ndi njira yabwino yopangira boti la quartz.
Zida zowonjezera za Boron zimagwiritsidwa ntchito kwambiri popanga zinthu za doping boron pagawo la N-mtundu wa silicon wafer gawo lapansi la cell ya batri kukonzekera emitter yamtundu wa P kuti ipange mphambano ya PN. Mfundo yogwirira ntchito ndikuzindikira momwe zinthu zimachitikira komanso mapangidwe a filimu ya ma molekyulu m'malo otentha kwambiri. Filimuyo ikapangidwa, imatha kufalikira ndi kutentha kwambiri kuti izindikire ntchito ya doping ya silicon wafer pamwamba. Chifukwa cha kutentha kwakukulu kogwira ntchito kwa zida zowonjezera za boron, chogwiritsira ntchito bwato la quartz chimakhala ndi mphamvu zochepa zotentha kwambiri komanso moyo waufupi wautumiki mu zipangizo zowonjezera boron. The Integratedboti la silicon carbidechogwirizira ali ndi mphamvu zotentha kwambiri ndipo ndi njira yabwino yopangira boti la quartz mu njira yokulitsa boron.
② Chiyanjano cholowa m'malo mwa zida zina
Zothandizira mabwato a SiC zimakhala ndi mphamvu zolimba zopangira komanso magwiridwe antchito abwino kwambiri. Mitengo yawo nthawi zambiri imakhala yokwera kuposa ya mabwato a quartz. Pazonse zogwirira ntchito pazida zopangira ma cell, kusiyana kwa moyo wautumiki pakati pa zothandizira mabwato a SiC ndi zothandizira mabwato a quartz ndizochepa. Makasitomala otsika makamaka amafanizira ndikusankha pakati pa mtengo ndi magwiridwe antchito potengera njira zawo ndi zosowa zawo. Zothandizira mabwato a SiC ndi zothandizira mabwato a quartz zakhala zokhazikika komanso zopikisana. Komabe, phindu lalikulu la zothandizira za boti la SiC ndizokwera kwambiri pakadali pano. Ndi kuchepa kwa mtengo wopangira ma boti a SiC othandizira, ngati mtengo wogulitsa wa SiC boti umathandizira kutsika mwachangu, zidzabweretsanso mpikisano wokulirapo pazothandizira mabwato a quartz.
Kugwiritsa ntchito chiŵerengero
Njira yaukadaulo yama cell ndiukadaulo wa PERC ndiukadaulo wa TOPCon. Gawo lamsika laukadaulo wa PERC ndi 88%, ndipo gawo la msika laukadaulo wa TOPCon ndi 8.3%. Msika wophatikizana wa awiriwa ndi 96.30%.
Monga momwe chithunzi chili pansipa:
Muukadaulo wa PERC, zothandizira zamabwato zimafunikira pakufalikira kwa phosphorous kutsogolo ndi njira zowotchera. Muukadaulo wa TOPCon, zothandizira zamabwato zimafunikira pakufalikira kwa boron kutsogolo, LPCVD, kufalikira kwa phosphorous kumbuyo ndi njira zolumikizira. Pakalipano, zothandizira za silicon carbide boat zimagwiritsidwa ntchito makamaka mu ndondomeko ya LPCVD ya teknoloji ya TOPCon, ndipo kugwiritsa ntchito kwawo mu njira ya kufalikira kwa boron kwatsimikiziridwa makamaka.
Chithunzi Ntchito ya boti imathandizira pakukonza ma cell
Zindikirani: Pambuyo pakuphimba kutsogolo ndi kumbuyo kwa matekinoloje a PERC ndi TOPCon, palinso maulalo monga kusindikiza pazithunzi, sintering ndi kuyesa ndi kusanja, zomwe sizimaphatikizapo kugwiritsa ntchito zothandizira bwato ndipo sizinalembedwe pazithunzi pamwambapa.
Nthawi yotumiza: Oct-15-2024