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Kugwiritsa ntchito ndi magwiridwe antchito Zogulitsa ndi kugwiritsa ntchito
Si single crystal industry, GaN, AlN, safire ndi zina za MOCVD. - Graphite maziko zokutira kwa single crystal silicon epitaxial kukula
Ntchito yayikulu: kuyera kwakukulu, kukana kukokoloka, kukhathamiritsa kwamafuta apamwamba, - Njira ya MOCVD, zokutira zoyambira za graphite za kukula kwa GaN epitaxial
kutentha kwambiri kukana, kutsika kwamafuta owonjezera kowonjezera.
Thermal Conductivity | 250 W/m °K | Njira ya laser flash, RT |
Kukula kwa Thermal (CTE) | 4.5x10-6°K | Kutentha kwachipinda mpaka 950 ° C, silika dilatometer |
Katundu | Mtengo | Njira |
Kuchulukana | 3.21g/cc | Sink-float ndi dimension |
Kutentha kwenikweni | 0.66 J/g °K | Kuwala kwa laser pulsed |
Flexural mphamvu | 450 MPa 560 MPa | 4 point bend, RT4 point bend, 1300° |
Kulimba kwa fracture | 2.94 MPa m1/2 | Microindentation |
Kuuma | 2800 | Vicker, 500g katundu |
Elastic ModulusYoung's Modulus | 450 GPA430 GPA | 4 pt bend, RT4 pt bend, 1300 °C |
Kukula kwambewu | 2 - 10 μm | Mtengo wa SEM |
Purity, SEM Kapangidwe, makulidwe kusanthula kwaKupaka kwa SiC
Kuyera kwa zokutira za SiC pa graphite pogwiritsa ntchito CVD ndizokwera kwambiri mpaka 99.9995%. Mapangidwe ake ndi fcc. Mafilimu a SiC omwe amaikidwa pa graphite ndi (111) akuyang'ana monga momwe asonyezedwera mu deta ya XRD (Fig.1) yosonyeza khalidwe lake lapamwamba la crystalline. Makulidwe a filimu ya SiC ndi yofanana kwambiri monga momwe tawonetsera mkuyu.
Chithunzi 2: makulidwe yunifolomu ya mafilimu a SiC
Kapangidwe ka kristalo ka filimu ya CVD SiC ndi mawonekedwe a nkhope ya cubic, ndipo mawonekedwe akukula kwa filimu ali pafupi ndi 100%
SEM ndi XRD ya kanema wa beta-SiC pa graphite
SINGLE CRYSTAL SILICON EPITAXIAL BASE
Zochita zamalonda ndi chiyembekezo chogwiritsa ntchito.
Silicon carbide (SiC) yokutidwamaziko ndiye maziko abwino kwambiri a silicon imodzi ya crystal ndi GaN epitaxy, yomwe ndi gawo lalikulu la ng'anjo ya epitaxy. Pansi pake ndi chofunikira chopangira silicon ya monocrystalline pamabwalo akulu ophatikizika. Ili ndi kuyera kwakukulu, kukana kutentha kwambiri, kukana kwa dzimbiri, kulimba kwa mpweya wabwino ndi zina zabwino zakuthupi.
Kugwiritsidwa ntchito ndi mankhwala
Graphite m'munsi zokutira kwa crystal silicon epitaxial kukula Oyenera makina a Aixtron, etc. Kupaka makulidwe: 90 ~ 150um M'mimba mwake mwa chigwa chophwanyika ndi 55mm.
Chithunzi cha SOLAR PHOTOVOLTAIC
GAupidpelitcubaetiaonnd
graphite crucible zokutirakwa silicon imodzi ya crystal mwa njira yowongoka
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