silicon carbide carbon-carbon composite crucible, cvd mkpuchi usoro

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Ihe mejupụtara carbon / carbon(nke a na-akpọ ya "C / C ma ọ bụ CFC") bụ ụdị ihe mejupụtara nke sitere na carbon ma mee ka carbon fiber na ngwaahịa ya sie ike (carbon fiber preform). Ọ nwere ma inertia nke carbon na ike dị elu nke eriri carbon. Ọ nwere ezigbo n'ibu Njirimara, okpomọkụ na-eguzogide, corrosion eguzogide, esemokwu damping na thermal na eletriki conductivity àgwà.

CVD-SiCmkpuchi nwere àgwà nke edo Ọdịdị, kọmpat ihe onwunwe, elu okpomọkụ na-eguzogide, ọxịdashọn-eguzogide, elu ịdị ọcha, acid & alkali eguzogide na organic reagent, na anụ ahụ na chemical Njirimara.

N'iji ya tụnyere ihe ndị dị elu nke graphite, graphite na-amalite oxidize na 400C, nke ga-eme ka nkwụsị nke ntụ ntụ n'ihi oxidation, na-ebute mmetọ gburugburu ebe obibi na ngwaọrụ ndị dị n'akụkụ na oghere oghere, na-abawanye adịghị ọcha nke gburugburu ebe obibi dị ọcha.

Agbanyeghị, mkpuchi SiC nwere ike idowe nkwụsi ike anụ ahụ na kemịkalụ na ogo 1600, a na-ejikarị ya na ụlọ ọrụ ọgbara ọhụrụ, ọkachasị na ụlọ ọrụ semiconductor.

Ụlọ ọrụ anyị na-enye ọrụ usoro mkpuchi SiC site na usoro CVD n'elu graphite, ceramics na ihe ndị ọzọ, nke mere na gas pụrụ iche nwere carbon na silicon na-emeghachi omume na okpomọkụ dị elu iji nweta mkpụrụ ndụ SiC dị ọcha, ụmụ irighiri ihe ndị a na-edebe n'elu ihe ndị a na-ekpuchi, na-akpụ oyi akwa mkpuchi SIC. The SIC guzobere na-ike bonded na graphite isi, na-enye graphite isi pụrụ iche Njirimara, si otú na-eme ka elu nke graphite kọmpat, Porosity-free, elu okpomọkụ nguzogide, corrosion iguzogide na oxidation resistance.

 Nhazi mkpuchi SiC na graphite elu MOCVD susceptors

Isi atụmatụ:

1. Nguzogide oxidation dị elu:

Nguzogide oxidation ka dị ezigbo mma mgbe okpomọkụ dị elu dị ka 1600 C.

2. Nnukwu ịdị ọcha: nke a na-eme site na ntinye ikuku kemịkalụ n'okpuru ọnọdụ chlorination dị elu.

3. Nguzogide nbibi: elu ike, kọmpat elu, ezigbo ahụ.

4. Nguzogide corrosion: acid, alkali, nnu na organic reagents.

 

Nkọwa bụ isi nke mkpuchi CVD-SIC:

SiC-CVD

Njupụta

(g/cc)

3.21

Ike mgbanwe

(Mpa)

470

Mgbasa ọkụ ọkụ

(10-6/K)

4

Thermal conductivity

(W/mK)

300

Foto zuru ezu

Nhazi mkpuchi SiC na graphite elu MOCVD susceptorsNhazi mkpuchi SiC na graphite elu MOCVD susceptorsNhazi mkpuchi SiC na graphite elu MOCVD susceptorsNhazi mkpuchi SiC na graphite elu MOCVD susceptorsNhazi mkpuchi SiC na graphite elu MOCVD susceptors

Ozi ụlọ ọrụ

111

Ngwa ụlọ ọrụ

222

Ụlọ nkwakọba ihe

333

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