Ihe mkpuchi SiC/Mkpuchi Ihe Graphite/Tray maka Semiconductor

Ihe mkpuchi SiC/Mkpuchi graphite/Tray maka onyonyo egosipụtara na Semiconductor

Nkọwa dị mkpirikpi:

VET Energy SiC mkpuchi Graphite Susceptor maka Epitaxial Growth bụ ngwaahịa na-arụ ọrụ dị elu emebere iji nye arụmọrụ na-agbanwe agbanwe na ntụkwasị obi ruo ogologo oge.Ọ nwere oke okpomọkụ dị mma na ịdị n'otu okpomọkụ, ịdị ọcha dị elu, nkwụsị nke mbuze, na-eme ka ọ bụrụ ngwọta zuru oke maka ngwa nhazi wafer.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Ihe mkpuchi SiC / mkpuchi nke Graphite susceptor maka Semiconductor

Susceptor SiC Coated Graphite Susceptor bụ isi akụrụngwa eji na usoro nrụpụta semiconductor dị iche iche.Anyị na-eji teknụzụ anyị nwere ikike ime ka onye na-ebu silicon carbide nwee ịdị ọcha nke ukwuu, ezigbo mkpuchi mkpuchi na ndụ ọrụ magburu onwe ya, yana nnukwu nguzogide kemịkalụ na ihe nkwụsi ike ọkụ.

Atụmatụ:
Ọkachamara Thermal Shock Resistance
Magburu onwe ya nguzogide anụ ahụ
· Magburu onwe Chemical Resistance
· Super High ịdị ọcha
· Ọdịiche dị n'ụdị mgbagwoju anya
Enwere ike iji ya n'okpuru ikuku Oxidizing

Ngwa:

Njirimara ahụkarị nke ihe eserese eserese:

Njupụta pụtara ìhè:	1.85 g/cm3
Mgbochi ọkụ eletrik:	11 μΩm
Ike Flexural:	49 MPa (500kgf/cm2)
Ike ike mmiri:	58
Ash:	<5ppm
Nrụpụta okpomọkụ:	116 W/mK (100 kcal/mhr-℃)

CVD SiC薄膜基本物理性能 Njirimara anụ ahụ bụ isi nke CVD SiCmkpuchi
性质 / Ngwongwo	典型数值 / Bara uru
晶体结构 / Crystal Structure	FCC β phase 多晶，主要为（111）取向
密度 / Njupụta	3.21g/cm³
Isi ike	2500 维氏硬度： (ibu 500g)
晶粒大小 / ọka SiZe	2 ~ 10μm
纯度 / Chemical Purity	99.99995%
热容 / Ike ọkụ	640 nk^-1· K^-1
升华温度 / Okpomọkụ Sublimation	2700 ℃
抗弯强度 / Ike Flexural	415 MPa RT 4-isi
Modul 杨氏模量 / Young's Modul	430 Gpa 4pt ekwe, 1300 ℃
导热系数 / Thermal Conductivity	300W·m^-1· K^-1
热膨胀系数 / Mgbasa ọkụ (CTE)	4.5 × 10^-6K^-1

VET Energy bụ ezigbo onye nrụpụta graphite ahaziri ahaziri na ngwaahịa silicon carbide nwere mkpuchi dị iche iche dị ka mkpuchi SiC, mkpuchi TaC, mkpuchi carbon glassy, mkpuchi carbon pyrolytic, wdg, nwere ike ịnye akụkụ dị iche iche ahaziri maka semiconductor na ụlọ ọrụ fotovoltaic.

Anyị oru otu si n'elu ụlọ nnyocha ụlọ ọrụ, nwere ike na-enye ndị ọzọ ọkachamara ihe ngwọta maka gị.

Anyị na-aga n'ihu na-emepụta usoro dị elu iji nye ihe ndị dị elu karị, ma rụọ ọrụ nkà na ụzụ pụrụ iche, nke nwere ike ime ka njikọ dị n'etiti mkpuchi na mkpụrụ ahụ sie ike ma ghara ịdị na-apụ apụ.

Ji obi ụtọ nabata gị ileta ụlọ ọrụ anyị, ka anyị nwee mkparịta ụka ọzọ!