Ihe mkpuchi SiC/Mkpuchi Ihe eserese eserese maka Semiconductor

Ihe mkpuchi SiC/Mkpuchi Ihe Graphite/Tray maka onyonyo egosipụtara na Semiconductor

Nkọwa dị mkpirikpi:

VET Energy SiC mkpuchi Graphite Susceptor maka Epitaxial Growth bụ ngwaahịa na-arụ ọrụ dị elu emebere iji nye arụmọrụ na-agbanwe agbanwe na ntụkwasị obi ruo ogologo oge. Ọ nwere oke okpomọkụ dị mma na ịdị n'otu okpomọkụ, ịdị ọcha dị elu, nkwụsị nke mbuze, na-eme ka ọ bụrụ ngwọta zuru oke maka ngwa nhazi wafer.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Ihe mkpuchi SiC / mkpuchi nke Graphite susceptor maka Semiconductor

NkeMpempe akwụkwọ eserese eserese SiCbụ ihe ngwọta na-adịgide adịgide ma dị irè emebere iji gboo mkpa siri ike nke ụlọ ọrụ nhazi semiconductor. Na-egosipụta oyi akwa nke ịdị ọcha dị elumkpuchi silicon carbide (SiC)., nke a mkpụrụ na-anapụta pụrụ iche thermal nkwụsi ike, oxidation resistance, na ogologo ọrụ ndụ, na-eme ka ọ dị mma maka ngwa na MOCVD Filiks, graphite wafer na-ebu, na ndị ọzọ na-okpomọkụ gburugburu.

Atụmatụ:
Ọkachamma Thermal Shock Resistance
Magburu onwe ya nguzogide anụ ahụ
· Magburu onwe Chemical Resistance
· Super High ịdị ọcha
· Ọdịiche dị n'ụdị mgbagwoju anya
Enwere ike iji ya n'okpuru ikuku Oxidizing

Ngwa:

Njirimara na uru ngwaahịa:

1. Nguzogide okpomọkụ dị elu:Na ịdị ọcha dị eluMkpuchi SiC, mkpụrụ ahụ na-eguzogide oke okpomọkụ, na-eme ka arụ ọrụ na-agbanwe agbanwe na gburugburu ebe obibi na-achọsi ike dị ka mmepụta epitaxy na semiconductor.

2. Ebuliri Ogologo:Ihe mejupụtara graphite mkpuchi SiC ka emebere iji guzogide corrosion kemịkalụ na oxidation, na-abawanye ogologo ndụ mkpụrụ osisi ahụ ma e jiri ya tụnyere ọkọlọtọ graphite substrates.

3. Vitreous mkpuchi graphite:The pụrụ iche vitreous Ọdịdị nkeMkpuchi SiCna-enye ike dị elu nke ọma, na-ebelata iyi na akwa n'oge nhazi okpomọkụ dị elu.

4. Akwa mkpuchi SiC dị ọcha:Mkpụrụ anyị na-eme ka mmetọ dị ntakịrị na usoro semiconductor nwere mmetụta siri ike, na-enye ntụkwasị obi maka ụlọ ọrụ chọrọ ịdị ọcha ihe siri ike.

5. Ngwa ahịa sara mbara:NkeSiC mkpuchi graphite susceptorahịa na-aga n'ihu na-eto eto ka ọchịchọ maka ngwaahịa mkpuchi SiC dị elu na mmepụta semiconductor na-abawanye, na-edobe mkpụrụ a ka ọ bụrụ isi ihe ọkpụkpọ na ahịa ahịa graphite wafer na ahịa ahịa trays graphite silicon carbide.

Njirimara ahụkarị nke ihe eserese eserese:

Njupụta pụtara ìhè:	1.85 g/cm3
Mgbochi ọkụ eletrik:	11 μΩm
Ike Flexural:	49 MPa (500kgf/cm2)
Ike ike mmiri:	58
Ash:	<5ppm
Nrụpụta okpomọkụ:	116 W/mK (100 kcal/mhr-℃)

CVD SiC薄膜基本物理性能 Njirimara anụ ahụ bụ isi nke CVD SiCmkpuchi
性质 / Ngwongwo	典型数值 / Bara uru
晶体结构 / Crystal Structure	FCC β phase 多晶，主要为（111）取向
密度 / Njupụta	3.21g/cm³
Isi ike	2500 维氏硬度 (ibu 500g)
晶粒大小 / ọka SiZe	2 ~ 10μm
纯度 / Chemical Purity	99.99995%
热容 / Ike ọkụ	640 nk^-1· K^-1
升华温度 / Okpomọkụ Sublimation	2700 ℃
抗弯强度 / Ike Flexural	415 MPa RT 4-isi
Modul 杨氏模量 / Young's Modul	430 Gpa 4pt ekwe, 1300 ℃
导热系数 / Thermal Conductivity	300W·m^-1· K^-1
热膨胀系数 / Mgbasa ọkụ (CTE)	4.5 × 10^-6K^-1

VET Energy bụ ezigbo onye nrụpụta nke ngwaahịa graphite ahaziri na ngwaahịa silicon carbide nwere mkpuchi dị iche iche dị ka mkpuchi SiC, mkpuchi TaC, mkpuchi carbon glassy, mkpuchi carbon pyrolytic, wdg, nwere ike ịnye akụkụ dị iche iche ahaziri maka semiconductor na ụlọ ọrụ fotovoltaic.

Anyị ọrụ otu si n'elu ụlọ nnyocha ụlọ ọrụ, nwere ike na-enye ndị ọzọ ọkachamara ihe ngwọta maka gị.

Anyị na-aga n'ihu na-emepụta usoro dị elu iji nye ihe ndị dị elu karị, ma rụọ ọrụ nkà na ụzụ pụrụ iche, nke nwere ike ime ka njikọ dị n'etiti mkpuchi na mkpụrụ ahụ sie ike ma ghara ịdị na-apụ apụ.

Ji obi ụtọ nabata gị ileta ụlọ ọrụ anyị, ka anyị nwee mkparịta ụka ọzọ!