Ọnụ ego nke VET EnergyMOCVD Susceptor SiC kpuchiebụ ngwaahịa na-arụ ọrụ dị elu emebere maka ịrụ ọrụ na-agbanwe agbanwe na ntụkwasị obi na ngwa nhazi wafer. Na-egosipụta onye ka eluMkpuchi SiC, ọ na-enye nguzogide okpomọkụ pụrụ iche, ịdị n'otu thermal, na nguzogide corrosion. Kwesịrị ekwesị makaNgwa MOCVD, ihe asilicon carbide mkpuchi susceptorana achi achi nke kacha mmawaferuto na ogologo ndụ akụrụngwa.
Njirimara ngwaahịa:
1. High-okpomọkụ oxidation eguzogide ruo 1700 ℃: Mkpuchi SiC anyị na-enye nkwụsi ike okpomọkụ pụrụ iche, ọbụlagodi na gburugburu MOCVD na-achọsi ike.
2. High ịdị ọcha na thermal uniformity: Ihe mkpuchi carbide silicon na-ekwe nkwa adịghị ọcha na ikpo ọkụ na-agbanwe agbanwe n'ofe wafer, na-eme ka kristal dị elu.
3. Magburu onwe corrosion eguzogide: Na-eguzogide acids, alkalis, salts, and organic reagents, onye susceptor anyị na-ejigide iguzosi ike n'ezi ihe na gburugburu kemịkalụ dị iche iche.
4. Isi ike dị elu, oke elu, na ihe dị mma: Ihe ndị a na-enye aka na ndụ ọrụ ogologo oge yana nkwalite ịdịte aka.
Uru na Ngwa ngwaahịa CVD silicon carbide mkpuchi anyị
Ndị na-ahụ maka MOCVD na-ebuga uru dị ukwuu na nrụpụta semiconductor. Ihe mkpuchi SiC na-eme ka mma wafer dịkwuo mma, na-ebelata ntụpọ, ma na-ebuli nrụpụta mmepụta ihe. VET Energy na-enye ụdị ngwaahịa silicon carbide dị iche iche ahaziri maka mkpa nke semiconductor na ụlọ ọrụ fotovoltaic.
Nhazi ngwaahịa na nkwado nka nka
Dị ka onye na-emepụta ngwaahịa silicon carbide na graphite, VET Energy na-enye ngwọta ahaziri iche na mkpuchi dị iche iche dị ka SiC, TaC, carbon glass, na pyrolytic carbon. Ndị otu anyị nwere ahụmahụ nwere ike ịnye nduzi ọkachamara na nkwado maka ngwa gị kpọmkwem.
Ji obi ụtọ nabata gị ileta ụlọ ọrụ anyị, ka anyị nwee mkparịta ụka ọzọ!
