CVD Silicon Carbide mkpuchi MOCVD Susceptor

Ihe mkpuchi CVD Silicon Carbide MOCVD Susceptor egosipụtara

Nkọwa dị mkpirikpi:

VET Energy SiC mkpuchi MOCVD Susceptor bụ ngwaahịa na-arụ ọrụ dị elu emebere iji nye arụmọrụ na-agbanwe agbanwe na ntụkwasị obi ruo ogologo oge. Ọ nwere oke okpomọkụ dị mma na ịdị n'otu okpomọkụ, ịdị ọcha dị elu, nkwụsị nke mbuze, na-eme ka ọ bụrụ ngwọta zuru oke maka ngwa nhazi wafer.

Ebe amụrụ:Zhejiang, China (Mainland)

Nọmba nlereanya:Ụgbọ mmiri3002

Ngwakọta kemịkalụ:SiC mkpuchi graphite

Mgbochi ọkụ eletrik:11 μΩm

Ike ike mmiri: 58

Nrụpụta okpomọkụ:116 W/mK (100 kcal/mhr-℃)

Ọmụmaatụ:dị

Koodu HS:6903100000

Aha ika:VET

Njupụta:1.85 g/cm3

Ike Flexural:49 MPa

Ash: <5ppm

Ogo:Zuru oke

Ngwa:Semiconductor/Photovoltaic

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Ọnụ ego nke VET EnergyMOCVD Susceptor SiC kpuchiebụ ngwaahịa na-arụ ọrụ dị elu emebere maka ịrụ ọrụ na-agbanwe agbanwe na ntụkwasị obi na ngwa nhazi wafer. Na-egosipụta onye ka elumkpuchi SiC, ọ na-enye nguzogide okpomọkụ pụrụ iche, ịdị n'otu thermal, na nguzogide corrosion. Kwesịrị ekwesị makaMOCVD akụrụngwa, ihe asilicon carbide mkpuchi susceptorana achi achi nke kacha mmawaferuto na ogologo oge ndụ akụrụngwa.

Njirimara ngwaahịa:

1. High-okpomọkụ oxidation eguzogide ruo 1700 ℃: Mkpuchi SiC anyị na-enye nkwụsi ike nke okpomọkụ, ọbụlagodi na gburugburu MOCVD kacha achọ.

2. High ịdị ọcha na thermal uniformity: Ihe mkpuchi carbide silicon na-ekwe nkwa adịghị ọcha na ikpo ọkụ na-agbanwe agbanwe n'ofe wafer, na-eme ka kristal dị elu.

3. Magburu onwe corrosion eguzogide: Na-eguzogide acids, alkalis, salts, and organic reagents, onye susceptor anyị na-ejigide iguzosi ike n'ezi ihe na gburugburu kemịkalụ dị iche iche.

4. Isi ike dị elu, oke elu, na ihe dị mma: Ihe ndị a na-enye aka na ndụ ọrụ ogologo oge yana nkwalite ịdịte aka.

Uru na Ngwa ngwaahịa CVD silicon carbide mkpuchi anyị

Ndị na-ahụ maka MOCVD na-ebuga uru dị ukwuu na nrụpụta semiconductor. Ihe mkpuchi SiC na-eme ka mma wafer dịkwuo mma, na-ebelata ntụpọ, ma na-ebuli nrụpụta mmepụta ihe. VET Energy na-enye ụdị ngwaahịa silicon carbide dị iche iche ahaziri maka mkpa nke semiconductor na ụlọ ọrụ fotovoltaic.

Nhazi ngwaahịa na nkwado nka nka

Dị ka onye na-emepụta ngwaahịa silicon carbide na graphite, VET Energy na-enye ngwọta ahaziri iche na mkpuchi dị iche iche dị ka SiC, TaC, carbon glass, na pyrolytic carbon. Ndị otu anyị nwere ahụmahụ nwere ike ịnye nduzi ọkachamara na nkwado maka ngwa gị kpọmkwem.