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SiC mkpuchi ihe eserese MOCVD Wafer Carriers Susceptors

SiC mkpuchi ihe eserese MOCVD Wafer Carriers Susceptors egosipụtara onyonyo
  • SiC mkpuchi ihe eserese MOCVD Wafer Carriers Susceptors
  • SiC mkpuchi ihe eserese MOCVD Wafer Carriers Susceptors
  • SiC mkpuchi ihe eserese MOCVD Wafer Carriers Susceptors
  • SiC mkpuchi ihe eserese MOCVD Wafer Carriers Susceptors

Nkọwa dị mkpirikpi:

VET Energy SiC mkpuchi MOCVD Susceptor maka Epitaxial Growth bụ ngwaahịa na-arụ ọrụ dị elu emebere iji nye arụmọrụ na-agbanwe agbanwe na ntụkwasị obi ruo ogologo oge. Ọ nwere oke okpomọkụ dị mma na ịdị n'otu okpomọkụ, ịdị ọcha dị elu, nkwụsị nke mbuze, na-eme ka ọ bụrụ ngwọta zuru oke maka ngwa nhazi wafer.


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Nkọwa ngwaahịa

Mkpado ngwaahịa

SiC mkpuchi graphite MOCVD Wafer ndị na-ebu / susceptor

A na-eji graphite isostatic dị ike mee ihe ndị na-akpata anyị niile. Rite uru site na ịdị ọcha dị elu nke eserese anyị - emepụtara karịsịa maka usoro ịma aka dị ka epitaxy, kristal na-eto eto, ntinye ion na etching plasma, yana maka mmepụta nke ibe LED.

 

Atụmatụ ngwaahịa anyị:

1. High okpomọkụ ọxịdashọn eguzogide ruo 1700 ℃.
2. High ịdị ọcha na thermal uniformity
3. Magburu onwe corrosion eguzogide: acid, alkali, nnu na organic reagents.
4. Elu ike, kọmpat elu, ezigbo ahụ.
5. Ogologo ndụ ọrụ na ihe na-adịgide adịgide

CVD SiC薄膜基本物理性能

Njirimara anụ ahụ bụ isi nke CVD SiCmkpuchi

性质 / Ihe onwunwe

典型数值 / Uru a na-ahụkarị

晶体结构 / Crystal Structure

FCC β oge多晶，主要为（111) 取向

密度 / Njupụta

3.21g/cm³

硬度 / Isi ike

2500 维氏硬度 (ibu 500g)

晶粒大小 / ọka SiZe

2 ~ 10μm

纯度 / Chemical ịdị ọcha

99.99995%

热容 / Okpomọkụ Ike

640 nk-1· K-1

升华温度 / Sublimation okpomọkụ

2700 ℃

抗弯强度 / Ike Flexural

415 MPa RT 4-isi

杨氏模量 Modul nke Young's

430 Gpa 4pt ekwe, 1300 ℃

导热系数 / ThermalOmume omume

300W·m-1· K-1

热膨胀系数 Mgbasawanye okpomọkụ (CTE)

4.5 × 10-6K-1

1

2

VET Energy bụ ezigbo onye nrụpụta nke ngwaahịa graphite ahaziri na ngwaahịa silicon carbide nwere mkpuchi dị iche iche dị ka mkpuchi SiC, mkpuchi TaC, mkpuchi carbon glassy, ​​mkpuchi carbon pyrolytic, wdg, nwere ike ịnye akụkụ dị iche iche ahaziri maka semiconductor na ụlọ ọrụ fotovoltaic.

Anyị ọrụ otu si n'elu ụlọ nnyocha ụlọ ọrụ, nwere ike na-enye ndị ọzọ ọkachamara ihe ngwọta maka gị.

Anyị na-aga n'ihu na-emepụta usoro dị elu iji nye ihe ndị dị elu karị, ma rụọ ọrụ nkà na ụzụ pụrụ iche, nke nwere ike ime ka njikọ dị n'etiti mkpuchi na mkpụrụ ahụ sie ike ma ghara ịdị na-apụ apụ.

Ji obi ụtọ nabata gị ileta ụlọ ọrụ anyị, ka anyị nwee mkparịta ụka ọzọ!

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