Ihe mkpuchi Barrel Susceptor SiC

Nkọwa dị mkpirikpi:

VET Energy SiC Coated Barrel Susceptor bụ ngwaahịa na-arụ ọrụ dị elu emebere iji nye arụmọrụ na-agbanwe agbanwe na ntụkwasị obi ruo ogologo oge. Ọ nwere oke okpomọkụ dị mma na ịdị n'otu okpomọkụ, ịdị ọcha dị elu, nkwụsị nke mbuze, na-eme ka ọ bụrụ ngwọta zuru oke maka ngwa nhazi wafer.


  • Ebe amụrụ:China
  • Ọdịdị kristal:FCCβ oge
  • Njupụta:3.21 g / cm;
  • Isi ike:2500 Vickers;
  • Nha ọka:2 ~ 10μm;
  • Ọcha kemịkalụ:99.99995%;
  • Ike okpomọkụ:640J·kg-1·K-1;
  • Okpomọkụ Sublimation:2700 ℃;
  • Ike Felexural:415 Mpa (RT 4-Point);
  • Modul nke Young:430 Gpa (4pt ekwe, 1300 ℃);
  • Mgbasawanye okpomọkụ (CTE):4.5 10-6K-1;
  • Nrụpụta okpomọkụ:300 (W/MK);
  • Nkọwa ngwaahịa

    Mkpado ngwaahịa

    Susceptor Barrel is a igodoakụrụngwa eji dị iche iche semiconductor n'ichepụta usoro.Anyị na-eji teknụzụ patent anyị eme ihesusceptor gbọmgbọmya naoke ịdị ọcha,nke ọmamkpuchiịdị n'otuna ndụ ọrụ magburu onwe ya, yanaelu chemical iguzogide na thermal kwụsie ike Njirimara.

    VET Energy bụ nkeezigbo onye na-emepụta ngwaahịa graphite na silicon carbide nwere mkpuchi CVD,nwere ike inyedị iche icheakụkụ ahaziri maka semiconductor na fotovoltaic ụlọ ọrụ. Our teknuzu otu si n'elu ụlọ nnyocha ụlọ ọrụ, nwere ike na-enye ndị ọzọ ọkachamara ihe ngwọtamaka gị.

    Anyị na-aga n'ihu na-emepụta usoro dị elu iji nye ihe ndị dị elu karị,naarụpụtala nkà na ụzụ nwere ikike pụrụ iche, nke nwere ike ime ka njikọ dị n'etiti mkpuchi na mkpụrụ ahụ sie ike ma ghara ịdị na-apụ apụ.

    Fnri nke ngwaahịa anyị:

    1. High okpomọkụ oxidation iguzogide ruo 1700.
    2. Akwa ịdị ọcha nathermal uniformity
    3. Magburu onwe corrosion eguzogide: acid, alkali, nnu na organic reagents.
    4. Elu ike, kọmpat elu, ezigbo ahụ.
    5. Ogologo ndụ ọrụ na ihe na-adịgide adịgide

    CVD SiC薄膜基本物理性能

    Njirimara anụ ahụ bụ isi nke CVD SiCmkpuchi

    性质 / Ihe onwunwe

    典型数值 / Uru a na-ahụkarị

    晶体结构 / Crystal Structure

    FCC β oge多晶,主要为(111) ndị a

    密度 / Njupụta

    3.21g/cm³

    硬度 / Isi ike

    2500 维氏硬度 (ibu 500g)

    晶粒大小 / ọka SiZe

    2 ~ 10μm

    纯度 / Chemical ịdị ọcha

    99.99995%

    热容 / Okpomọkụ Ike

    640 nk-1· K-1

    升华温度 / Sublimation okpomọkụ

    2700 ℃

    抗弯强度 / Ike Flexural

    415 MPa RT 4-isi

    杨氏模量 Modul nke ntorobịa

    430 Gpa 4pt ekwe, 1300 ℃

    导热系数 / ThermalOmume omume

    300W·m-1· K-1

    热膨胀系数 / Mgbasa ọkụ (CTE)

    4.5 × 10-6K-1

    未标题-1

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