Ihe mkpuchi Barrel Susceptor SiC

Foto egosipụtara SiC mkpuchi Barrel Susceptor

Nkọwa dị mkpirikpi:

VET Energy SiC Coated Barrel Susceptor bụ ngwaahịa na-arụ ọrụ dị elu emebere iji nye arụmọrụ na-agbanwe agbanwe na ntụkwasị obi ruo ogologo oge. Ọ nwere oke okpomọkụ dị mma na ịdị n'otu okpomọkụ, ịdị ọcha dị elu, nkwụsị nke mbuze, na-eme ka ọ bụrụ ngwọta zuru oke maka ngwa nhazi wafer.

Ebe amụrụ:China

Ọdịdị kristal:FCCβ oge

Njupụta:3.21 g / cm;

Isi ike:2500 Vickers;

Nha ọka:2 ~ 10μm;

Ọcha kemịkalụ:99.99995%;

Ike okpomọkụ:640J·kg-1·K-1;

Okpomọkụ Sublimation:2700 ℃;

Ike Felexural:415 Mpa (RT 4-Point);

Modul nke Young:430 Gpa (4pt ekwe, 1300 ℃);

Mgbasawanye okpomọkụ (CTE):4.5 10-6K-1;

Nrụpụta okpomọkụ:300 (W/MK);

Zitere anyị email Budata dị ka PDF

Nkọwa ngwaahịa

Mkpado ngwaahịa

Susceptor Barrel is a igodoakụrụngwa eji dị iche iche semiconductor n'ichepụta usoro.Anyị na-eji teknụzụ patent anyị eme ihesusceptor gbọmgbọmya naoke ịdị ọcha,nke ọmamkpuchiịdị n'otuna ndụ ọrụ magburu onwe ya, yanaelu chemical iguzogide na thermal kwụsie ike Njirimara.

VET Energy bụ nkeezigbo onye na-emepụta ngwaahịa graphite na silicon carbide nwere mkpuchi CVD,nwere ike inyedị iche icheakụkụ ahaziri maka semiconductor na fotovoltaic ụlọ ọrụ. Our teknuzu otu si n'elu ụlọ nnyocha ụlọ ọrụ, nwere ike na-enye ndị ọzọ ọkachamara ihe ngwọtamaka gị.

Anyị na-aga n'ihu na-emepụta usoro dị elu iji nye ihe ndị dị elu karị,naarụpụtala nkà na ụzụ nwere ikike pụrụ iche, nke nwere ike ime ka njikọ dị n'etiti mkpuchi na mkpụrụ ahụ sie ike ma ghara ịdị na-apụ apụ.

Fnri nke ngwaahịa anyị:

1. High okpomọkụ oxidation iguzogide ruo 1700℃.
2. Akwa ịdị ọcha nathermal uniformity
3. Magburu onwe corrosion eguzogide: acid, alkali, nnu na organic reagents.
4. Elu ike, kọmpat elu, ezigbo ahụ.
5. Ogologo ndụ ọrụ na ihe na-adịgide adịgide

CVD SiC薄膜基本物理性能 Njirimara anụ ahụ bụ isi nke CVD SiCmkpuchi
性质 / Ihe onwunwe	典型数值 / Uru a na-ahụkarị
晶体结构 / Crystal Structure	FCC β oge多晶，主要为（111) 取向
密度 / Njupụta	3.21g/cm³
硬度 / Isi ike	2500 维氏硬度 (ibu 500g)
晶粒大小 / ọka SiZe	2 ~ 10μm
纯度 / Chemical ịdị ọcha	99.99995%
热容 / Okpomọkụ Ike	640 nk^-1· K^-1
升华温度 / Sublimation okpomọkụ	2700 ℃
抗弯强度 / Ike Flexural	415 MPa RT 4-isi
杨氏模量 Modul nke Young's	430 Gpa 4pt ekwe, 1300 ℃
导热系数 / ThermalOmume omume	300W·m^-1· K^-1
热膨胀系数 Mgbasawanye okpomọkụ (CTE)	4.5 × 10^-6K^-1