Ihe osise eserese PECVD na-ebunye tray tray

Ihe osise eserese PECVD na-ebunye tray ebe nchekwa ihe eserese

Nkọwa dị mkpirikpi:

VET Energy's PECVD Loading Tray bụ iji nye nchekwa na ọbụna nkwado maka wafer n'oge nkwụnye ego, na-eme ka nkwekọ na ịdị mma nke usoro nkwụnye ego. Site na nguzogide okpomọkụ ya dị mma, Tray Graphite na-enyere aka ịnọgide na-enwe gburugburu ebe a na-achịkwa n'ime ụlọ PECVD, na-ebelata ihe ize ndụ nke mmetọ na ịhụ na usoro dị elu na-arụ ọrụ.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

VET Energy PECVD na-ebunye tray bụ ụgbọ mmiri ziri ezi emebere maka usoro PECVD (plasma enhanced chemical vapor deposition). A na-eme tray graphite a dị elu nke ịdị ọcha dị elu ma dị elu. Ọ nwere oke nguzogide okpomọkụ dị elu, nguzogide corrosion, nkwụsi ike akụkụ na njirimara ndị ọzọ. Ọ nwere ike ịnye ikpo okwu ihe na-ebugharị kwụsiri ike maka usoro PECVD ma hụ na ịdị n'otu na ịdị larịị nke ntinye ihe nkiri.

A na-eji trays na-ebufe VET Energy PECVD na semiconductor, fotovoltaic, LED na mpaghara ndị ọzọ. Ọmụmaatụ:

▪ Semiconductor: Usoro PECVD maka ihe ndị semiconductor dị ka silicon wafers na epitaxial wafers.

▪ Fotovoltaic: Usoro PECVD maka ihe nkiri dị mkpa nke cell cell.

▪ LED: Usoro PECVD maka ibe ọkụ LED.

Uru ngwaahịa

▪Melite ogo ihe nkiri:Gbaa mbọ hụ na etinyere ihe nkiri otu ma kwalite ogo ihe nkiri.

▪Gbatịkwuo ndụ akụrụngwa:Nguzogide corrosion mara mma, gbasaa ndụ ọrụ nke akụrụngwa PECVD.

▪Belata ụgwọ nrụpụta:Traịs graphite dị elu nwere ike ibelata ọnụ ahịa mkpofu ma belata ọnụ ahịa mmepụta.

Ihe eserese si na SGL:

Oke oke: R6510
Index	Nlele ọkọlọtọ	Uru	Nkeji
Nkezi nha ọka	ISO 13320	10	μm
Nnukwu njupụta	DIN IEC 60413/204	1.83	g/cm³
Mepee porosity	DIN66133	10	%
Ogo pore ọkara	DIN66133	1.8	μm
Nkwenye	DIN 51935	0.06	cm²/s
Rockwell hardness HR5/100	DIN IEC60413/303	90	HR
Specific eletriki resistivity	DIN IEC 60413/402	13	μΩm
Ike mgbanwe	DIN IEC 60413/501	60	MPa
Ike mkpakọ	DIN 51910	130	MPa
modul nke ntorobịa	DIN 51915	11.5×10³	MPa
Mgbasa ọkụ (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Nrụpụta ọkụ (20 ℃)	DIN 51908	105	Wm^-1K^-1

Emebere ya kpọmkwem maka nrụpụta cell cell dị elu nke ọma, na-akwado G12 nnukwu nhazi wafer. Nhazi ụgbọelu emebere nke ọma na-abawanye mmepụta nke ukwuu, na-eme ka ọnụego mkpụrụ dị elu na ọnụ ahịa mmepụta dị ala.

Ihe	Ụdị	Onye na-ebu wafer nọmba
Ụgbọ mmiri PEVCD Grephite - Usoro 156	156-13 grephite ụgbọ mmiri	144
	156-19 grephite ụgbọ mmiri	216
	156-21 grephite ụgbọ mmiri	240
	156-23 ụgbọ mmiri graphite	308
Ụgbọ mmiri PEVCD Grephite - Usoro 125	125-15 grephite ụgbọ mmiri	196
	125-19 grephite ụgbọ mmiri	252
	125-21 grphite ụgbọ mmiri	280