Kedu ụzọ nkwadebe na njirimara arụmọrụ nke mkpuchi mkpuchi silicon carbide CVD?

CVD (Chemical Vapor Deposition) bụ usoro a na-ejikarị akwadebe mkpuchi silicon carbide.CVD silicon carbide mkpuchinwere ọtụtụ njirimara arụmọrụ pụrụ iche. Isiokwu a ga-ewebata usoro nkwadebe nke mkpuchi mkpuchi silicon carbide CVD na njirimara arụmọrụ ya.

1. Usoro nkwadebe nkeCVD silicon carbide mkpuchi

Usoro CVD na-atụgharị gaseous precursors ka ọ bụrụ mkpuchi silicon carbide siri ike n'okpuru ọnọdụ okpomọkụ dị elu. Dị ka ihe dị iche iche gaseous precursors si kwuo, ọ nwere ike kewaa n'ime gas frasi CVD na mmiri mmiri mmiri CVD.

1. Vapor phase CVD

Vapor phase CVD na-eji precursors gaseous, na-abụkarị ogige organosilicon, iji nweta uto nke ihe nkiri silicon carbide. Ogige organosilicon ndị a na-ejikarị gụnyere methylsilane, dimethylsilane, monosilane, wdg, bụ ndị na-emepụta ihe nkiri sịlịkọn carbide n'elu ihe igwe site na ibuga gaseous precursors n'ime ụlọ mmeghachi omume okpomọkụ. Ebe okpomọkụ dị elu n'ime ụlọ mmeghachi omume na-emekarị site na ikpo ọkụ induction ma ọ bụ ikpo ọkụ na-eguzogide.

2. Usoro mmiri mmiri CVD

Liquid-phase CVD na-eji precursor mmiri mmiri, na-abụkarị ihe mgbaze organic nwere silicon na ogige silanol, nke a na-ekpo ọkụ na vaporized n'ime ụlọ mmeghachi omume, mgbe ahụ, a na-emepụta ihe nkiri silicon carbide na mkpụrụ site na mmeghachi omume kemịkalụ.

2. Njirimara arụmọrụ nkeCVD silicon carbide mkpuchi

1.Excelent elu okpomọkụ arụmọrụ

CVD silicon carbide mkpuchienye magburu onwe elu okpomọkụ kwụsie ike na oxidation iguzogide. Ọ nwere ike ịrụ ọrụ na gburugburu ebe okpomọkụ dị elu ma nwee ike iguzogide ọnọdụ dị oke egwu na okpomọkụ dị elu.

2.Good n'ibu Njirimara

CVD silicon carbide mkpuchinwere nnukwu ike ike na ezigbo iyi mgbochi. Ọ na-echebe ihe ndị mejupụtara ígwè site na iyi na corrosion, na-agbatị ndụ ihe onwunwe.

3. Nkwụsi ike kemịkal dị mma

CVD silicon carbide mkpuchina-eguzogide ọgwụ ndị a na-ahụkarị dị ka acid, alkalis na salts. Ọ na-eguzogide ọgụ kemịkalụ na corrosion nke mkpụrụ.

4. Ọnụ ọgụgụ esemokwu dị ala

CVD silicon carbide mkpuchinwere obere esemokwu esemokwu yana ezigbo mma mmanye onwe ya. Ọ na-ebelata esemokwu na iyi ma melite arụmọrụ nke iji ihe eme ihe.

5.Good thermal conductivity

CVD silicon carbide mkpuchi nwere ezigbo thermal conductivity Njirimara. Ọ nwere ike na-eduzi okpomọkụ ngwa ngwa ma melite arụmọrụ ọkụ ọkụ nke isi ígwè.

6.Excellent eletriki mkpuchi ihe

CVD silicon carbide mkpuchi nwere ezigbo mkpuchi ọkụ eletrik ma nwee ike igbochi ntapu ugbu a. A na-ejikarị ya eme ihe na mkpuchi mkpuchi nke ngwaọrụ eletrọnịkị.

7. Ọkpụrụkpụ na-agbanwe agbanwe na ihe mejupụtara

Site n'ịchịkwa ọnọdụ n'oge usoro CVD na ntinye uche nke precursor, enwere ike gbanwee ọkpụrụkpụ na ihe mejupụtara ihe nkiri silicon carbide. Nke a na-enye ọtụtụ nhọrọ na mgbanwe maka ngwa dị iche iche.

Na nkenke, mkpuchi mkpuchi silicon carbide CVD nwere ọmarịcha arụmọrụ dị elu, akụrụngwa akụrụngwa dị mma, nkwụsi ike kemịkalụ dị mma, ọnụọgụ esemokwu dị ala, njikwa ọkụ dị mma na ihe mkpuchi ọkụ eletrik. Ngwongwo ndị a na-eme mkpuchi mkpuchi silicon carbide CVD n'ọtụtụ ebe, gụnyere elektrọnik, optics, ikuku ikuku, ụlọ ọrụ kemịkalụ, wdg.