Akụkụ SiC mkpuchi mkpuchi Halfmoon ejiri na ngwa SiC Epitaxial

Nkọwa dị mkpirikpi:

Ntinye na ojiji ngwaahịa: tube quartz ejikọtara, nwere ike ịfefe gas ka ọ na-ebugharị tray base ntụgharị, njikwa okpomọkụ

Ọnọdụ ngwaọrụ nke ngwaahịa: n'ime ụlọ mmeghachi omume, ọ bụghị na kọntaktị kpọmkwem na wafer

Ngwaahịa ndị dị n'okpuru ala: ngwaọrụ ike

Isi ọnụ ahịa: ụgbọ ala ume ọhụrụ

 


Nkọwa ngwaahịa

Mkpado ngwaahịa

Akụkụ SiC mkpuchi graphite Halfmoonis a igodoakụrụngwa eji na usoro nrụpụta semiconductor, ọkachasị maka akụrụngwa epitaxial SiC.Anyị na-eji teknụzụ anyị nwere ikike iji mee ka akụkụ ọkara ọnwaoke ịdị ọcha,nke ọmamkpuchiịdị n'otuna ndụ ọrụ magburu onwe ya, yanaelu chemical iguzogide na thermal kwụsie ike Njirimara.

VET Energy bụ nkeezigbo onye na-emepụta ngwaahịa graphite na silicon carbide nwere mkpuchi CVD,nwere ike inyedị iche icheakụkụ ahaziri maka semiconductor na fotovoltaic ụlọ ọrụ. Our teknuzu otu si n'elu ụlọ nnyocha ụlọ ọrụ, nwere ike na-enye ndị ọzọ ọkachamara ihe ngwọtamaka gị.

Anyị na-aga n'ihu na-emepụta usoro dị elu iji nye ihe ndị dị elu karị,naarụpụtala nkà na ụzụ nwere ikike pụrụ iche, nke nwere ike ime ka njikọ dị n'etiti mkpuchi na mkpụrụ ahụ sie ike ma ghara ịdị na-apụ apụ.

Fnri nke ngwaahịa anyị:

1. High okpomọkụ oxidation iguzogide ruo 1700.
2. Akwa ịdị ọcha nathermal uniformity
3. Magburu onwe corrosion eguzogide: acid, alkali, nnu na organic reagents.
4. Elu ike, kọmpat elu, ezigbo ahụ.
5. Ogologo ndụ ọrụ na ihe na-adịgide adịgide

CVD SiC薄膜基本物理性能

Njirimara anụ ahụ bụ isi nke CVD SiCmkpuchi

性质 / Ihe onwunwe

典型数值 / Uru a na-ahụkarị

晶体结构 / Crystal Structure

FCC β oge多晶,主要为(111) ndị a

密度 / Njupụta

3.21g/cm³

硬度 / Isi ike

2500 维氏硬度 (ibu 500g)

晶粒大小 / ọka SiZe

2 ~ 10μm

纯度 / Chemical ịdị ọcha

99.99995%

热容 / Okpomọkụ Ike

640 nk-1· K-1

升华温度 / Sublimation okpomọkụ

2700 ℃

抗弯强度 / Ike Flexural

415 MPa RT 4-isi

杨氏模量 Modul nke ntorobịa

430 Gpa 4pt ekwe, 1300 ℃

导热系数 / ThermalOmume omume

300W·m-1· K-1

热膨胀系数 / Mgbasa ọkụ (CTE)

4.5 × 10-6K-1

1

2

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