PECVD Hoʻouka Paʻa Deposition Graphite Tray

ʻO ka wehewehe pōkole:

Hoʻolālā ʻia ʻo VET Energy's PECVD Loading Tray e hāʻawi i ke kākoʻo paʻa a me ke kākoʻo no nā wafers i ka wā o ka waiho ʻana, e hoʻomaikaʻi ana i ka kūlike a me ka maikaʻi o ke kaʻina hana hoʻopaʻa. Me kona kūpaʻa wela maikaʻi loa, kōkua ka Graphite Tray i ka mālama ʻana i kahi kaiapuni i hoʻopaʻa ʻia i loko o nā keʻena PECVD, e hōʻemi ana i ka hopena o ka haumia a me ka hōʻoia ʻana i ka hana kiʻekiʻe.

E hoʻouna i ka leka uila iā mākou Hoʻoiho ma ke ʻano he PDF

Huahana Huahana

ʻO VET Energy PECVD loading tray he mea lawe pololei i hoʻolālā ʻia no ka hana PECVD (plasma enhanced chemical vapor deposition). Hana ʻia kēia pā graphite deposition kiʻekiʻe me ka maʻemaʻe kiʻekiʻe. Loaʻa iā ia ke kūpaʻa wela kiʻekiʻe, ke kūpaʻa corrosion, ke kūpaʻa dimensional a me nā ʻano ʻē aʻe. Hiki iā ia ke hāʻawi i kahi paepae lawe paʻa no ka kaʻina PECVD a hōʻoia i ka kūlike a me ka palahalaha o ka waiho ʻana o ke kiʻiʻoniʻoni.

Hoʻohana nui ʻia ka VET Energy PECVD loading trays i semiconductor, photovoltaic, LED a me nā māla ʻē aʻe. ʻo kahi laʻana:

▪ Semiconductor: Kaʻina PECVD no nā mea semiconductor e like me nā wafer silika a me nā wafers epitaxial.

▪ Photovoltaic: Kaʻina PECVD no nā kiʻi ʻoniʻoni lahilahi.

▪ LED: Kaʻina hana PECVD no nā ʻāpana LED.

Nā Pono Huahana

▪E hoʻomaikaʻi i ka maikaʻi o ke kiʻiʻoniʻoni:E hōʻoia i ka waiho ʻana o nā kiʻiʻoniʻoni like ʻole a hoʻomaikaʻi i ka maikaʻi o ke kiʻiʻoniʻoni.

▪Hoʻonui i ke ola o nā mea hana:ʻOi aku ka maikaʻi o ka corrosion, hoʻonui i ke ola lawelawe o nā lako PECVD.

▪E hoemi i na koina hana:Hiki i nā pā graphite kiʻekiʻe ke hoʻemi i ka helu ʻōpala a hoʻemi i nā kumukūʻai hana.

Mea graphite mai SGL:

Kūlana maʻamau: R6510
Papa kuhikuhi	Kūlana hoʻāʻo	Waiwai	Unite
Ka nui o ka palaoa	ISO 13320	10	μm
ʻAno nui	DIN IEC 60413/204	1.83	g/cm³
ʻO ka porosity wehe	DIN66133	10	%
Ka nui pore waena	DIN66133	1.8	μm
ʻO ke kūpale	DIN 51935	0.06	knm²/s
ʻO ka paʻakikī ʻo Rockwell HR5/100	DIN IEC60413/303	90	HR
Kū'ē uila kūikawā	DIN IEC 60413/402	13	μΩm
Ka ikaika wiliwili	DIN IEC 60413/501	60	MPa
Ka ikaika compressive	DIN 51910	130	MPa
Ka modulus opio	DIN 51915	11.5×10³	MPa
Hoʻonui wela (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
ʻO ke kau wela wela (20 ℃)	DIN 51908	105	Wm^-1K^-1

Hoʻolālā ʻia ia no ka hana ʻana o nā cell solar kiʻekiʻe, e kākoʻo ana i ka hana wafer nui G12. Hoʻonui nui ka hoʻolālā ʻana i ka mea lawe ʻoi aku ka maikaʻi, e hiki ai ke kiʻekiʻe aʻe nā kumukūʻai a me nā kumukūʻai hana hoʻohaʻahaʻa.

'ikamu	ʻAno	Helu wafer lawe
ʻO ka moku ʻo PEVCD Grephite - ʻO ka moʻo 156	156-13 waapa grephite	144
	156-19 waapa grephite	216
	156-21 waapa grephite	240
	156-23 waapa graphite	308
ʻO ka moku ʻo PEVCD Grephite - ʻO ka moʻo 125	125-15 waapa grephite	196
	125-19 waʻa grephite	252
	125-21 griphite waapa	280