Nā huahana photovoltaic solar

Maʻemaʻe, SEM Structure, mānoanoa ka nānā ʻana oKa uhi ʻana o SiC

ʻO ka maʻemaʻe o nā uhi SiC ma ka graphite me ka hoʻohana ʻana i ka CVD he kiʻekiʻe e like me 99.9995%. ʻO fcc kona hale. ʻO nā kiʻiʻoniʻoni SiC i uhi ʻia ma ka graphite he (111) e like me ka mea i hōʻike ʻia ma ka ʻikepili XRD (Fig.1) e hōʻike ana i kona kūlana crystalline kiʻekiʻe. ʻO ka mānoanoa o ke kiʻiʻoniʻoni SiC he ʻano like ʻole e like me ka hōʻike ʻana ma ka Fig. 2.

Kiʻi 2: ʻaʻahu mānoanoa o nā kiʻiʻoniʻoni SiC SEM a me XRD o ke kiʻi beta-SiC ma ka graphite

ʻO ka ʻikepili SEM o ke kiʻi ʻoniʻoni ʻoniʻoni ʻo CVD SiC, ʻo ka nui aniani ka 2 ~ 1 Opm

ʻO ke ʻano aniani o ka kiʻiʻoniʻoni CVD SiC he ʻano cubic i hoʻohālikelike ʻia i ke alo, a kokoke ka orientation ulu kiʻi i ka 100%

Ua uhi ʻia ʻo Silicon carbide (SiC).ʻO ka base ka waihona maikaʻi loa no ka silika aniani hoʻokahi a me ka epitaxy GaN, ʻo ia ka mea nui o ka umu epitaxy. ʻO ke kumu kahi mea hana hana nui no ka silika monocrystalline no nā kaapuni hoʻohui nui. Loaʻa iā ia ka maʻemaʻe kiʻekiʻe, ke kūpaʻa wela kiʻekiʻe, ka pale ʻana i ka corrosion, ka paʻa ʻana o ka ea maikaʻi a me nā ʻano waiwai maikaʻi ʻē aʻe.

Hoʻohana a hoʻohana i ka huahana

ʻO ka uhi kumu graphite no ka ulu ʻana o ka epitaxial silika aniani kūpono no nā mīkini Aixtron, etc. Ka mānoanoa o ka uhi: 90 ~ 150um ʻO 55mm ke anawaena o ka lua wafer.