Ola lōʻihiSIC Coated Graphite Heaterno MOCVD K465i, Graphite Heater no ka epitaxy,
mea hoʻomehana graphite, ʻO ka Heater Graphite no MOCVD, mea hoʻomehana, SIC Coated Graphite Heater,
MOCVD Substrate Heater, Mea Pumehana No MOCVD
graphitemea hoʻomehana:
ʻO kamea hoʻomehana graphiteHoʻohana ʻia nā ʻāpana i loko o ka umu wela wela me ka mahana a hiki i ka 2200 degere ma ke kaiapuni vacuum a me 3000 degere i ka deoxidized a hoʻokomo ʻia i ke kinoea.
ʻO nā hiʻohiʻona nui o ka graphitemea hoʻomehana:
1. kūlike o ka hoʻolālā hoʻomehana.
2. maikaʻi uila conductivity a kiʻekiʻe uila ukana.
3. pale ʻana i ka corrosion.
4. inoxidizability.
5. kiʻekiʻe kemika maemae.
6. ikaika mechanical kiʻekiʻe.
ʻO ka pōmaikaʻi, ʻoi aku ka maikaʻi o ka ikehu, ka waiwai kiʻekiʻe a me ka mālama haʻahaʻa.
Hiki iā mākou ke hana i ka anti-oxidation a me ke ola lōʻihi o ka graphite crucible, graphite mold a me nā ʻāpana āpau o ka graphite heater.
Nā palena nui o ka mea hoʻomehana graphite:
Hōʻike ʻenehana | VET-M3 |
ʻAiʻi Nui (g/cm3) | ≥1.85 |
Maʻiʻo Lehu (PPM) | ≤500 |
Kahakai ʻoʻoleʻa | ≥45 |
Kū'ē Kūikawā (μ.Ω.m) | ≤12 |
ʻO ka ikaika ʻoluʻolu (Mpa) | ≥40 |
Ka ikaika hoʻoemi (Mpa) | ≥70 |
Max. Ka nui o ka palaoa (μm) | ≤43 |
Coefficient o ka hoonui wela Mm/°C | ≤4.4*10-6 |
ʻO ka mea hoʻomehana graphite no ka umu uila he mau waiwai o ka pale ʻana i ka wela, ke kū ʻana o ka oxidation, ka conductivity uila maikaʻi a me ka ʻoi aku o ka ikaika mechanical. Hiki iā mākou ke mīkini i nā ʻano mea hoʻomehana graphite e like me nā hoʻolālā o nā mea kūʻai aku.