SIC Coated Graphite Heater no ka MOCVD K465i, Heater Graphite no ka epitaxy

ʻO ka wehewehe pōkole:

Pākuʻi Kimia

Pōmaikaʻi: Pale wela kiʻekiʻe

Hoʻohana: MOCVD/Ihi hoʻoheheʻe/Wāna wela

ʻOi aku ka nui: 1.68-1.91g/cm3

Ka ikaika wiliwili: 30-46Mpa

Kū'ē: 7-12μΩm


Huahana Huahana

Huahana Huahana

Ola lōʻihiSIC Coated Graphite Heaterno MOCVD K465i, Graphite Heater no ka epitaxy,
mea hoʻomehana graphite, ʻO ka Heater Graphite no MOCVD, mea hoʻomehana, SIC Coated Graphite Heater,

MOCVD Substrate Heater, Mea Pumehana No MOCVD

graphitemea hoʻomehana:
ʻO kamea hoʻomehana graphiteHoʻohana ʻia nā ʻāpana i loko o ka umu wela wela me ka mahana a hiki i ka 2200 degere ma ke kaiapuni vacuum a me 3000 degere i ka deoxidized a hoʻokomo ʻia i ke kinoea.
Nā hiʻohiʻona nui omea hoʻomehana graphite:
1. kūlike o ka hoʻolālā hoʻomehana.
2. maikaʻi uila conductivity a kiʻekiʻe uila ukana.
3. pale ʻana i ka corrosion.
4. inoxidizability.
5. kiʻekiʻe kemika maemae.
6. ikaika mechanical kiʻekiʻe.
ʻO ka pōmaikaʻi, ʻoi aku ka maikaʻi o ka ikehu, ka waiwai kiʻekiʻe a me ka mālama haʻahaʻa.
Hiki iā mākou ke hana i ka anti-oxidation a me ke ola lōʻihi o ka graphite crucible, graphite mold a me nā ʻāpana āpau o ka graphite heater.
Nā palena nui o ka mea hoʻomehana graphite:

Hōʻike ʻenehana

VET-M3

ʻAiʻi Nui (g/cm3)

≥1.85

Maʻiʻo Lehu (PPM)

≤500

Kahakai ʻoʻoleʻa

≥45

Kū'ē Kūikawā (μ.Ω.m)

≤12

ʻO ka ikaika ʻoluʻolu (Mpa)

≥40

Ka ikaika hoʻoemi (Mpa)

≥70

Max. Ka nui o ka palaoa (μm)

≤43

Coefficient o ka hoonui wela Mm/°C

≤4.4*10-6

ʻO ka mea hoʻomehana graphite no ka umu uila he mau waiwai o ka pale ʻana i ka wela, ke kū ʻana o ka oxidation, ka conductivity uila maikaʻi a me ka ʻoi aku o ka ikaika mechanical. Hiki iā mākou ke mīkini i nā ʻano mea hoʻomehana graphite e like me nā hoʻolālā o nā mea kūʻai aku.

MOCVD Substrate Heater, Mea Pumehana No MOCVDMOCVD Substrate Heater, Mea Pumehana No MOCVD


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