ʻO nā hiʻohiʻona nui o ka graphite heater:
1. kūlike o ka hoʻolālā hoʻomehana.
2. maikaʻi uila conductivity a kiʻekiʻe uila ukana.
3. pale ʻana i ka corrosion.
4. inoxidizability.
5. kiʻekiʻe kemika maemae.
6. ikaika mechanical kiʻekiʻe.
ʻO ka pōmaikaʻi, ʻoi aku ka maikaʻi o ka ikehu, ka waiwai kiʻekiʻe a me ka mālama haʻahaʻa. Hiki iā mākou ke hana i ka anti-oxidation a me ke ola lōʻihi o ka graphite crucible, graphite mold a me nā ʻāpana āpau o ka graphite heater.
Nā palena nui o ka graphite heater
| Hōʻike ʻenehana | Semicera-M3 |
| ʻAiʻi Nui (g/cm3) | ≥1.85 |
| Maʻiʻo Lehu (PPM) | ≤500 |
| Kahakai ʻoʻoleʻa | ≥45 |
| Kū'ē Kūikawā (μ.Ω.m) | ≤12 |
| ʻO ka ikaika ʻoluʻolu (Mpa) | ≥40 |
| Ka ikaika hoʻoemi (Mpa) | ≥70 |
| Max. Ka nui o ka palaoa (μm) | ≤43 |
| Coefficient o ka hoonui wela Mm/°C | ≤4.4*10-6 |
ʻO VET Energy ka kamea hana maoli o ka graphite maʻamau a me nā huahana silicon carbide me ka uhi CVD,hiki ke hoolakoʻokoʻanā ʻāpana i hana ʻia no ka semiconductor a me ka ʻoihana photovoltaic. OʻO kāu hui ʻenehana mai nā keʻena noiʻi kūloko kiʻekiʻe, hiki ke hāʻawi i nā ʻoihana ʻoihana ʻoi aku ka nuināu.
Hoʻomau mau mākou i nā kaʻina hana kiʻekiʻe e hāʻawi i nā mea ʻoi aku ka holomua,aUa hana ʻo ia i kahi ʻenehana patented kūʻokoʻa, hiki iā ia ke hana i ka hoʻopaʻa ʻana ma waena o ka uhi a me ka substrate i ʻoi aku ka paʻa a emi ʻole i ka wehe.
Fnā ʻano o kā mākou huahana:
1. Kiʻekiʻe wela oxidation kū'ē a hiki i 1700℃.
2. Maʻemaʻe kiʻekiʻe ahoʻolikelike wela
3. ʻOi aku ka maikaʻi o ka corrosion resistance: acid, alkali, paʻakai a me nā mea hoʻohui.
4. ʻO ka paʻakikī kiʻekiʻe, ka ʻili paʻa, nā ʻāpana maikaʻi.
5. ʻOi aku ka lōʻihi o ke ola lawelawe a ʻoi aku ka lōʻihi
| CVD SiC薄膜基本物理性能 Nā waiwai kino kumu o CVD SiCka uhi ʻana | |
| 性质 / Waiwai | 典型数值 / Waiwai maʻamau |
| 晶体结构 / Hoʻomoe Crystal | Māhele FCC β多晶，主要为（111）取向 |
| 密度 / Paʻa | 3.21 g/cm³ |
| 硬度 / Oolea | 2500 维氏硬度（500g load） |
| 晶粒大小 / ʻAiʻa palaoa | 2~10μm |
| 纯度 / Maemae Kemika | 99.99995% |
| 热容 / Hikina Wela | 640 J·kg-1·K-1 |
| 升华温度 / Kaumaha Sublimation | 2700 ℃ |
| 抗弯强度 / Ka Ikaika Pilikia | 415 MPa RT 4-point |
| 杨氏模量 / 'Ōpio's Modulus | 430 Gpa 4pt piko, 1300 ℃ |
| 导热系数 / ThermalʻO ka hoʻokō | 300W·m-1·K-1 |
| 热膨胀系数 / Hoʻonui wela (CTE) | 4.5×10-6K-1 |
Hoʻokipa maikaʻi iā ʻoe e kipa i kā mākou hale hana, e kūkākūkā hou kāua!
