ʻO nā mea hana maikaʻi, nā poʻe loea akamai, a ʻoi aku ka maikaʻi ma hope o ke kūʻai aku ʻana i nā huahana a me nā lawelawe; Ua hui pū ʻia mākou he kāne nui a me nā keiki, pili kēlā me kēia kanaka i ka ʻoihana i ka pōmaikaʻi "hoʻohui, hoʻolaʻa, hoʻomanawanui" no ka maikaʻi Silicon Carbide RBSIC/SISIC Cantilever Paddle i hoʻohana ʻia i ka Solar Photovoltaic Industry. nā hoa ʻoihana ʻoihana, a manaʻolana e hana pū me ʻoe i kahi kokoke i ka wā lōʻihi!
ʻO nā mea hana maikaʻi, nā poʻe loea akamai, a ʻoi aku ka maikaʻi ma hope o ke kūʻai aku ʻana i nā huahana a me nā lawelawe; Ua hui pū ʻia mākou he kāne a me nā keiki, ʻo kēlā me kēia kanaka e pili ana i ka ʻoihana e pōmaikaʻi "hoʻohui, hoʻolaʻa, hoʻomanawanui" no kaKina Refractory ceramic a me ceramic kiln, No ka hoʻokō ʻana i nā koi o nā mea kūʻai aku no kēlā me kēia lawelawe ʻoi aku ka maikaʻi a me nā mea paʻa paʻa. Hoʻokipa maikaʻi mākou i nā mea kūʻai aku a puni ka honua e kipa mai iā mākou, me kā mākou hui like ʻole, a hoʻomohala pū i nā mākeke hou, hana i kahi wā e hiki mai ana!
ʻO ka uhi SiC / uhi ʻia o ka substrate Graphite no Semiconductor Hoʻopaʻa ʻia nā mea susceptors a hoʻomehana i nā wafers semiconductor i ka wā o ka hana wela. Hana ʻia kahi susceptor me kahi mea e hoʻomoʻa i ka ikehu ma o ka hoʻokomo ʻana, ka hoʻoheheʻe ʻana, a/a i ʻole ka radiation a hoʻomehana i ka wafer. He mea koʻikoʻi kona kūpaʻa haʻalulu wela, ka hoʻoheheʻe wela, a me ka maʻemaʻe i ka hoʻoili wela wikiwiki (RTP). Hoʻohana pinepine ʻia ka graphite silicon carbide, silicon carbide (SiC), a me silicon (Si) no nā susceptors ma muli o ke ʻano wela a me ke kemika. ʻO PureSiC® CVD SiC a me ClearCarbon™ ultra-pure mea e hāʻawi ai i ke kūpaʻa wela maikaʻi, ke kūpaʻa ʻana, a me ka lōʻihi. Hōʻike huahana
ʻO ka uhi SiC o ka substrate Graphite no nā noi Semiconductor e hana i kahi ʻāpana me ka maʻemaʻe maikaʻi a me ke kū'ē i ka lewa oxidizing.
Hoʻohana ʻia ʻo CVD SiC a i ʻole CVI SiC i ka Graphite o nā ʻāpana hoʻolālā maʻalahi a paʻakikī paha. Hiki ke hoʻopili ʻia ka uhi ʻana i nā mānoanoa like ʻole a i nā ʻāpana nui loa.
He koho kūlohelohe nā seramika ʻenehana no nā noi hoʻoili wela semiconductor me RTP (Rapid Thermal Processing), Epi (Epitaxial), diffusion, oxidation, a me ka annealing. Hāʻawi ʻo CoorsTek i nā ʻāpana waiwai holomua i hoʻolālā ʻia e kū i nā haʻalulu wela me ka maʻemaʻe kiʻekiʻe, ikaika, hana hou ʻia no ka wela kiʻekiʻe.
Nā hiʻohiʻona:
· ʻOi loa ka Thermal Shock Resistance
· Kūleʻa haʻalulu kino maikaʻi
· Kūʻē Kemika maikaʻi loa
· Maʻemaʻe Kiʻekiʻe
· Loaʻa ma ke ʻano paʻakikī
· Hoʻohana ma lalo o ka Oxidizing Atmosphere
noi:
Pono e hele ka wafer ma mua o ka mākaukau no ka hoʻohana ʻana i nā mea uila. ʻO kekahi kaʻina hana koʻikoʻi ʻo ka epitaxy silika, kahi e lawe ʻia ai nā wafers ma luna o nā susceptors graphite. He hopena koʻikoʻi ka waiwai a me ka maikaʻi o nā susceptors i ka maikaʻi o ka papa epitaxial o ka wafer.
Nā ʻano maʻamau o ka Material Graphite Base:
| ʻIke ʻia ka mānoanoa: | 1.85 g/cm3 |
| Ke kū'ē uila: | 11 μΩm |
| ʻO ke koʻikoʻi ʻoluʻolu: | 49 MPa (500kgf/cm2) |
| Paʻa Paʻa: | 58 |
| lehu: | <5ppm |
| ʻO ka wela wela: | 116 W/mK (100 kcal/mhr- ℃) |
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