ʻO CVD TaC i uhi ʻia i ka pā susceptor

ʻO ka wehewehe pōkole:

ʻO VET Energy CVD TaC coated plate susceptor he huahana hana kiʻekiʻe i hoʻolālā ʻia e hāʻawi i ka hana kūpaʻa a hilinaʻi hoʻi i kahi manawa lōʻihi. Loaʻa iā ia ke kūpaʻa wela maikaʻi loa a me ka like ʻana o ka wela, ka maʻemaʻe kiʻekiʻe, ka pale ʻana i ka erosion, e hana ana i ka hopena kūpono no nā noi hana wafer.


Huahana Huahana

Huahana Huahana

ʻO kaCVD TaC i uhi ʻiaHoʻolālā ʻia ka Plate Susceptor mai vet-china no ka hana kiʻekiʻe i nā kaʻina hana hoʻoheheʻe kemika (CVD). Hōʻike kēia susceptor i kahi paʻaʻO ka uhi ʻana o TaC (Tantalum Carbide)., e hāʻawi ana i ke kūpaʻa wela kūʻokoʻa, ke kūpaʻa kemika, a me ka lōʻihi, e lilo ia i mea hoʻonā kūpono no ka hana semiconductor a me nā noi wela kiʻekiʻe. ʻO kaʻO ka uhi CVD TaCe hōʻoia i ke kūpaʻa maikaʻi loa i ka oxidation a me ka ʻaʻahu, e ʻae i ka susceptor e mālama i kona kūpaʻa a me kāna hana ma nā wahi paʻakikī.

vet-china'sCVD TaC i uhi ʻiaKūleʻa ʻo Plate Susceptor no kona hiki ke hoʻohele like i ka wela i ka wā o nā kaʻina CVD, e hōʻoia ana i ka waiho ʻana o ka papa a hoʻonui i ka pono o ka hana semiconductor. Hāʻawi ka uhi ʻana o Ta-C i ka pale hou aku i ka corrosion kemika, hoʻonui i ke ola o ka susceptor a hoʻomaikaʻi i ka hana holoʻokoʻa. Me ka hui pū ʻana o ka ʻenehana susceptor CVD kiʻekiʻe a me nā mea hoʻonaninani TaC kiʻekiʻe, he mea nui kēia susceptor no nā ʻoihana e koi ana i ka pololei a me ka hilinaʻi i nā wahi wela kiʻekiʻe.

Inā hoʻohana ʻia i ka hana ʻana i nā semiconductor a i ʻole nā ​​​​mea ʻenehana kiʻekiʻe ʻē aʻe, kaʻO CVD TaC i hoʻopaʻa ʻia i ka pā pāua hoʻolālāʻia e hoʻokō i nā koi o ka hana hou. Kākoʻo ʻia e ko Semicera kaulana no ka hana hou a me ka maikaʻi, hāʻawi kēia huahana i ka hana ʻoi aku ka maikaʻi a me ka lōʻihi lōʻihi, e lilo ia i koho hilinaʻi no nā kaʻina CVD.

ʻO ka uhi ʻana o TaC kahi ʻano o ka tantalum carbide (TaC) uhi i hoʻomākaukau ʻia e ka ʻenehana hoʻoheheʻe kino kino, aia nā ʻano aʻe:

1. ʻO ka paʻakikī kiʻekiʻe: He kiʻekiʻe ka paʻakikī o ka uhi ʻana o TaC, maʻamau hiki ke hōʻea i 2500-3000HV, he mea paʻakikī maikaʻi loa.

2. Wear resistance: ʻO ka uhiʻana o TaC he mea hiki ke hoʻemi maikaʻi i kaʻaʻahu a me ka pōʻino o nā'āpana mechanical i ka wā e hoʻohana ai.

3. ʻO ke kūpaʻa wela kiʻekiʻe maikaʻi: hiki i ka uhi TaC ke mālama i kāna hana maikaʻi loa ma lalo o ke kaiapuni wela.

4. Paʻa kemika maikaʻi: He kūpaʻa kemika maikaʻi ka uhi ʻana o TaC a hiki ke pale aku i nā hopena kemika he nui, e like me nā waikawa a me nā kumu.

Ka uhi ʻana o TaC13
Ka uhi ʻana o TaC10

碳化钽涂层物理特性物理特性

Na waiwai kino o TaC ka uhi ʻana

密度/ Paʻa

14.3 (g/cm³)

比辐射率 / Emissivity kiko'ī

0.3

热膨胀系数 / Koefisi hoonui wela

6.3 10-6/K

努氏硬度/ Paʻakiki (HK)

2000 HK

电阻 / Kūʻē

1×10-5 ʻOhm*cm

热稳定性 / Paʻa wela

<2500 ℃

石墨尺寸变化 / Hoʻololi ka nui o ka graphite

-10~-20um

涂层厚度 / Mānoanoa uhi

≥20um waiwai maʻamau (35um±10um)

ʻO Ningbo VET Energy Technology Co., Ltd he ʻoihana ʻenehana kiʻekiʻe e kālele ana i ka hana ʻana a me ke kūʻai ʻana i nā mea kiʻekiʻe kiʻekiʻe, nā mea a me nā ʻenehana e uhi ana i ka graphite, silicon carbide, ceramics, surface treatment and so on. Hoʻohana nui ʻia nā huahana i ka photovoltaic, semiconductor, ikehu hou, metallurgy, etc.

ʻO kā mākou hui ʻenehana mai nā keʻena noiʻi kūloko kiʻekiʻe, hiki iā ia ke hāʻawi i nā hoʻonā ʻoihana ʻoi aku ka ʻoihana no ʻoe.

Hoʻokipa maikaʻi iā ʻoe e kipa i kā mākou hale hana, e kūkākūkā hou kāua!

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