sinadarin tururi (CVD) hanya ce da ta ƙunshi ɗora hoto mai ƙarfi akan saman waƙar siliki ta hanyar sinadari na cakuda iskar gas. Ana iya raba wannan hanya zuwa ƙirar kayan aiki iri-iri da aka kafa akan yanayi daban-daban na amsa sinadarai kamar matsa lamba da mafari.
Wane hanya ake amfani da waɗannan na'urori biyu?PECVD (Plasma Enhanced) kayan aiki ana amfani da su sosai a aikace-aikace kamar OX, Nitride, Ƙofar element na ƙarfe, da carbon amorphous. A gefe guda, LPCVD (Ƙarfin Ƙarfin) yawanci ana amfani dashi don Nitride, poly, da TEOS.
Menene ka'ida?Fasahar PECVD ta haɗu da makamashin plasma da CVD ta hanyar yin amfani da ƙwayar ƙarancin zafin jiki don haifar da fitar da sabo a cikin cathode na ɗakin aikin. Wannan yana ba da damar sarrafa sinadarai da halayen sinadarai na plasma don samar da ingantaccen fim a saman samfurin. Hakazalika, LPCVD yana shirin yin aiki a rage yawan iskar gas ɗin da ke cikin injin mai.
mutane AI: Yin amfani da Humanize AI a fagen fasahar CVD na iya haɓaka inganci da daidaiton tsarin saka fim. Ta hanyar yin amfani da algorithm AI, saka idanu da daidaita siga kamar sigar ion, yawan kwararar iskar gas, zafin jiki, da kauri na fim na iya ingantawa don ingantacciyar sakamako.
Lokacin aikawa: Oktoba-24-2024