Yadda ake tsaftace jirgin ruwan graphite PECVD?| VET Energy

1. Amincewa kafin tsaftacewa

1) Lokacin daJirgin ruwan graphite PECVDAna amfani da mai ɗaukar kaya fiye da sau 100 zuwa 150, mai aiki yana buƙatar duba yanayin shafi a cikin lokaci. Idan akwai abin rufewa mara kyau, yana buƙatar tsaftacewa da tabbatarwa. Launin shafa na al'ada na wafer silicon a cikin jirgin ruwan graphite / mai ɗaukar hoto shuɗi ne. Idan wafer yana da maras shuɗi, launuka masu yawa, ko bambancin launi tsakanin wafer ɗin yana da girma, shi ne abin da ba a saba gani ba, kuma ana buƙatar tabbatar da dalilin rashin daidaituwa a cikin lokaci.
2) Bayan aiwatar da ma'aikatan nazarin yanayin shafi naJirgin ruwan graphite PECVD/ mai ɗaukar kaya, za su ƙayyade ko ana buƙatar tsabtace jirgin ruwan graphite kuma ko ana buƙatar maye gurbin katin katin, kuma za a mika jirgin ruwa / mai ɗaukar hoto wanda ke buƙatar tsaftacewa ga ma'aikatan kayan aiki don tsaftacewa.

 

3) Bayan kammalajirgin ruwan graphite/ mai ɗaukar kaya ya lalace, ma'aikatan samarwa za su fitar da duk wafers na siliki a cikin jirgin ruwan graphite kuma su yi amfani da CDA (matsakaicin iska) don warware ɓarna a cikinjirgin ruwan graphite. Bayan kammalawa, ma'aikatan kayan aiki za su ɗaga shi a cikin tankin acid wanda aka shirya tare da wani yanki na maganin HF don tsaftacewa.

 

2. Tsaftace jirgin ruwan graphite

Ana ba da shawarar yin amfani da maganin hydrofluoric acid na 15-25% don zagaye uku na tsaftacewa, kowannensu na tsawon sa'o'i 4-5, da kuma bubling nitrogen a lokaci-lokaci a lokacin shayarwa da tsaftacewa, ƙara kimanin rabin sa'a na tsaftacewa; bayanin kula: ba a ba da shawarar yin amfani da iska kai tsaye azaman tushen iskar gas don kumfa. Bayan an dasa, a wanke da ruwa mai tsabta na kimanin sa'o'i 10, kuma tabbatar da cewa an tsabtace jirgin sosai. Bayan tsaftacewa, da fatan za a duba saman jirgin, wurin katin graphite da haɗin gwiwar takardar jirgin ruwa, da sauran sassa don ganin ko akwai ragowar silicon nitride. Sa'an nan kuma bushe bisa ga bukatun.

3. Tsabtace kariya

A) Tun da HF acid abu ne mai lalatawa sosai kuma yana da ƙayyadaddun canji, yana da haɗari ga masu aiki. Don haka, masu aiki a wurin tsaftacewa dole ne su ɗauki matakan tsaro kuma mutum mai kwazo ya sarrafa shi.

B) Ana ba da shawara don ƙaddamar da jirgin ruwa kuma kawai tsaftace sashin graphite yayin tsaftacewa, saboda kowane ɓangaren lamba za a iya tsaftacewa sosai. A halin yanzu, yawancin masana'antun gida suna amfani da tsaftacewa gaba ɗaya, wanda ya dace, amma saboda HF acid yana lalata sassa na yumbu, tsaftacewa gaba ɗaya zai rage rayuwar sabis na sassan da suka dace.