Kamar yadda aka nuna a sama, shi ne na hali
Rabin farko:
Abun dumama (mai zafi): yana kusa da bututun tanderu, yawanci ana yin shi da wayoyi masu juriya, ana amfani da su don dumama cikin bututun tanderun.
Quartz Tube: Jigon murhun iskar oxygen mai zafi, wanda aka yi da ma'adini mai tsafta wanda zai iya jure yanayin zafi kuma ya kasance maras amfani.
Ciyarwar Gas: Ana zaune a sama ko gefen bututun tanderun, ana amfani da shi don jigilar iskar oxygen ko wasu iskar gas zuwa cikin bututun tanderun.
SS Flange: abubuwan da ke haɗa bututun quartz da layukan iskar gas, suna tabbatar da ƙarfi da kwanciyar hankali na haɗin.
Layin Ciyar Gas: Bututun da ke haɗa MFC zuwa tashar samar da iskar gas don watsa iskar gas.
MFC (Mass Flow Controller): Na'urar da ke sarrafa kwararar iskar gas a cikin bututun quartz don daidaita daidai adadin iskar da ake buƙata.
Vent: Ana amfani da shi don fitar da iskar gas daga cikin bututun tanderun zuwa wajen kayan aiki.
Ƙananan sashi
Silicon Wafers a cikin Riƙe: Ana ajiye wafers na siliki a cikin mai riƙewa na musamman don tabbatar da zafi iri ɗaya yayin iskar oxygen.
Mai riƙe Wafer: Ana amfani da shi don riƙe wafer siliki da tabbatar da cewa wafer ɗin siliki ya kasance karɓaɓɓe yayin aiwatarwa.
Pedestal: Tsarin da ke riƙe da Rikicin Wafer Silicon, yawanci ana yin shi da wani abu mai juriya mai zafi.
Elevator: Ana amfani da shi don ɗaga masu riƙe Wafer zuwa ciki da waje da bututun quartz don lodi ta atomatik da sauke wafern siliki.
Robot Canja wurin Wafer: wanda yake a gefen na'urar bututun tanderun, ana amfani dashi don cire wafer silicon ta atomatik daga cikin akwatin kuma sanya shi cikin bututun tanderun, ko cire shi bayan sarrafawa.
Ma'ajiyar Cassette Carousel: Ana amfani da carousel ɗin ajiyar kaset don adana akwati mai ɗauke da wafern siliki kuma ana iya juya shi don samun damar mutum-mutumi.
Wafer Cassette: Ana amfani da kaset ɗin wafer don adanawa da canja wurin wafern silicon don sarrafa su.
Lokacin aikawa: Afrilu-22-2024