Kamar yadda aka nuna a sama, shi ne na hali
Rabin farko:
▪ Abun dumama (mai zafi):
wanda ke kusa da bututun tanderun, yawanci ana yin shi da wayoyi masu juriya, ana amfani da su don dumama cikin bututun tanderun.
Tube Quartz:
Tushen murhun iskar oxygen mai zafi, wanda aka yi da ma'adini mai tsafta wanda zai iya jure yanayin zafi kuma ya kasance maras amfani.
▪ Ciyarwar Gas:
Ana zaune a sama ko gefen bututun tanderun, ana amfani da shi don jigilar iskar oxygen ko wasu iskar gas zuwa cikin bututun tanderun.
SS Flange:
abubuwan da ke haɗa bututun quartz da layukan iskar gas, suna tabbatar da ƙarfi da kwanciyar hankali na haɗin.
Layin Ciyar Gas:
Bututun da ke haɗa MFC zuwa tashar samar da iskar gas don watsa iskar gas.
MFC (Mass Flow Controller):
Na'urar da ke sarrafa kwararar iskar gas a cikin bututun quartz don daidaita daidai adadin iskar da ake buƙata.
▪ Tufafi:
Ana amfani da shi don fitar da iskar gas daga cikin bututun tanderun zuwa wajen kayan aiki.
Bangaren ƙasa:
Silicon Wafers a Rike:
Silicon wafers ana ajiye su a cikin wani Rike na musamman don tabbatar da zafi iri ɗaya yayin iskar oxygen.
▪ Riƙen Wafer:
An yi amfani da shi don riƙe wafer siliki kuma tabbatar da cewa wafer ɗin siliki ya kasance karɓaɓɓu yayin aiwatarwa.
▪ Tafarki:
Tsarin da ke riƙe da riƙon wafer silicon, yawanci ana yin shi da wani abu mai juriya mai zafi.
▪ Elevator:
Ana amfani da shi don ɗaga masu riƙe wafer zuwa ciki da waje da bututun quartz don lodawa ta atomatik da sauke wafern silicon.
Robot Canja wurin Wafer:
wanda ke gefen na'urar bututun tanderun, ana amfani da shi don cire wafer siliki ta atomatik daga akwatin kuma sanya shi a cikin bututun tanderun, ko cire shi bayan sarrafawa.
Ma'ajiyar Cassette Carousel:
Ana amfani da carousel ɗin ajiyar kaset don adana akwati mai ɗauke da wafers na silicon kuma ana iya jujjuya shi don samun damar mutum-mutumi.
▪ Kaset ɗin Wafer:
Ana amfani da kaset ɗin wafer don adanawa da canja wurin wafern siliki don sarrafawa.
Lokacin aikawa: Afrilu-22-2024