Za'a iya shirya suturar SiC ta hanyar shigar da tururin sinadarai (CVD), canji na precursor, fesa plasma, da dai sauransu. Rufin da aka shirya ta hanyar CHEMICAL tururi ajiya yana da daidaituwa kuma yana da ƙarfi, kuma yana da ƙima mai kyau. Amfani da methyl trichlosilane. (CHzSiCl3, MTS) a matsayin tushen silicon, SiC shafi shirya ...
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