Chemical Vapor Deposition (CVD) shine muhimmin fasahar jigon fina-finai na bakin ciki, galibi ana amfani dashi don shirya fina-finai masu aiki daban-daban da kayan aikin bakin ciki, kuma ana amfani dashi sosai a masana'antar semiconductor da sauran fannoni.
1. Ka'idar aiki na CVD
A cikin tsari na CVD, an kawo wani precursor na iskar gas (ɗaya ko fiye da gaseous precursor mahadi) a cikin lamba tare da substrate surface da kuma zafi zuwa wani zafin jiki don haifar da wani sinadaran dauki da kuma ajiya a kan substrate surface don samar da da ake so fim ko shafi. Layer. Samfurin wannan sinadari mai ƙarfi ne mai ƙarfi, yawanci mahadi na kayan da ake so. Idan muna son manne silicon a saman, za mu iya amfani da trichlorosilane (SiHCl3) a matsayin iskar gas na farko: SiHCl3 → Si + Cl2 + HCl Silicon zai ɗaure ga duk wani fili da aka fallasa (duka na ciki da waje), yayin da iskar chlorine da hydrochloric acid zasu kasance. a fitar da shi daga dakin.
2. Rarraba CVD
CVD thermal: Ta hanyar dumama iskar gas ɗin da za ta iya ruɗewa da ajiye shi a saman ƙasa. Plasma Enhanced CVD (PECVD): Ana ƙara Plasma zuwa CVD mai zafi don haɓaka ƙimar amsawa da sarrafa tsarin ajiya. Metal Organic CVD (MOCVD): Yin amfani da mahadi na ƙarfe na ƙarfe azaman iskar gas na farko, ana iya shirya fina-finai na ƙarafa da semiconductor, kuma galibi ana amfani da su wajen kera na'urori kamar LEDs.
3. Aikace-aikace
(1) Semiconductor masana'anta
Silicide fim: amfani da su shirya insulating yadudduka, substrates, kadaici yadudduka, da dai sauransu Nitride fim: yi amfani da shirya silicon nitride, aluminum nitride, da dai sauransu, amfani da LEDs, ikon na'urorin, da dai sauransu Metal fim: amfani da shirya conductive yadudduka, metallized. yadudduka, da sauransu.
(2) Fasahar nuni
Fim ɗin ITO: Fim ɗin oxide mai ɗaukar hoto, wanda aka saba amfani dashi a cikin nunin allo da allon taɓawa. Fim ɗin jan ƙarfe: ana amfani da shi don shirya yadudduka marufi, layin gudanarwa, da sauransu, don haɓaka aikin na'urorin nuni.
(3) Sauran filayen
Rubutun gani: gami da kayan kwalliyar da ke nuna kyama, matattarar gani, da sauransu. Rufin hana lalata: ana amfani da su a cikin sassan motoci, na'urorin sararin samaniya, da sauransu.
4. Halayen tsarin CVD
Yi amfani da yanayin zafi mai girma don haɓaka saurin amsawa. Yawancin lokaci ana yin su a cikin yanayi mara kyau. Dole ne a cire abubuwan da suka gurbata a saman sashin kafin zanen. Tsarin yana iya samun iyakoki akan abubuwan da za'a iya rufawa, watau iyakancewar zafin jiki ko gazawar amsawa. Rufin CVD zai rufe duk sassan ɓangaren, gami da zaren, ramukan makafi da saman ciki. Yana iya iyakance ikon rufe takamaiman wuraren da ake hari. Kaurin fim yana iyakance ta tsari da yanayin kayan aiki. Maɗaukaki mafi girma.
5. Amfanin fasahar CVD
Uniformity: Mai ikon cimma daidaituwa iri ɗaya a kan babban yanki na yanki.
Ƙarfafawa: Za a iya daidaita ƙimar ƙaddamarwa da kayan fim ta hanyar sarrafa magudanar ruwa da zazzabi na iskar gas na farko.
Versatility: Ya dace da ajiya na abubuwa iri-iri, kamar ƙarfe, semiconductor, oxides, da sauransu.
Lokacin aikawa: Mayu-06-2024