Fa'idodin tallafin jirgin ruwa na silicon carbide idan aka kwatanta da tallafin jirgin ruwa na quartz

Babban ayyuka nasiliki carbide jirgin ruwagoyon baya da kuma tallafin jirgin ruwa na quartz iri ɗaya ne.Silicon carbide jirgin ruwagoyon baya yana da kyakkyawan aiki amma babban farashi. Ya ƙunshi wata madaidaicin dangantaka tare da tallafin kwale-kwale na quartz a cikin kayan sarrafa baturi tare da matsanancin yanayin aiki (kamar kayan aikin LPCVD da na'urorin watsawa na boron). A cikin kayan sarrafa baturi tare da yanayin aiki na yau da kullun, saboda alaƙar farashi, silicon carbide da tallafin kwale-kwalen quartz sun zama nau'ikan gasa tare.

① Matsalolin musanya a cikin LPCVD da kayan aikin watsawa na boron

Ana amfani da kayan aikin LPCVD don iskar shakawar ƙwayar baturi da tsarin shirye-shiryen Layer na polysilicon doped. Ƙa'idar aiki:

Ƙarƙashin ƙananan yanayi, haɗe tare da zafin jiki mai dacewa, halayen sinadaran da kuma samar da fina-finai suna samuwa don shirya ultra-bakin ciki tunneling oxide Layer da polysilicon fim. A cikin tunneling hadawan abu da iskar shaka da kuma doped polysilicon Layer shiri tsari, da jirgin ruwan goyon bayan da high aiki zafin jiki da kuma silicon film za a ajiye a kan surface. Matsakaicin haɓakar haɓakar thermal na quartz ya bambanta da na silicon. Lokacin da aka yi amfani da shi a cikin tsarin da ke sama, ya zama dole a riƙa ɗauka akai-akai da cire silicon da aka ajiye a saman don hana tallafin kwale-kwalen ma'adini daga karye saboda haɓakawar thermal da ƙugiya saboda bambancin haɓakar haɓakar thermal na silicon. Saboda yawan zazzaɓi da ƙarancin zafin jiki, mai riƙe jirgin ruwa na ma'adini yana da ɗan gajeren rayuwa kuma ana maye gurbinsa akai-akai a cikin ramin oxidation da tsarin shirye-shiryen Layer na polysilicon, wanda ke haɓaka farashin samar da ƙwayar baturi. The fadada coefficient nasiliki carbideyana kusa da na siliki. Hadeddesiliki carbide jirgin ruwamariƙin baya buƙatar pickling a cikin rami hadawan abu da iskar shaka da kuma doped polysilicon Layer shiri tsari. Yana da babban ƙarfin zafin jiki da tsawon rayuwar sabis. Yana da kyau madadin mai riƙe jirgin ruwa na quartz.

Ana amfani da kayan aikin fadada Boron musamman don aiwatar da abubuwan da ake amfani da su na boron akan nau'in silicon wafer substrate na tantanin batir don shirya emitter nau'in P don samar da haɗin PN. Ka'idar aiki ita ce gane halayen sinadarai da samuwar fim ɗin jigilar kwayoyin halitta a cikin yanayi mai zafi. Bayan da aka kafa fim din, ana iya watsa shi ta hanyar dumama zafin jiki don gane aikin doping na farfajiyar wafer silicon. Saboda yawan zafin aiki na kayan aikin faɗaɗa boron, mai ɗaukar jirgin ruwa na quartz yana da ƙarancin ƙarfin zafi da ɗan gajeren rayuwar sabis a cikin kayan faɗaɗa boron. Hadeddesiliki carbide jirgin ruwamariƙin yana da babban ƙarfin zafin jiki kuma shine kyakkyawan madadin mai riƙe jirgin ruwa na quartz a cikin tsarin faɗaɗa boron.

② Sauya dangantaka a cikin sauran kayan aikin tsari

Tallafin kwale-kwalen SiC yana da ƙarfin samarwa da ingantaccen aiki. Farashin su gabaɗaya ya fi na tallafin kwale-kwalen quartz. Gabaɗaya yanayin aiki na kayan sarrafa tantanin halitta, bambancin rayuwar sabis tsakanin tallafin jirgin ruwa na SiC da tallafin kwale-kwalen quartz kaɗan ne. Abokan ciniki na ƙasa sun fi kwatanta da zaɓi tsakanin farashi da aiki bisa ga tsarin nasu da bukatunsu. Tallafin kwale-kwalen SiC da tallafin kwale-kwale na quartz sun zama tare kuma masu gasa. Koyaya, babban ribar tallafin kwale-kwalen SiC yana da girma a halin yanzu. Tare da raguwar farashin samarwa na tallafin kwale-kwalen SiC, idan farashin siyar da siyar da jirgin ruwan SiC ya ragu sosai, hakanan zai haifar da babbar gasa ga tallafin kwale-kwalen kwata-kwata.

Ragowar amfani

Hanyar fasahar tantanin halitta ita ce fasahar PERC da fasahar TOPCon. Kasuwar kasuwa na fasahar PERC shine kashi 88%, kuma kasuwar fasahar TOPCon shine kashi 8.3%. Haɗin kasuwar hannayen jarin biyu shine 96.30%.

Kamar yadda aka nuna a hoton da ke ƙasa:

A cikin fasahar PERC, ana buƙatar tallafin kwale-kwale don yaɗuwar phosphorus na gaba da tafiyar matakai. A cikin fasahar TOPCon, ana buƙatar tallafin kwale-kwale don watsawar boron na gaba, LPCVD, watsawar phosphorus na baya da tafiyar matakai. A halin yanzu, ana amfani da tallafin jirgin ruwa na silicon carbide a cikin tsarin LPCVD na fasahar TOPCon, kuma an tabbatar da aikace-aikacen su a cikin tsarin yaduwar boron.

Hoto Aikace-aikacen tallafin jirgin ruwa a cikin tsarin sarrafa tantanin halitta

Lura: Bayan shafi na gaba da baya na fasahar PERC da TOPCon, har yanzu akwai hanyoyin haɗin gwiwa kamar bugu na allo, sintering da gwaji da rarrabawa, waɗanda ba su haɗa da amfani da tallafin jirgin ruwa ba kuma ba a jera su a cikin adadi na sama ba.