I-PECVD Graphite Wafer Support

I-PECVD Graphite Wafer Wafer Isithombe Esifakiwe

Incazelo emfushane:

Idizayinelwe ukunemba nokusebenza, i-VET Energy's Graphite Wafer Support iyinto efanelekile ukuze isetshenziswe ekucutshungulweni kwe-wafer okuthuthukisiwe, lapho ukuqina okushisayo okuphezulu nokusebenza okungaguquki kubalulekile. Noma ngabe usebenza ngama-wafers we-semiconductor noma amanye ama-substrates athambile, lokhu kusekelwa kwekhwalithi ephezulu kwegraphite kuzothuthukisa ukuthembeka kwenqubo yakho kanye nekhwalithi yomkhiqizo, kukwenze kube ingxenye ebalulekile ekukhiqizeni kwesimanje.

Thumela i-imeyili kithi Landa njenge-PDF

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-VET Energy PECVD inqubo ye-graphite wafer support iwumgogodla osetshenziswayo oklanyelwe i-PECVD (i-plasma enhanced chemical vapor deposition) inqubo. Lo mkhiqizo wenziwe nge-high-purity, high-density graphite material, enokumelana okuhle kakhulu nokushisa okuphezulu, ukumelana nokugqwala, ukuzinza kwe-dimensional nezinye izici, inganikeza isiteji sokusekela esizinzile senqubo ye-PECVD, ukuze kuqinisekiswe ukufana nokulingana kokumiswa kwefilimu.

Idizayini ye-"graphite support" ye-VET Energy graphite wafer support ayikwazi nje ukusekela ngokuphumelelayo i-wafer, kodwa futhi inikeze ukuzinza okushisayo ekushiseni okuphezulu kanye ne-high pressure ye-PECVD imvelo ukuze kuqinisekiswe ukuzinza kwenqubo.

Inqubo ye-VET Energy PECVD ukwesekwa kwe-wafer ye-graphite inezici ezilandelayo:

▪Ukuhlanzeka okuphezulu:okuqukethwe kokungcola okuphansi kakhulu, gwema ukungcoliswa kwefilimu, ukuze kuqinisekiswe ikhwalithi yefilimu.

▪Ukuminyana okuphezulu:ukuminyana okuphezulu, amandla aphezulu emishini, angakwazi ukumelana nokushisa okuphezulu nokucindezela okuphezulu kwemvelo ye-PECVD.

▪Ukuzinza okuhle kwe-dimensional:izinguquko ezincane ze-dimensional ekushiseni okuphezulu ukuze kuqinisekiswe ukuzinza kwenqubo.

▪I-thermal conductivity enhle kakhulu:dlulisa kahle ukushisa ukuze uvimbele ukushisisa kwe-wafer.

▪Ukumelana nokugqwala okuqinile:Iyakwazi ukumelana nokuguguleka ngamagesi ahlukahlukene agqwalayo kanye ne-plasma.

▪Isevisi eyenziwe ngokwezifiso:Amathebula okusekela ama-graphite anosayizi abahlukene kanye nokuma kungenziwa ngokwezifiso ngokuya ngezidingo zamakhasimende.

Izinto zegraphite ezivela ku-SGL:

Ipharamitha ejwayelekile: R6510
Inkomba	Izinga lokuhlola	Inani	Iyunithi
Usayizi wokusanhlamvu omaphakathi	ISO 13320	10	μm
Ukuminyana ngobuningi	I-DIN IEC 60413/204	1.83	g/cm³
I-porosity evulekile	I-DIN66133	10	%
Usayizi wembotshana ophakathi	I-DIN66133	1.8	μm
Ukuvumeleka	I-DIN 51935	0.06	cm²/s
Ukuqina kwe-Rockwell HR5/100	I-DIN IEC60413/303	90	HR
Ukumelana nogesi okuqondile	I-DIN IEC 60413/402	13	μΩm
Amandla e-Flexural	I-DIN IEC 60413/501	60	I-MPa
Amandla acindezelayo	I-DIN 51910	130	I-MPa
I-modulus yentsha	I-DIN 51915	11.5×10³	I-MPa
Ukunwetshwa kokushisa (20-200 ℃)	I-DIN 51909	4.2X10^-6	K^-1
I-Thermal conductivity (20 ℃)	I-DIN 51908	105	Wm^-1K^-1

Yakhelwe ngokukhethekile ukukhiqizwa kwamaseli elanga asebenza kahle kakhulu, asekela ukucutshungulwa kwe-wafer yosayizi omkhulu we-G12. Idizayini yenkampani yenethiwekhi ethuthukisiwe inyusa kakhulu ukusebenza, inika amandla amanani esivuno aphezulu kanye nezindleko zokukhiqiza eziphansi.

Into	Uhlobo	Inombolo yenethiwekhi ye-wafer
Isikebhe se-PEVCD Grephite - Uchungechunge lwe-156	156-13 grephite isikebhe	144
	156-19 grephite isikebhe	216
	156-21 grephite isikebhe	240
	156-23 graphite isikebhe	308
Isikebhe se-PEVCD Grephite - Uchungechunge lwe-125	125-15 grephite isikebhe	196
	125-19 grephite isikebhe	252
	125-21 isikebhe se-grphite	280