I-graphite Wafer Boat for Deposition

Incazelo emfushane:

I-VET Energy graphite wafer boat iyikhwalithi ephezulu esebenzisekayo eyenzelwe izinqubo zokubeka ku-semiconductor, photovoltaic nezinye izimboni. Yenziwe ngezinto ezicwengekile, ezinobukhulu obuphezulu be-graphite, lo mkhiqizo unokumelana okuhle kakhulu nezinga lokushisa eliphezulu, ukumelana nokugqwala, ukuzinza kwe-dimensional nezinye izici, futhi unganikeza inkundla yenethiwekhi ezinzile yenqubo yokubeka ukuze kuqinisekiswe ukufana nokucaba kwefilimu encane. .


Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-VET Energy graphite wafer boat iyikhwalithi ephezulu esebenzisekayo eyenzelwe izinqubo zokubeka ku-semiconductor, photovoltaic nezinye izimboni. Yenziwe ngezinto ezicwengekile, ezinobukhulu obuphezulu be-graphite, lo mkhiqizo unokumelana okuhle kakhulu nezinga lokushisa eliphezulu, ukumelana nokugqwala, ukuzinza kwe-dimensional nezinye izici, futhi unganikeza inkundla yenethiwekhi ezinzile yenqubo yokubeka ukuze kuqinisekiswe ukufana nokucaba kwefilimu encane. .

Isikebhe se-PECVD se-graphite esivela ku-VET Energy sakhiwe nge-high-purity isostatic graphite, equkethe i-porosity engaphansi kuka-15% kanye nobulukhuni obuphezulu obungu-Ra≤1.6μm. Ukuzinza kwe-dimensional ephakeme kanye nokusebenza okushisayo kuqinisekisa ukumiswa kwefilimu okufanayo kanye nokusebenza kahle kwamaseli.

Izinto zegraphite ezivela ku-SGL:

Ipharamitha ejwayelekile: R6510

Inkomba Izinga lokuhlola Inani Iyunithi
Usayizi wokusanhlamvu omaphakathi ISO 13320 10 μm
Ukuminyana ngobuningi I-DIN IEC 60413/204 1.83 g/cm3
I-porosity evulekile I-DIN66133 10 %
Usayizi wembotshana ophakathi I-DIN66133 1.8 μm
Ukuvumeleka I-DIN 51935 0.06 cm²/s
Ukuqina kwe-Rockwell HR5/100 I-DIN IEC60413/303 90 HR
Ukumelana nogesi okuqondile I-DIN IEC 60413/402 13 μΩm
Amandla e-Flexural I-DIN IEC 60413/501 60 I-MPa
Amandla acindezelayo I-DIN 51910 130 I-MPa
I-modulus yentsha I-DIN 51915 11.5×10³ I-MPa
Ukunwetshwa kokushisa (20-200 ℃) I-DIN 51909 4.2X10-6 K-1
I-Thermal conductivity (20 ℃) I-DIN 51908 105 Wm-1K-1

Yakhelwe ngokukhethekile ukukhiqizwa kwamaseli elanga asebenza kahle kakhulu, asekela ukucutshungulwa kwe-wafer yosayizi omkhulu we-G12. Idizayini yenkampani yenethiwekhi ethuthukisiwe inyusa kakhulu ukusebenza, inika amandla amanani esivuno aphezulu kanye nezindleko zokukhiqiza eziphansi.

isikebhe se-graphite
Into Uhlobo Inombolo yenethiwekhi ye-wafer
Isikebhe se-PEVCD Grephite - Uchungechunge lwe-156 156-13 grephite isikebhe 144
156-19 grephite isikebhe 216
156-21 grephite isikebhe 240
156-23 graphite isikebhe 308
Isikebhe se-PEVCD Grephite - Uchungechunge lwe-125 125-15 grephite isikebhe 196
125-19 grephite isikebhe 252
125-21 isikebhe se-grphite 280
Izinzuzo Zomkhiqizo
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