Amandla we-VETI-PECVD process graphite carrier iyikhwalithi ephezulu esebenzisekayo eqondiswe ku-PECVD (i-plasma enhanced chemical vapor deposition) inqubo. Lesi sithwali se-graphite senziwe nge-high-purity, high-density graphite material, enokumelana okuhle kakhulu nokushisa okuphezulu, ukumelana nokugqwala, ukuzinza kwe-dimensional kanye nezinye izici, inganikeza isiteji esithwala esizinzile senqubo ye-PECVD, ukuqinisekisa ukufana nokuvuleka kwefilimu encane. ukubeka.
Abathwali be-graphite benqubo ye-PECVD banezici ezilandelayo:
▪ Ukuhlanzeka okuphezulu: okuqukethwe ukungcola okuphansi kakhulu, ukugwema ukungcoliswa kwefilimu nokuqinisekisa ikhwalithi yefilimu.
▪ Ukuminyana okuphezulu: ukuminyana okuphezulu, amandla aphezulu emishini, ekwazi ukumelana nokushisa okuphezulu kanye ne-high pressure ye-PECVD imvelo.
▪ Ukuzinza okuhle kwe-dimensional: ukuguquka kwe-dimensional encane ekushiseni okuphezulu, okuqinisekisa ukuzinza kwenqubo.
▪ I-thermal conductivity enhle kakhulu: dlulisa kahle ukushisa ukuze uvimbele ukushisisa kwe-wafer.
▪ Ukumelana nokugqwala okuqinile: ikwazi ukumelana nokuguguleka kwamagesi agqwalayo ahlukahlukene kanye ne-plasma.
▪ Isevisi eyenziwe ngokwezifiso: abathwali be-graphite abanobukhulu obuhlukahlukene kanye nokuma kungenziwa ngokwezifiso ngokwezidingo zamakhasimende.
Izinto zegraphite ezivela ku-SGL:
Ipharamitha ejwayelekile: R6510 | |||
Inkomba | Izinga lokuhlola | Inani | Iyunithi |
Usayizi wokusanhlamvu omaphakathi | ISO 13320 | 10 | μm |
Ukuminyana ngobuningi | I-DIN IEC 60413/204 | 1.83 | g/cm3 |
I-porosity evulekile | I-DIN66133 | 10 | % |
Usayizi wembotshana ophakathi | I-DIN66133 | 1.8 | μm |
Ukuvumeleka | I-DIN 51935 | 0.06 | cm²/s |
Ukuqina kwe-Rockwell HR5/100 | I-DIN IEC60413/303 | 90 | HR |
Ukumelana nogesi okuqondile | I-DIN IEC 60413/402 | 13 | μΩm |
Amandla e-Flexural | I-DIN IEC 60413/501 | 60 | I-MPa |
Amandla acindezelayo | I-DIN 51910 | 130 | I-MPa |
I-modulus yentsha | I-DIN 51915 | 11.5×10³ | I-MPa |
Ukunwetshwa kokushisa (20-200 ℃) | I-DIN 51909 | 4.2X10-6 | K-1 |
I-Thermal conductivity (20 ℃) | I-DIN 51908 | 105 | Wm-1K-1 |
Yakhelwe ngokukhethekile ukukhiqizwa kwamaseli elanga asebenza kahle kakhulu, asekela ukucutshungulwa kwe-wafer yosayizi omkhulu we-G12. Idizayini yenkampani yenethiwekhi ethuthukisiwe inyusa kakhulu ukusebenza, inika amandla amanani esivuno aphezulu kanye nezindleko zokukhiqiza eziphansi.
Into | Uhlobo | Inombolo yenethiwekhi ye-wafer |
Isikebhe se-PEVCD Grephite - Uchungechunge lwe-156 | 156-13 grephite isikebhe | 144 |
156-19 grephite isikebhe | 216 | |
156-21 grephite isikebhe | 240 | |
156-23 graphite isikebhe | 308 | |
Isikebhe se-PEVCD Grephite - Uchungechunge lwe-125 | 125-15 grephite isikebhe | 196 |
125-19 grephite isikebhe | 252 | |
125-21 isikebhe se-grphite | 280 |