Amandla we-VETIsikebhe se-PECVD se-graphite samaseli elanga siwumgogodla osetshenziswayo oklanyelwe i-PECVD (i-plasma enhanced chemical vapor deposition) inqubo yamaseli elanga. Isikebhe se-graphite senziwe nge-high-purity isostatic graphite ene-porosity engaphansi kuka-15% kanye nobukhulu obungaphezulu be-Ra≤1.6μm. Inezici ezinhle kakhulu ezifana nokumelana nokushisa okuphezulu, ukumelana nokugqwala, nokuzinza kwe-dimensional. Ukuzinza kwe-dimensional okuhle kakhulu kanye ne-thermal conductivity kuqinisekisa ukubekwa kwefilimu okufanayo futhi kuthuthukise ukusebenza kahle kwebhethri. Ingahlinzeka ngenkampani yenethiwekhi ezinzile endaweni yokushisa ephezulu kanye nengcindezi ephezulu ye-PECVD ukuze kuqinisekiswe ukufakwa okufanayo kanye nekhwalithi ephezulu yamafilimu amaseli elanga.
Izinto zegraphite ezivela ku-SGL:
Ipharamitha ejwayelekile: R6510 | |||
Inkomba | Izinga lokuhlola | Inani | Iyunithi |
Usayizi wokusanhlamvu omaphakathi | ISO 13320 | 10 | μm |
Ukuminyana ngobuningi | I-DIN IEC 60413/204 | 1.83 | g/cm3 |
I-porosity evulekile | I-DIN66133 | 10 | % |
Usayizi wembotshana ophakathi | I-DIN66133 | 1.8 | μm |
Ukuvumeleka | I-DIN 51935 | 0.06 | cm²/s |
Ukuqina kwe-Rockwell HR5/100 | I-DIN IEC60413/303 | 90 | HR |
Ukumelana nogesi okuqondile | I-DIN IEC 60413/402 | 13 | μΩm |
Amandla e-Flexural | I-DIN IEC 60413/501 | 60 | I-MPa |
Amandla acindezelayo | I-DIN 51910 | 130 | I-MPa |
I-modulus yentsha | I-DIN 51915 | 11.5×10³ | I-MPa |
Ukunwetshwa kokushisa (20-200 ℃) | I-DIN 51909 | 4.2X10-6 | K-1 |
I-Thermal conductivity (20 ℃) | I-DIN 51908 | 105 | Wm-1K-1 |
Yakhelwe ngokukhethekile ukukhiqizwa kwamaseli elanga asebenza kahle kakhulu, asekela ukucutshungulwa kwe-wafer yosayizi omkhulu we-G12. Idizayini yenkampani yenethiwekhi ethuthukisiwe inyusa kakhulu ukusebenza, inika amandla amanani esivuno aphezulu kanye nezindleko zokukhiqiza eziphansi.
Into | Uhlobo | Inombolo yenethiwekhi ye-wafer |
Isikebhe se-PEVCD Grephite - Uchungechunge lwe-156 | 156-13 grephite isikebhe | 144 |
156-19 grephite isikebhe | 216 | |
156-21 grephite isikebhe | 240 | |
156-23 graphite isikebhe | 308 | |
Isikebhe se-PEVCD Grephite - Uchungechunge lwe-125 | 125-15 grephite isikebhe | 196 |
125-19 grephite isikebhe | 252 | |
125-21 isikebhe se-grphite | 280 |