I-Graphite Boat C/C Carrier For Silicon Wafer PECVD

Isikebhe se-graphite esisetshenziswa ku-PECVD yomugqa wokukhiqiza amaseli elanga

Ukukhiqizwa kwamaseli elanga kudinga izinqubo eziyisithupha ezinkulu: ukuthumela umbhalo, ukusabalalisa, ukunamathisela, ukumboza, ukuphrinta isikrini kanye ne-sintering. Ekwenziweni kwamaseli elanga, inqubo yokumboza ishubhu ye-PECVD isebenzisa isikebhe segraphite njengomzimba osebenzayo. Inqubo yokumboza isebenzisa i-plasma ethuthukisiwe umhwamuko wamakhemikhali ukuze ifake ifilimu ye-silicon nitride ngaphambili kwewafa ye-silicon ukuze kuncishiswe ukukhanya kwelanga kanye nengaphezulu le-silicon wafer.

Izici zesikebhe sethu se-graphite se-PECVD:
1). Kuvunyelwe ukuqeda ubuchwepheshe "amalensi ombala" , ukuze uqiniseke ngaphandle kwe "coloe lens" ngesikhathi senqubo yesikhathi eside.
2). Yenziwe ngezinto ezingenisiwe zegraphite ezinobumsulwa obukhulu, okuqukethwe kokungcola okuphansi namandla aphezulu.
3). Kusetshenziswa i-ceramic engu-99.9% yokuhlanganiswa kwe-ceramic enokumelana nokugqwala okuqinile kanye nobufakazi be-brust.
4). Ukusebenzisa imishini yokucubungula ngokunemba ukuqinisekisa ukunemba kwengxenye ngayinye.

Ukucaciswa

I-Ningbo VET Energy Technology Co., Ltd iyibhizinisi lobuchwepheshe obuphezulu eligxile ekukhiqizeni nasekuthengisweni kwezinto ezisezingeni eliphezulu, izinto zokwakha kanye nobuchwepheshe obuhlanganisa i-graphite, i-silicon carbide, i-ceramics, ukwelashwa kwendawo efana ne-SiC coating, i-TaC enamathela, i-glassy carbon. i-coating, i-pyrolytic carbon coating, njll., le mikhiqizo isetshenziswa kakhulu ku-photovoltaic, semiconductor, amandla amasha, i-metallurgy, njll.

Ithimba lethu lezobuchwepheshe livela ezikhungweni eziphezulu zocwaningo lwasekhaya, futhi selithuthukise ubuchwepheshe obuningi obunamalungelo obunikazi ukuze kuqinisekiswe ukusebenza komkhiqizo nekhwalithi, linganikeza amakhasimende izixazululo zezinto ezibonakalayo.