I-CVD TaC coated plate susceptor

Incazelo emfushane:

I-VET Energy CVD TaC coated plate susceptor iwumkhiqizo osebenza kahle kakhulu oklanyelwe ukunikeza ukusebenza okungaguquki nokuthembekile esikhathini eside. Inokumelana nokushisa okuhle kakhulu nokufana okushisayo, ukuhlanzeka okuphezulu, ukumelana nokuguguleka, okuyenza ibe yisixazululo esiphelele sezinhlelo zokusebenza zokucubungula ama-wafer.

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Imininingwane Yomkhiqizo

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II-CVD TaC CoatedI-Plate Susceptor evela kwa-vet-china yakhelwe ukusebenza okuphezulu ezinqubweni ze-chemical vapor deposition (CVD). Le susceptor ine-robustI-taC (i-Tantalum Carbide) yokumboza, enikeza ukuzinza okungavamile kokushisa, ukumelana namakhemikhali, nokuqina, okuyenza ibe yisixazululo esifanelekile sokukhiqiza ama-semiconductor kanye nezicelo ezishisa kakhulu. II-CVD TaC coatingiqinisekisa ukumelana okuhle kakhulu kwe-oxidation nokugqoka, okuvumela i-susceptor ukuthi igcine ubuqotho bayo nokusebenza ezindaweni ezinzima.

i-vet-chinaI-CVD TaC CoatedI-Plate Susceptor igqama ngekhono layo lokusabalalisa ukushisa ngokulinganayo phakathi nezinqubo ze-CVD, iqinisekisa ukubekwa kwesendlalelo esinembile futhi ithuthukisa ukusebenza kahle kokwenziwa kwe-semiconductor. I-Ta-C enamathelayo inikeza ukuvikeleka okwengeziwe ekulimaleni kwamakhemikhali, kunweba ubude besikhathi se-susceptor kanye nokwenza ngcono ukusebenza kukonke. Ngenhlanganisela yobuchwepheshe obuthuthukisiwe be-CVD susceptor kanye nekhwalithi ephezulu yamakhemikhali ye-TaC, lesi sici siyingxenye ebalulekile yezimboni ezidinga ukunemba nokuthembeka ezindaweni ezinezinga lokushisa eliphezulu.

Kungakhathaliseki ukuthi isetshenziswa ekukhiqizeni ama-semiconductors noma ezinye izinhlelo zokusebenza zobuchwepheshe obuphezulu, i-I-CVD TaC Coated Plate Susceptoryakhelwe ukuhlangabezana nezidingo zokukhiqiza zesimanje. Isekelwe isithunzi se-Semicera sokuqamba izinto ezintsha nekhwalithi, lo mkhiqizo unikeza ukusebenza okuphakeme nokuhlala isikhathi eside, okuwenza kube ukukhetha okuthembekile kwezinqubo ze-CVD.

I-TaC coating iwuhlobo lwe-tantalum carbide (TaC) elungiselelwe ubuchwepheshe bokubeka umhwamuko ngokomzimba, inezici ezilandelayo:

1. Ubulukhuni obuphezulu: Ukuqina kwe-TaC enamathela kuphezulu, ngokuvamile kungafinyelela ku-2500-3000HV, kuwukunamathela okuhle kakhulu okuqinile.

2. Ukumelana nokugqoka: I-TaC enamathelayo ayigugi kakhulu, enganciphisa ngempumelelo ukuguga nokulimala kwezingxenye eziwumshini ngesikhathi sokusetshenziswa.

3. Ukumelana okuhle kwezinga lokushisa eliphezulu: I-TaC enamathelayo nayo ingagcina ukusebenza kwayo okuhle kakhulu ngaphansi kwendawo yokushisa ephezulu.

4. Ukuzinza okuhle kwamakhemikhali: I-TaC enamathelayo inokusimama okuhle kwamakhemikhali futhi ingamelana nokusabela kwamakhemikhali okuningi, njengama-asidi nezisekelo.

碳化钽涂层物理特性物理特性 Izici ezingokomzimba ze I-TaC enamathela
密度/ Ukuminyana	14.3 (g/cm³)
比辐射率 / Ukukhipha umoya okukhethekile	0.3
热膨胀系数 / I-coefficient yokwandisa ukushisa	6.3 10^-6/K
努氏硬度/ Ukuqina (HK)	2000 HK
电阻 / Ukumelana	1×10^-5 Om*cm
热稳定性 / Ukuzinza kwe-thermal	<2500℃
石墨尺寸变化 / Izinguquko zesayizi yegraphite	-10 ~ 20um
涂层厚度 / Ukuqina kwe-coating	≥20um inani elijwayelekile (35um±10um)

I-Ningbo VET Energy Technology Co., Ltd iyibhizinisi lobuchwepheshe obuphezulu eligxile ekukhiqizeni nasekuthengisweni kwezinto ezisezingeni eliphezulu, izinto zokwakha kanye nobuchwepheshe obumboza i-graphite, i-silicon carbide, i-ceramics, ukwelashwa kwendawo nokunye. Imikhiqizo isetshenziswa kabanzi ku-photovoltaic, semiconductor, amandla amasha, i-metallurgy, njll.

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