VET Energy silikoni carbide (SiC) epitaxial wafer jẹ iṣẹ-giga jakejado bandgap semikondokito ohun elo pẹlu iwọn otutu giga ti o dara julọ, igbohunsafẹfẹ giga ati awọn abuda agbara giga. O jẹ sobusitireti pipe fun iran tuntun ti awọn ẹrọ itanna agbara. Agbara VET nlo imọ-ẹrọ epitaxial MOCVD to ti ni ilọsiwaju lati dagba awọn ipele SiC epitaxial didara giga lori awọn sobusitireti SiC, ni idaniloju iṣẹ ṣiṣe to dara julọ ati aitasera ti wafer.
Silicon Carbide (SiC) Wafer Epitaxial nfunni ni ibamu ti o dara julọ pẹlu ọpọlọpọ awọn ohun elo semikondokito pẹlu Si Wafer, SiC Substrate, SOI Wafer, ati SiN Substrate. Pẹlu Layer epitaxial ti o lagbara, o ṣe atilẹyin awọn ilana ti ilọsiwaju gẹgẹbi idagbasoke Epi Wafer ati isọpọ pẹlu awọn ohun elo bi Gallium Oxide Ga2O3 ati AlN Wafer, ni idaniloju lilo ti o wapọ kọja awọn imọ-ẹrọ ọtọtọ. Ti a ṣe apẹrẹ lati ni ibamu pẹlu awọn ọna ṣiṣe mimu kasẹti ti ile-iṣẹ, o ṣe idaniloju awọn iṣẹ ṣiṣe ti o munadoko ati ṣiṣan ni awọn agbegbe iṣelọpọ semikondokito.
Laini ọja VET Energy ko ni opin si awọn wafers epitaxial SiC. A tun pese ọpọlọpọ awọn ohun elo sobusitireti semikondokito, pẹlu Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, bbl Ni afikun, a tun n ṣiṣẹ lọwọ ni idagbasoke awọn ohun elo semikondokito jakejado bandgap tuntun, gẹgẹ bi Gallium Oxide Ga2O3 ati AlN Wafer, lati pade ibeere ile-iṣẹ eletiriki agbara iwaju fun awọn ẹrọ iṣẹ ṣiṣe ti o ga julọ.
WAFERING ni pato
*n-Pm=n-iru Pm-Grade,n-Ps=n-iru Ps-Grade,Sl=Ogbede-lnsulating
Nkan | 8-inch | 6-inch | 4-inch | ||
nP | n-Pm | n-Ps | SI | SI | |
TTV(GBIR) | ≤6um | ≤6um | |||
Teriba (GF3YFCD) -Iye to peye | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
Warp(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV (SBIR) -10mmx10mm | <2μm | ||||
Wafer eti | Beveling |
Ipari dada
*n-Pm=n-iru Pm-Grade,n-Ps=n-iru Ps-Grade,Sl=Ogbede-lnsulating
Nkan | 8-inch | 6-inch | 4-inch | ||
nP | n-Pm | n-Ps | SI | SI | |
Dada Ipari | Polish Optical ẹgbẹ meji, Si- Face CMP | ||||
SurfaceRoughness | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
Awọn eerun eti | Ko si Gbigbanilaaye (ipari ati iwọn≥0.5mm) | ||||
Indents | Ko si Iyọọda | ||||
Awọn idọti (Si-Face) | Qty.≤5, Akopọ | Qty.≤5, Akopọ | Qty.≤5, Akopọ | ||
Awọn dojuijako | Ko si Iyọọda | ||||
Iyasoto eti | 3mm |