SiC ti a bo lẹẹdi MOCVD Wafer awọn gbigbe , Awọn Susceptors Graphite funSiC apọju,
Erogba n pese awọn alailagbara, Lẹẹdi epitaxy susceptors, Lẹẹdi atilẹyin sobsitireti, MOCVD Susceptor, SiC apọju, Wafer Susceptors,
Awọn anfani pataki ti awọn ifamọ lẹẹdi ti a bo SiC pẹlu mimọ ga julọ, ibora isokan ati igbesi aye iṣẹ to dara julọ. Wọn tun ni resistance kemikali giga ati awọn ohun-ini iduroṣinṣin gbona.
Iboju SiC ti sobusitireti Graphite fun awọn ohun elo Semikondokito ṣe agbejade apakan kan pẹlu mimọ ti o ga julọ ati resistance si oju-aye oxidizing.
CVD SiC tabi CVI SiC ti lo si Graphite ti awọn ẹya apẹrẹ ti o rọrun tabi eka. Ibora le ṣee lo ni awọn sisanra oriṣiriṣi ati si awọn ẹya ti o tobi pupọ.
Awọn ẹya:
· O tayọ Gbona mọnamọna Resistance
· O tayọ ti ara mọnamọna Resistance
· O tayọ Kemikali Resistance
· Super High ti nw
· Wiwa ni eka apẹrẹ
· Lilo labẹ Oxidizing Atmosphere
Ohun elo:
Awọn ohun-ini Aṣoju ti Ohun elo Graphite Ipilẹ:
Ìwúwo tó hàn gbangba: | 1,85 g / cm3 |
Itanna Resisiti: | 11 μΩm |
Agbara Flexural: | 49 MPa (500kgf/cm2) |
Lile okun: | 58 |
Eeru: | <5ppm |
Imudara Ooru: | 116 W/mK (100 kcal/mhr-℃) |
Erogba n pese awọn alailagbaraati lẹẹdi irinše fun gbogbo awọn ti isiyi epitaxy reactors. Portfolio wa pẹlu awọn ifunmọ agba fun awọn ohun elo ati awọn ẹya LPE, awọn ifunpa pancake fun LPE, CSD, ati awọn ẹya Gemini, ati awọn alamọja wafer kan fun awọn ohun elo ati awọn ẹya ASM.Nipa apapọ awọn ajọṣepọ to lagbara pẹlu awọn OEM asiwaju, imọran awọn ohun elo ati imọ-ẹrọ iṣelọpọ, SGL nfun apẹrẹ ti o dara julọ fun ohun elo rẹ.