SiC Coating Carrier Kuba RTP/RTA

SiC Coating Carrier For RTP/RTA Umfanekiso Featured

Inkcazelo emfutshane:

I-VET Energy SiC Coating Carrier ye-RTP/RTA yimveliso ephezulu yokusebenza eyilelwe ukubonelela ngokusebenza okungaguqukiyo nokuthembekileyo kwixesha elongeziweyo. Inokumelana nobushushu obuhle kakhulu kunye nokufana kwe-thermal, ukucoceka okuphezulu, ukuxhathisa ukhukuliseko, kuyenza ibe sisisombululo esifanelekileyo sokusetyenzwa kwe-wafer.

Indawo yeMvelaphi :eTshayina

Ulwakhiwo lweCrystal :FCCβphase

Ubuninzi :3.21 g/cm;

Ukuqina :2500 Vickers;

Ubungakanani benkozo :2~10μm;

Ukucoceka kwemichiza :99.99995%;

Umthamo wobushushu :640J·kg-1·K-1;

Iqondo lobushushu elingaphantsi :2700℃;

Amandla eFelexural :415 Mpa (RT 4-Point);

Imodyuli eNtsha:430 GPA (4pt bend, 1300℃);

Ukwandiswa kweThermal (CTE) :4.5 10-6K-1;

I-Thermal Conductivity:300(W/MK);

Thumela i-imeyile kuthi Khuphela njengePDF

Iinkcukacha zeMveliso

Iithegi zeMveliso

I-SiC Coating Carrier ye-RTP/RTA licandelo eliphambili elisetyenziswa kwiinkqubo zokwenziwa kwe-semiconductor ebizwa ngokuba yi-Rapid Thermal Processing & Annealing, sisebenzisa itekhnoloji yethu enelungelo elilodwa lomenzi wechiza ukwenza umthwali we-silicon carbide ubusulungeke kakhulu, ukunxiba okufanayo kunye nobomi benkonzo obugqwesileyo, njengoko. kunye nokumelana neekhemikhali eziphezulu kunye neempawu zokuzinza kwe-thermal.

Iimpawu zeemveliso zethu:

1. Ukumelana nobushushu obuphezulu be-oxidation ukuya kuthi ga kwi-1700℃.
2. Ukucoceka okuphezulu kunye nokufana kwe-thermal
3. Ukumelana nokugqwesa okugqwesileyo: i-asidi, i-alkali, ityuwa kunye ne-organic reagents.
4. Ubunzima obuphezulu, indawo edibeneyo, iincinci ezincinci.
5. Ubomi benkonzo ende kwaye buhlala ixesha elide

CVD SiC薄膜基本物理性能 Iimpawu ezisisiseko ze-CVD SiCukutyabeka
性质 / Ipropati	典型数值 / Ixabiso eliqhelekileyo
晶体结构 / Ulwakhiwo lweCrystal	FCC isigaba β多晶，主要為（111）取向
密度 / Ubuninzi	3.21 g/cm³
硬度 / Ukuqina	2500 维氏硬度 (500g umthwalo)
晶粒大小 / Ukhozo SiZe	2 ~ 10μm
纯度 / Ukucoceka kwemichiza	99.99995%
热容 / Umthamo wobushushu	640 J·kg^-1·K^-1
升华温度 / Iqondo lobushushu elisezantsi	2700℃
抗弯强度 / Amandla e-Flexural	415 MPa RT 4-inqaku
杨氏模量 / Imodyuli yabaselula	430 Gpa 4pt bend, 1300℃
导热系数 / ThermalUkuqhuba	300Wm^-1·K^-1
热膨胀系数 / Ukwandiswa kweThermal(CTE)	4.5×10^-6K^-1

I-VET Amandla ngumvelisi wokwenyani weemveliso zegraphite kunye ne-silicon carbide ezineengubo ezahlukeneyo ezifana nokwaleka kwe-SiC, i-TaC yokwambathisa, i-glassy carbon coating, i-pyrolytic carbon coating, njl., inokubonelela ngeendawo ezahlukeneyo ezilungiselelwe i-semiconductor kunye ne-photovoltaic industry.

Iqela lethu lobuchwephesha livela kumaziko aphezulu ophando lwasekhaya, linokubonelela ngezisombululo zemathiriyeli yobuchwephesha.

Sisoloko siphuhlisa iinkqubo eziphambili zokubonelela ngemathiriyeli ephucukileyo, kwaye sisebenze itekhnoloji eyodwa enelungelo elilodwa lomenzi wechiza, enokwenza iqhina phakathi kwengubo kunye ne-substrate ibe ngqongqo kwaye ingabikho lula ekuthinteleni.

Wamkelekile ngokufudumeleyo ukuba undwendwele umzi-mveliso wethu, makhe sibenengxoxo eyongezelelekileyo!