I-CVD (i-Chemical Vapor Deposition) yindlela eqhelekileyo esetyenziswayo yokulungisa i-silicon carbide coatings.Iingubo ze-silicon carbide zeCVDzineempawu ezininzi zokusebenza ezizodwa. Eli nqaku liza kwazisa indlela yokulungiselela i-CVD silicon carbide coating kunye neempawu zayo zokusebenza.
1. Indlela yokulungiselela yeI-CVD ye-silicon carbide yokugquma
Indlela ye-CVD iguqula i-precursors yegesi ibe yi-silicon carbide coatings eqinile phantsi kweemeko eziphezulu zokushisa. Ngokwezandulela ezahlukeneyo zegesi, inokohlulwa ibe yi-CVD yesigaba segesi kunye nesigaba solwelo seCVD.
1. I-CVD yesigaba somphunga
I-CVD yesigaba somphunga isebenzisa i-gaseous precursors, ngokuqhelekileyo i-organosilicon compounds, ukufezekisa ukukhula kweefilimu ze-silicon carbide. Iikhompawundi ze-organosilicon ezisetyenziswa ngokuqhelekileyo ziquka i-methylsilane, i-dimethylsilane, i-monosilane, njl., ezenza iifilimu ze-silicon carbide kwii-substrates zetsimbi ngokuthutha i-gaseous precursors kumagumbi okuphendula ubushushu obuphezulu. Iindawo zobushushu obuphezulu kwigumbi lokuphendula zidla ngokuveliswa ngokufudumeza kwe-induction okanye ukufudumeza okuxhathisayo.
2. Isigaba solwelo CVD
I-CVD yesigaba se-Liquid isebenzisa i-precursor ye-liquid, ngokuqhelekileyo i-solvent ye-organic equkethe i-silicon kunye ne-silanol compound, efudumalayo kwaye ifakwe ngumphunga kwigumbi lokuphendula, emva koko ifilimu ye-silicon carbide yenziwe kwi-substrate ngokusebenzisa i-chemical reaction.
2. Iimpawu zokusebenza zeI-CVD ye-silicon carbide yokugquma
1.Umsebenzi ogqwesileyo wobushushu obuphezulu
Iingubo ze-silicon carbide zeCVDzinika uzinzo lobushushu obuphezulu kunye nokumelana ne-oxidation. Iyakwazi ukusebenza kwiindawo eziphakamileyo zeqondo lokushisa kwaye inokumelana neemeko ezigqithisileyo kumaqondo aphezulu.
2.Iipropati ezilungileyo zoomatshini
I-CVD ye-silicon carbide yokugqumainobunzima obuphezulu kunye nokumelana nokunxiba kakuhle. Ikhusela i-metal substrates ekunxibe kunye nokubola, ukwandisa ubomi benkonzo yezinto eziphathekayo.
3. Ukuzinza kweekhemikhali okugqwesileyo
Iingubo ze-silicon carbide zeCVDzixhathisa kakhulu kwiikhemikhali eziqhelekileyo ezifana neeasidi, iialkali kunye neetyuwa. Ichasene nokuhlaselwa kweekhemikhali kunye nokubola kwe-substrate.
4. I-coefficient ye-friction ephantsi
I-CVD ye-silicon carbide yokugqumaine-coefficient ephantsi ye-friction kunye neempawu ezilungileyo zokuzithambisa. Iyanciphisa ukungqubana kunye nokunxiba kunye nokuphucula ukusebenza kakuhle kokusetyenziswa kwezinto.
5.Good conductivity thermal
I-CVD silicon carbide coating ineempawu ezilungileyo zokuqhuba i-thermal. Inokuqhuba ngokukhawuleza ukushisa kunye nokuphucula ukusebenza kakuhle kokutshatyalaliswa kobushushu besiseko sesinyithi.
6.Iimpawu ezigqwesileyo zokufakelwa kombane
I-CVD silicon carbide coating ineempawu ezilungileyo zokugquma umbane kwaye inokuthintela ukuvuza kwangoku. Isetyenziswa ngokubanzi ekukhuselweni kwe-insulation yezixhobo zombane.
7. Ubukhulu obuhlengahlengiswayo kunye nokwakheka
Ngokulawula iimeko ngexesha lenkqubo ye-CVD kunye nokuxinwa kwe-precursor, ubukhulu kunye nokubunjwa kwefilimu ye-silicon carbide inokulungiswa. Oku kubonelela ngokhetho oluninzi kunye nokuguquguquka kweentlobo ezahlukeneyo zezicelo.
Ngamafutshane, i-CVD silicon carbide coating inomgangatho ophezulu wokusebenza kobushushu obuphezulu, iipropathi ezigqwesileyo zoomatshini, uzinzo oluhle lweekhemikhali, i-coefficient ephantsi yokhuhlane, i-thermal conductivity elungileyo kunye neempawu zokugquma umbane. Ezi zakhiwo zenza i-CVD silicon carbide coatings isetyenziswe ngokubanzi kwiinkalo ezininzi, kubandakanya i-electronics, i-optics, i-aerospace, imboni yeekhemikhali, njl.
Ixesha lokuposa: Mar-20-2024