Isakhiwo sangaphakathi sezixhobo zetyhubhu yesithando somlilo sichazwe ngokucacileyo

Njengoko kubonisiwe ngasentla, yinto eqhelekileyo

Isiqingatha sokuqala:
I-Heating Element (i-coil yokufudumala) : ejikeleze ityhubhu yesithando somlilo, ngokuqhelekileyo yenziwe ngeengcingo zokumelana, ezisetyenziselwa ukutshisa ngaphakathi kwityhubhu yesithando somlilo.
I-Quartz Tube: Undoqo wesithando somlilo se-oxidation, esenziwe nge-quartz ecocekileyo enokumelana nokushisa okuphezulu kwaye ihlale i-inert yekhemikhali.
Ukutya kweGesi: Ifumaneka phezulu okanye kwicala lombhobho wesithando somlilo, isetyenziselwa ukuthutha i-oksijini okanye ezinye iigesi ukuya ngaphakathi kwityhubhu yesithando somlilo.
I-SS Flange: amacandelo adibanisa iibhubhu ze-quartz kunye nemigca yegesi, ukuqinisekisa ukuqina kunye nokuzinza koqhagamshelwano.
Imibhobho yokuTya igesi: Imibhobho edibanisa i-MFC kwizibuko lokubonelela ngerhasi yokuhambisa igesi.
I-MFC (I-Mass Flow Controller) : Isixhobo esilawula ukuhamba kwegesi ngaphakathi kwityhubhu ye-quartz ukulawula ngokuchanekileyo inani legesi efunekayo.
I-Vent: Isetyenziselwa ukukhupha igesi ephuma ngaphakathi kwityhubhu yesithando somlilo ukuya ngaphandle kwesixhobo.

Inxalenye esezantsi
Ii-Silicon Wafers kwi-Holder: Ii-Silicon wafers zigcinwe kwi-Holder ekhethekileyo ukuqinisekisa ukushisa okufanayo ngexesha le-oxidation.
Isibambi se-Wafer: Isetyenziselwa ukubamba i-silicon wafer kunye nokuqinisekisa ukuba i-silicon wafer ihlala izinzile ngexesha lenkqubo.
I-Pedestal: Isakhiwo esibamba isiBambi se-silicon wafer, esihlala senziwe ngemathiriyeli yokumelana nobushushu obuphezulu.
I-elevator: Isetyenziselwa ukuphakamisa izibambi ze-Wafer ukungena nokuphuma kwiityhubhu ze-quartz ukuze zilayishe ngokuzenzekelayo kunye nokothula iziphaluka ze-silicon.
I-Wafer Transfer Robot: ibekwe kwicala lesixhobo setyhubhu yesithando somlilo, isetyenziselwa ukususa ngokuzenzekelayo isiqwenga se-silicon ukusuka kwibhokisi kwaye siyibeke kwityhubhu yesithando somlilo, okanye siyisuse emva kokucubungula.
I-Cassette Storage Carousel: I-Cassette yokugcina i-carousel isetyenziselwa ukugcina ibhokisi equkethe ii-silicon wafers kwaye inokujikelezwa ukufikelela kwi-robot.
I-Wafer Cassette: i-wafer cassette isetyenziselwa ukugcina kunye nokudlulisa ii-silicone wafers ukuba zisetyenzwe.