Isakhiwo sangaphakathi sezixhobo zetyhubhu yesithando somlilo sichazwe ngokucacileyo

Njengoko kubonisiwe ngasentla, yinto eqhelekileyo

Isiqingatha sokuqala:

▪ Into yokufudumeza (ikhoyili yokufudumeza) :

ibekwe malunga netyhubhu yesithando somlilo, edla ngokwenziwa ngeengcingo zokuxhathisa, ezisetyenziselwa ukufudumeza ngaphakathi kwityhubhu yesithando somlilo.

▪ Umbhobho weQuartz:

Undoqo wesithando somlilo se-oxidation, esenziwe nge-quartz ecocekileyo enokumelana nokushisa okuphezulu kwaye ihlale i-inert yekhemikhali.

▪ Ukutya kwerhasi:

Ifumaneka kwindawo ephezulu okanye kwicala lombhobho wesithando somlilo, isetyenziselwa ukuthutha i-oksijini okanye ezinye iigesi ukuya ngaphakathi kwiphubhu yesithando somlilo.

▪ I-SS Flange:

amacandelo adibanisa iibhubhu ze-quartz kunye nemigca yegesi, ukuqinisekisa ukuqina kunye nokuzinza koqhagamshelwano.

▪ Imizila yeGesi:

Imibhobho edibanisa i-MFC kwizibuko lokubonelela ngegesi yokuhambisa igesi.

▪ I-MFC (IsiLawuli sokuHamba kweSininzi) :

Isixhobo esilawula ukuhamba kwegesi ngaphakathi kwityhubhu yequartz ukulawula ngokuchanekileyo ubungakanani begesi efunekayo.

▪ Ukuvula:

Isetyenziselwa ukukhupha igesi yokukhupha ngaphakathi kwityhubhu yesithando somlilo ukuya ngaphandle kwesixhobo.

Inxalenye engezantsi:

▪ Ii-Silicon Wafers ezikwiSibambi:

Ii-silicone wafers zigcinwe kwi-Holder ekhethekileyo ukuqinisekisa ukushisa okufanayo ngexesha le-oxidation.

▪ IsiPhathi seWafer:

Isetyenziselwa ukubamba i-silicon wafer kunye nokuqinisekisa ukuba i-silicon wafer ihlala izinzile ngexesha lenkqubo.

▪ Isiseko:

Isakhiwo esibambe iSilicon wafer Holder, esihlala senziwe ngezinto ezinokumelana nobushushu obuphezulu.

▪ Ilifti:

Isetyenziselwa ukuphakamisa izibambi zeWafer ukungena nokuphuma kwiityhubhu zequartz zokulayisha ngokuzenzekelayo kunye nokothula ii-wafers zesilicon.

▪ Irobhothi yoKugqithisela iWafer:

ebekwe kwicala lesixhobo setyhubhu yesithando somlilo, isetyenziselwa ukususa ngokuzenzekelayo isiqwenga se-silicon ukusuka kwibhokisi kwaye sibeke kwityhubhu yesithando somlilo, okanye siyisuse emva kokucubungula.

▪ Ikhasethi Yokugcina Iikhasethi:

I-Cassette yokugcina i-carousel isetyenziselwa ukugcina ibhokisi equkethe ii-silicon wafers kwaye inokujikelezwa ukufikelela kwi-robot.

▪ Ikhasethi yeWafer:

I-wafer cassette isetyenziselwa ukugcina nokudlulisa ii-silicone wafers ukuba zisetyenzwe.