I-MOCVD Substrate heater, i-Heating Elements ye-MOCVD

Inkcazelo emfutshane:

Amacandelo okufudumala kwegraphite asetyenziswa kwiziko lobushushu obuphezulu kunye nobushushu obufikelele kwi-2200 degree kwindawo ye-vacuum kunye ne-3000 degree kwindawo ye-deoxidized kunye ne-gas efakwe.
Iimpawu eziphambili zesifudumezi segraphite:
1. ukufana kwesakhiwo sokufudumala.
2. Ukuqhuba kakuhle kombane kunye nomthwalo ophezulu wombane.
3. ukumelana nomhlwa.
4. i-inoxidizability.
5. ukucoceka kweekhemikhali eziphezulu.
6. amandla aphezulu oomatshini.
Inzuzo inamandla okusebenza, ixabiso eliphezulu kunye nokugcinwa okuphantsi.
Sinokuvelisa i-anti-oxidation kunye nobomi obude be-graphite crucible, i-graphite mold kunye nazo zonke iindawo zesifudumezi segraphite.
Iiparamitha eziphambili zesifudumezi segraphite:


Iinkcukacha zeMveliso

Iithegi zeMveliso

MOCVD Substrate heater, Izinto zokufudumeza ze-MOCVD,
isifudumezi segraphite, isifudumezi, MOCVD Substrate heater,

Ubomi obude be-SIC Coated Graphite Heater ye-MOCVD K465i

Iisifudumezi segraphiteAmacandelo asetyenziswa kwiziko lobushushu obuphezulu kunye nobushushu obufike kwi-2200 degree kwindawo ye-vacuum kunye ne-3000 degree kwindawo ye-deoxidized kunye ne-gas efakwe.
Iimpawu eziphambili zeisifudumezi segraphite:
1. ukufana kwesakhiwo sokufudumala.
2. Ukuqhuba kakuhle kombane kunye nomthwalo ophezulu wombane.
3. ukumelana nomhlwa.
4. i-inoxidizability.
5. ukucoceka kweekhemikhali eziphezulu.
6. amandla aphezulu oomatshini.
Inzuzo inamandla okusebenza, ixabiso eliphezulu kunye nokugcinwa okuphantsi.
Sinokuvelisa i-anti-oxidation kunye nobomi obude be-graphite crucible, i-graphite mold kunye nazo zonke iindawo zegraphiteisifudumezi.
Iiparamitha eziphambili zegraphiteisifudumezi:

Inkcazo yobuGcisa

IVET-M3

Ubuninzi Bobuninzi (g/cm3)

≥1.85

Umxholo wothuthu (PPM)

≤500

Ukuqina konxweme

≥45

Ukuchasa okuKhethekileyo (μ.Ω.m)

≤12

Amandla e-Flexural (Mpa)

≥40

Amandla acinezelayo (Mpa)

≥70

Max. Ubungakanani bozinkozo (μm)

≤43

I-Coefficient yoKwandiswa kweThermal Mm/°C

≤4.4 * 10-6

 

Isifudumezi seGraphite kwiziko lombane sineempawu zokumelana nobushushu, ukumelana ne-oxidation, ukuhanjiswa kombane okuhle kunye nokuqina komatshini. Sinomatshini weentlobo ezahlukeneyo zeheater yegraphite ngokoyilo lwabathengi.

Ubomi obude be-SIC Coated Graphite Heater ye-MOCVD K465iUbomi obude be-SIC Coated Graphite Heater ye-MOCVD K465i


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