I-CVD TaC coated plate susceptor

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I-VET Energy CVD i-TaC coated plate susceptor yimveliso esebenza kakhulu eyilelwe ukunika ukusebenza okungaguqukiyo nokuthembekileyo kwithuba elide. Inokumelana nobushushu obuhle kakhulu kunye nokufana kwe-thermal, ukucoceka okuphezulu, ukuxhathisa ukhukuliseko, kuyenza ibe sisisombululo esifanelekileyo sokusetyenzwa kwe-wafer.

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ICVD TaC CoatedI-Plate Susceptor evela kwi-vet-china yenzelwe ukusebenza okuphezulu kwiinkqubo ze-chemical vapor deposition (CVD). Le susceptor features a robustTaC (Tantalum Carbide) ukutyabeka, enikezela ukuzinza okukhethekileyo kwe-thermal, ukumelana neekhemikhali, kunye nokuqina, okwenza kube sisisombululo esifanelekileyo sokwenziwa kwe-semiconductor kunye nezicelo zokushisa okuphezulu. ICVD TaC ukutyabekaiqinisekisa ukuchasana okugqwesileyo kwi-oxidation kunye nokugqoka, ukuvumela i-susceptor ukuba igcine ingqibelelo yayo kunye nokusebenza kwiindawo ezinzima.

i-vet-chinaCVD TaC CoatedI-Plate Susceptor igqamile ngokukwazi kwayo ukusasaza ubushushu ngokulinganayo ngexesha leenkqubo ze-CVD, iqinisekisa ukubekwa okuchanekileyo kunye nokuphucula ukusebenza kakuhle kwe-semiconductor fabrication. I-Ta-C yokwambathisa ibonelela ngokhuseleko olongezelelweyo ngokuchasene nokubola kweekhemikhali, ukwandisa ixesha lokuphila le-susceptor kunye nokuphucula ukusebenza ngokubanzi. Ngokudityaniswa kobuchwephesha be-CVD susceptor obuphezulu kunye nomgangatho ophezulu weekhemikhali ze-TaC zokugquma, le susceptor licandelo eliphambili kumashishini afuna ukuchaneka kunye nokuthembeka kwiindawo zobushushu obuphezulu.

Nokuba isetyenziswe kwimveliso yee-semiconductors okanye ezinye iinkqubo zobugcisa obuphezulu, iI-CVD TaC Coated Plate Susceptoryenzelwe ukuhlangabezana neemfuno zemveliso yanamhlanje. Ixhaswa ludumo lweSemicera lokuqamba izinto ezintsha kunye nomgangatho, le mveliso ibonelela ngokusebenza okuphezulu kunye nokuqina okuhlala ixesha elide, iyenza ibe lukhetho oluthembekileyo kwiinkqubo zeCVD.

Ukwaleka kwe-TaC luhlobo lwe-tantalum carbide (TaC) yokwambathisa elungiswe yitekhnoloji yokubeka umphunga womzimba, inezi mpawu zilandelayo:

1. Ubulukhuni obuphezulu: Ukuqina kwe-TaC yokwambathisa kuphezulu, ngokuqhelekileyo kunokufikelela kwi-2500-3000HV, yinto ebalaseleyo yokugquma.

2. Ukumelana nokunxiba: I-TaC yokwambathisa ayigugi kakhulu, enokuthi inciphise ngokufanelekileyo ukunxiba kunye nokonakala kwamalungu oomatshini ngexesha lokusetyenziswa.

3. Ukumelana kakuhle nobushushu obuphezulu: I-TaC yokwambathisa inokugcina ukusebenza kwayo okugqwesileyo phantsi kwemekobume yobushushu obuphezulu.

4. Uzinzo olululo lweekhemikhali: I-TaC yokwambathisa inozinzo olululo lweekhemikhali kwaye inokumelana neentshukumo ezininzi zeekhemikhali, ezinjengeeasidi kunye neziseko.

碳化钽涂层物理特性物理特性 Iimpawu ezibonakalayo ze I-TaC ukutyabeka
密度/ Ubuninzi	14.3 (g/cm³)
ILogo Simahla Akukho mlinganiselo Ipapashwe ngu- 比辐射率 / Ukukhutshwa kwezinto ezithile	0.3
热膨胀系数 / Ukwandiswa kwe-Thermal coefficient	6.3 10^-6/K
努氏硬度/ Ukuqina (HK)	2000 HK
电阻 / Ukuchasa	1×10^-5 Ohm*cm
热稳定性 / Ukuzinza kweThermal	<2500℃
石墨尺寸变化 / Ubungakanani bokutshintsha kwegrafu	-10 ~ -20um
涂层厚度 / Ubukhulu bokugquma	≥20um ixabiso eliqhelekileyo (35um±10um)

I-Ningbo VET Energy Technology Co., Ltd lishishini lobugcisa obuphezulu obugxile kwimveliso kunye nokuthengiswa kwezinto eziphezulu eziphezulu, izixhobo kunye nobuchwepheshe obugquma igraphite, i-silicon carbide, i-ceramics, unyango lomphezulu kunye nokunye. Iimveliso zisetyenziswa ngokubanzi kwi-photovoltaic, semiconductor, amandla amatsha, isinyithi, njl.

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