Silicon Carbide Coated Wafer Susceptor Disc

Tlhaloso e Khutšoanyane:

VET Energy silicon carbide coated wafer susceptor disc ke sehlahisoa se sebetsang hantle se etselitsoeng ho fana ka ts'ebetso e tsitsitseng le e tšepahalang ka nako e telele. E na le ho hanyetsa mocheso o motle haholo le ho tšoana ha mocheso, bohloeki bo phahameng, ho hanyetsa khoholeho ea mobu, e leng se etsang hore e be tharollo e phethahetseng bakeng sa lisebelisoa tsa ho lokisa li-wafer.


Lintlha tsa Sehlahisoa

Li-tag tsa Sehlahisoa

Silicon Carbide Wafer Disc ke karolo ea bohlokoa e sebelisoang lits'ebetsong tse fapaneng tsa tlhahiso ea semiconductor. re sebelisa theknoloji ea rona e nang le tokelo ea molao ho etsa hore silicon carbide disc e bolokehe ka bohloeki bo phahameng ka ho fetesisa, ho ts'oana hantle ha moaparo le bophelo bo botle ba ts'ebeletso, hammoho le ho hanyetsa lik'hemik'hale tse phahameng le thepa ea botsitso ba mocheso.

VET Energy ke moetsi oa 'nete oa lihlahisoa tsa graphite le silicon carbide tse nang le liaparo tse fapaneng tse kang SiC, TaC, pyrolytic carbon, glassy-carbon, joalo-joalo, e ka fana ka likarolo tse sa tšoaneng tse hlophisitsoeng bakeng sa indasteri ea semiconductor le photovoltaic. Sehlopha sa rona sa tekheniki se tsoa litsing tse phahameng tsa lipatlisiso tsa lapeng, se ka u fa litharollo tsa lisebelisoa tse eketsehileng bakeng sa hau.

Re ntse re tsoela pele ho nts'etsapele lits'ebetso tse tsoetseng pele ho fana ka lisebelisoa tse tsoetseng pele, 'me re entse theknoloji e ikhethileng e nang le tokelo ea molao, e ka etsang hore maqhama lipakeng tsa pente le substrate e tiee le hore e se ke ea oela habonolo.

Flijo tsa lihlahisoa tsa rona:

1. Ho hanyetsa mocheso o phahameng oa oxidation ho fihlela ho 1700.
2. Bohloeki bo phahameng leho lumellana ha mocheso
3. Ho hanyetsa kutu e ntle haholo: acid, alkali, letsoai le li-reagents tsa manyolo.
4. Boima bo phahameng, bokaholimo bo kopanetsoeng, likaroloana tse ntle.
5. Bophelo bo bolelele ba tšebeletso le bo tšoarellang haholoanyane

CVD SiC薄膜基本物理性能

Lintho tsa motheo tsa 'mele tsa CVD SiCho roala

性质 / Thepa

典型数值 / Boleng bo Tlwaelehileng

晶体结构 / Sebopeho sa Crystal

FCC mohato oa β多晶,主要為(111)取向

密度 / Ho teteana

3.21 g/cm³

硬度 / Ho thatafala

2500 维氏硬度 (moroalo oa 500g)

晶粒大小 / Mabele SiZe

2 ~ 10μm

纯度 / Bohloeki ba lik'hemik'hale

99.99995%

热容 / Bokhoni ba mocheso

640 J·kg-1·K-1

升华温度 / Sublimation Mocheso

2700 ℃

抗弯强度 / Flexural Matla

415 MPa RT 4-ntlha

杨氏模量 / Young's Modulus

430 Gpa 4pt kobeha, 1300 ℃

导热系数 / ThermalBoikhantšo

300Wm-1·K-1

热膨胀系数 / Katoloso ea Mocheso(CTE)

4.5×10-6K-1

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Re u amohela ka mofuthu hore u etele feme ea rona, ha re buisaneng ka ho eketsehileng!

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